[Scan]
initial_time=2016-01-15T20:26:58
final_time=2016-01-15T20:27:27
ip_count=19
run=1023
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.84604E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.71677E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.18641E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.80063E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.36007E-8
mult1=-9.28285E-9
mult2=-2.66671E-9
rf_tmon=-3.94164E-3
rf_agc=3.4343E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.79417E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6671E0
bslens_imon=2.38115E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.99402E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54956E1
cs_ef1b_imon=2.87918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02176E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04436E1
cs_ea1_imon=2.5605E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99178E0
lens1_imon=1.6492E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64952E1
os_ef1alow_imon=2.97143E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04041E1
cs_ea2_imon=1.50657E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84615E1
cs_ef1a_imon=2.96753E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.07203E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11753E1
os_restr1_imon=4.24693E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=2.3487E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.06718E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2508E0
cs_ionrep_imon=1.19354E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91972E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02289E1
cs_anode1_imon=2.98466E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.0978E-9
tplens_vset=0.0E0
tplens_vmon=-1.72968E0
tplens_imon=-2.19604E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99035E1
iondef3_imon=8.99206E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98573E1
iondef2_imon=9.27627E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.98213E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=9.65595E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22549E0
ionrepsh_imon=1.78144E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33704E1
lens5b_imon=2.16026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.12673E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24042E0
os_ea2_imon=-7.29633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0626E2
lens4b_imon=2.00751E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71556E1
cs_ef2a_imon=3.15748E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02147E0
os_ef2alow_imon=-2.41264E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20561E-1
os_ef2bup_imon=-5.20729E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11383E1
os_restr2_imon=3.41476E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.23929E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58335E1
iondef1_imon=5.18826E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5019E1
iondef4_imon=5.26295E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.53253E-8
olens1_vset=0.0E0
olens1_vmon=1.83582E-3
olens1_imon=1.24347E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14117E0
cs_ionaccel_imon=-1.68478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02116E2
cs_ionfocb_imon=1.473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56548E1
einzel_imon=7.84353E-6
window_vset=0.0E0
window_vmon=2.95068E-1
window_imon=-6.45539E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82786E2
mask1_imon=2.39325E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-6.65E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=6.74949E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.92859E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.11936E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38075E0
defgridb_imon=6.24336E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33463E1
os_fil1_imon=9.42005E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06953E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65232E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.97185E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63124E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66972E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26098E-2
os_fil2_imon=-2.73661E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91467E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66809E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34826E-1
cs_fil2_imon=-2.64579E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14919E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2284E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.40708E-2
chamber_ion_pmon=2.23915E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.08138E-1
res40_imon=-2.49048E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.775E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80045E1	-7.62939E-4	-8.80015E1	8.10623E-4	4.52995E-3	9.62734E-2	1.58383E1	-1.97953E1	-1.9972E1	1.50391E1	2.24012E-9	2.51675E-3	2.51675E-3	6.32518E-3	2.42623E-2
2.0E0	3.939E3	2.0E0	3.16E2	1.6E2	-7.286E-2	-8.80045E1	-8.34465E-4	-8.80014E1	7.62939E-4	4.29153E-3	9.64165E-2	1.58381E1	-1.98575E1	-1.99188E1	1.50103E1	2.23356E-9	2.51287E-3	2.51287E-3	6.30212E-3	2.40865E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80043E1	-6.19888E-4	-8.80014E1	8.82149E-4	4.17233E-3	9.62734E-2	1.58139E1	-1.98724E1	-1.99802E1	1.50329E1	2.23863E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80044E1	-1.16825E-3	-8.80013E1	6.67572E-4	4.64916E-3	9.59635E-2	1.58268E1	-1.98576E1	-1.99254E1	1.50617E1	2.2345E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.41876E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80041E1	-1.00136E-3	-8.80013E1	8.34465E-4	4.41074E-3	9.61304E-2	1.58315E1	-1.98411E1	-1.99473E1	1.50196E1	2.24347E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.41199E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80043E1	-9.05991E-4	-8.80013E1	8.10623E-4	4.43459E-3	9.63211E-2	1.58035E1	-1.98332E1	-1.99167E1	1.50491E1	2.23297E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.41405E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80046E1	-1.0252E-3	-8.80014E1	4.52995E-4	4.31538E-3	9.61304E-2	1.57873E1	-1.988E1	-1.99496E1	1.50431E1	2.23623E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.40708E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80046E1	-9.53674E-4	-8.80016E1	6.19888E-4	4.29153E-3	9.62496E-2	1.57692E1	-1.98308E1	-1.9951E1	1.50155E1	2.23964E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.41199E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80044E1	-9.05991E-4	-8.80015E1	5.48363E-4	4.1008E-3	9.64403E-2	1.58293E1	-1.98356E1	-1.99732E1	1.50085E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41127E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80042E1	-8.10623E-4	-8.80015E1	7.86781E-4	4.45843E-3	9.62734E-2	1.5851E1	-1.98603E1	-1.99336E1	1.5028E1	2.23915E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.40499E-2
1.4E1	1.63E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80042E1	-8.34465E-4	-8.80015E1	8.58307E-4	4.48227E-3	9.61065E-2	1.58239E1	-1.98711E1	-1.99324E1	1.50226E1	2.23818E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.40918E-2
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80042E1	-1.07288E-3	-8.80015E1	8.82149E-4	5.03063E-3	9.63449E-2	1.58132E1	-1.98611E1	-1.99591E1	1.50271E1	2.24109E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.41966E-2
1.6E1	4.63E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80044E1	-7.15256E-4	-8.80015E1	1.0252E-3	4.74453E-3	9.61065E-2	1.58401E1	-1.98248E1	-1.99642E1	1.50599E1	2.24634E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.41199E-2
1.7E1	1.211E3	1.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80045E1	-6.91414E-4	-8.80013E1	6.67572E-4	4.79221E-3	9.5892E-2	1.58244E1	-1.97992E1	-1.99201E1	1.50358E1	2.23623E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.41337E-2
1.8E1	5.335E3	6.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80044E1	-7.15256E-4	-8.80013E1	6.4373E-4	4.81606E-3	9.64165E-2	1.58287E1	-1.98681E1	-1.9933E1	1.50599E1	2.23583E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.41199E-2
1.9E1	2.626E3	1.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80043E1	-5.96046E-4	-8.80013E1	7.62939E-4	4.76837E-3	9.61542E-2	1.58297E1	-1.98653E1	-1.99449E1	1.50369E1	2.24109E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.42177E-2
2.0E1	4.4E1	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80044E1	-8.10623E-4	-8.80014E1	6.4373E-4	4.74453E-3	9.6035E-2	1.58107E1	-1.98446E1	-1.99594E1	1.50202E1	2.23392E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.40173E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80044E1	-7.39098E-4	-8.80018E1	7.15256E-4	4.88758E-3	9.62973E-2	1.58756E1	-1.98374E1	-1.99768E1	1.50851E1	2.22945E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.40082E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80045E1	-9.05991E-4	-8.80014E1	5.24521E-4	4.93526E-3	9.64165E-2	1.58137E1	-1.98284E1	-1.99444E1	1.50316E1	2.24012E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.41546E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80044E1	-6.91414E-4	-8.80017E1	4.05312E-4	4.72069E-3	9.60588E-2	1.58335E1	-1.98573E1	-1.99035E1	1.5019E1	2.23915E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.40708E-2