[Scan]
initial_time=2016-01-15T20:26:19
final_time=2016-01-15T20:26:48
ip_count=19
run=1023
dataset=1
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.85774E-6
ql1_vset=
ql1_vmon=-8.80042E1
ql1_imon=-7.66313E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.19942E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.86834E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.36171E-8
mult1=-9.47571E-9
mult2=-2.71346E-9
rf_tmon=-4.23812E-3
rf_agc=3.34271E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=6.25658E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.22052E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.8544E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04435E1
cs_ea1_imon=2.56239E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02694E0
lens1_imon=1.58965E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.49965E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84767E1
cs_ef1a_imon=2.96324E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.06844E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11856E1
os_restr1_imon=4.25959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.35763E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02133E1
cs_anode1_imon=2.9964E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.09019E-9
tplens_vset=0.0E0
tplens_vmon=-1.67448E0
tplens_imon=-2.23642E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99762E1
iondef3_imon=8.65896E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98906E1
iondef2_imon=9.06632E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03105E2
lens6_imon=2.98011E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=9.73916E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.76894E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74988E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2539E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70897E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02032E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11424E1
os_restr2_imon=3.41878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02212E1
cs_anode2_imon=2.25938E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58557E1
iondef1_imon=5.27391E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5028E1
iondef4_imon=5.1939E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.53483E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.24272E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02142E2
cs_ionfocb_imon=1.47688E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56615E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.93627E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.39358E-4
mask2_vset=0.0E0
mask2_vmon=-1.87119E1
mask2_imon=-8.1752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.13767E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.78439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.7195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33442E1
os_fil1_imon=9.41892E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65367E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.96678E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67137E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59993E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22898E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.41052E-2
chamber_ion_pmon=2.23764E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.78513E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.738E3	1.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80046E1	-1.09673E-3	-8.80013E1	8.10623E-4	4.52995E-3	9.64642E-2	1.58469E1	-1.98892E1	-1.99292E1	1.50196E1	2.23818E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.41966E-2
2.0E0	3.898E3	3.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80043E1	-1.21593E-3	-8.80016E1	9.05991E-4	4.74453E-3	9.62973E-2	1.58662E1	-1.98569E1	-1.99573E1	1.50135E1	2.22983E-9	2.51603E-3	2.51603E-3	6.29684E-3	2.40865E-2
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80045E1	-1.3113E-3	-8.80016E1	9.77516E-4	4.52995E-3	9.64403E-2	1.58544E1	-1.98915E1	-1.99547E1	1.5015E1	2.23665E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.40626E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80049E1	-1.0252E-3	-8.80019E1	1.00136E-3	4.33922E-3	9.63449E-2	1.58468E1	-1.98753E1	-1.99438E1	1.50412E1	2.23379E-9	2.52058E-3	2.52058E-3	6.31251E-3	2.42576E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80047E1	-9.29832E-4	-8.80017E1	7.86781E-4	4.36306E-3	9.62019E-2	1.58317E1	-1.98501E1	-1.99113E1	1.50547E1	2.24207E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41756E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80042E1	-7.86781E-4	-8.80014E1	1.09673E-3	4.36306E-3	9.63211E-2	1.58131E1	-1.98092E1	-1.99648E1	1.50298E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41127E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80043E1	-8.34465E-4	-8.80012E1	6.4373E-4	4.62532E-3	9.61542E-2	1.58401E1	-1.98717E1	-1.99606E1	1.49968E1	2.24402E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.40918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80044E1	-1.0252E-3	-8.80014E1	7.62939E-4	4.31538E-3	9.61304E-2	1.58377E1	-1.98134E1	-1.99444E1	1.50238E1	2.23429E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.41546E-2
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80042E1	-8.10623E-4	-8.80012E1	6.4373E-4	4.31538E-3	9.59873E-2	1.58095E1	-1.98597E1	-1.99414E1	1.50581E1	2.23526E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.40918E-2
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80044E1	-6.67572E-4	-8.80014E1	5.48363E-4	4.29153E-3	9.65118E-2	1.58161E1	-1.9841E1	-1.99258E1	1.50103E1	2.23429E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.40708E-2
1.4E1	1.36E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80043E1	-7.62939E-4	-8.80016E1	6.91414E-4	4.45843E-3	9.6488E-2	1.57967E1	-1.98446E1	-2.00446E1	1.5022E1	2.24347E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.40994E-2
1.5E1	1.19E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80044E1	-7.86781E-4	-8.80012E1	7.86781E-4	4.41074E-3	9.62734E-2	1.58329E1	-1.98549E1	-1.99246E1	1.49896E1	2.23915E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41966E-2
1.6E1	4.46E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80042E1	-7.62939E-4	-8.80011E1	6.4373E-4	4.43459E-3	9.62019E-2	1.58221E1	-1.9838E1	-1.99804E1	1.50382E1	2.24207E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.41546E-2
1.7E1	1.27E3	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80044E1	-1.0252E-3	-8.80018E1	7.62939E-4	4.19617E-3	9.62973E-2	1.58239E1	-1.98741E1	-1.9921E1	1.50292E1	2.2372E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.40708E-2
1.8E1	5.335E3	1.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80045E1	-5.72205E-4	-8.80013E1	5.72205E-4	4.41074E-3	9.62257E-2	1.58394E1	-1.98428E1	-1.9935E1	1.50282E1	2.24109E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.41127E-2
1.9E1	2.521E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80044E1	-6.91414E-4	-8.80016E1	5.00679E-4	4.55379E-3	9.62973E-2	1.58366E1	-1.98485E1	-1.99732E1	1.50309E1	2.23731E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.40865E-2
2.0E1	4.2E1	1.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80043E1	-7.39098E-4	-8.80015E1	1.0252E-3	4.62532E-3	9.66549E-2	1.58504E1	-1.98659E1	-1.99773E1	1.50575E1	2.24214E-9	2.52179E-3	2.52179E-3	6.3131E-3	2.42064E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80047E1	-7.39098E-4	-8.80015E1	5.48363E-4	4.64916E-3	9.63449E-2	1.58026E1	-1.98175E1	-1.99054E1	1.50068E1	2.24538E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.41405E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80041E1	-8.82149E-4	-8.80017E1	5.00679E-4	4.64916E-3	9.63449E-2	1.5824E1	-1.98796E1	-2.00283E1	1.504E1	2.23773E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.42851E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80042E1	-9.77516E-4	-8.80013E1	5.96046E-4	4.50611E-3	9.63211E-2	1.58557E1	-1.98906E1	-1.99762E1	1.5028E1	2.23764E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.41052E-2