[Scan]
initial_time=2016-01-15T20:28:14
final_time=2016-01-15T20:28:40
ip_count=19
run=1023
dataset=1
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.83993E-6
ql1_vset=
ql1_vmon=-8.80047E1
ql1_imon=-7.86686E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.19802E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.8182E-9
ql4_vset=
ql4_vmon=1.07288E-3
ql4_imon=1.35918E-8
mult1=-1.01257E-8
mult2=-2.81243E-9
rf_tmon=-4.31415E-3
rf_agc=3.31533E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=6.16562E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69618E0
bslens_imon=2.31425E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19436E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.0475E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=2.87746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02622E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04429E1
cs_ea1_imon=2.55986E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0035E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03594E1
cs_ea2_imon=1.54795E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84959E1
cs_ef1a_imon=2.94017E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.06938E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.29094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.34609E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63251E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.20584E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91985E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02284E1
cs_anode1_imon=2.95819E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.15395E-9
tplens_vset=0.0E0
tplens_vmon=-1.67027E0
tplens_imon=-3.8947E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99372E1
iondef3_imon=8.92933E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98537E1
iondef2_imon=9.3439E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03122E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=9.63402E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.76894E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.15178E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74934E1
cs_ef2b_imon=3.16218E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27853E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06159E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11646E1
os_restr2_imon=3.38743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.25326E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58636E1
iondef1_imon=5.82547E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50509E1
iondef4_imon=5.04613E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.5336E-8
olens1_vset=0.0E0
olens1_vmon=1.88351E-3
olens1_imon=1.24005E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15597E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-5.21995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82737E2
mask1_imon=2.38886E-4
mask2_vset=0.0E0
mask2_vmon=-1.87113E1
mask2_imon=-8.31936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9251E3
multa_neg_imon=7.97042E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=6.48518E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=5.72814E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33434E1
os_fil1_imon=9.41105E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65123E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.969E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67061E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22829E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.4223E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.76E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80045E1	-1.12057E-3	-8.80015E1	9.53674E-4	4.57764E-3	9.60588E-2	1.58817E1	-1.99018E1	-1.99709E1	1.49974E1	2.24012E-9	2.52538E-3	2.52538E-3	6.34588E-3	2.41546E-2
2.0E0	3.882E3	1.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80041E1	-7.62939E-4	-8.80014E1	8.58307E-4	4.17233E-3	9.62973E-2	1.58589E1	-1.98771E1	-1.99463E1	1.50515E1	2.2406E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.40994E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80042E1	-7.62939E-4	-8.80014E1	6.91414E-4	4.22001E-3	9.61542E-2	1.57855E1	-1.98495E1	-1.99492E1	1.50076E1	2.2426E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.4255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80043E1	-9.29832E-4	-8.80014E1	9.05991E-4	4.48227E-3	9.63211E-2	1.58604E1	-1.98824E1	-1.99744E1	1.50393E1	2.23773E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.40788E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80043E1	-1.16825E-3	-8.80018E1	9.05991E-4	3.93391E-3	9.62734E-2	1.58017E1	-1.98134E1	-1.99756E1	1.50377E1	2.23818E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80045E1	-1.04904E-3	-8.80016E1	7.86781E-4	4.29153E-3	9.65118E-2	1.5797E1	-1.98544E1	-1.99532E1	1.5037E1	2.24012E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.40918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80044E1	-1.0252E-3	-8.80012E1	8.82149E-4	4.43459E-3	9.62734E-2	1.58077E1	-1.98627E1	-1.99504E1	1.50394E1	2.24344E-9	2.51922E-3	2.51922E-3	6.31421E-3	2.41597E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80043E1	-1.16825E-3	-8.80015E1	9.05991E-4	4.57764E-3	9.64642E-2	1.58558E1	-1.98655E1	-1.99414E1	1.5059E1	2.23863E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.41265E-2
1.2E1	1.17E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80045E1	-1.3113E-3	-8.80014E1	7.39098E-4	4.48227E-3	9.62734E-2	1.57804E1	-1.98286E1	-1.99373E1	1.50547E1	2.23526E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.41337E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80044E1	-1.35899E-3	-8.80015E1	7.62939E-4	4.62532E-3	9.61065E-2	1.58935E1	-1.97862E1	-1.99453E1	1.50366E1	2.24058E-9	2.52717E-3	2.52717E-3	6.29703E-3	2.41734E-2
1.4E1	1.43E2	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80044E1	-9.53674E-4	-8.80014E1	9.77516E-4	4.52995E-3	9.62257E-2	1.58734E1	-1.98145E1	-1.99732E1	1.50387E1	2.2427E-9	2.52338E-3	2.52338E-3	6.32483E-3	2.40893E-2
1.5E1	1.17E2	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80048E1	-1.04904E-3	-8.80014E1	8.58307E-4	4.36306E-3	9.64165E-2	1.58479E1	-1.99396E1	-1.99353E1	1.50151E1	2.24155E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.4223E-2
1.6E1	4.58E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80043E1	-5.96046E-4	-8.80015E1	9.53674E-4	4.48227E-3	9.64642E-2	1.58728E1	-1.98753E1	-1.98529E1	1.50317E1	2.23665E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.41693E-2
1.7E1	1.297E3	3.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80049E1	-1.26362E-3	-8.80017E1	7.62939E-4	4.05312E-3	9.64403E-2	1.57837E1	-1.98344E1	-1.99348E1	1.50425E1	2.2473E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.40583E-2
1.8E1	5.443E3	1.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80046E1	-9.29832E-4	-8.80016E1	6.91414E-4	4.36306E-3	9.64403E-2	1.5835E1	-1.98692E1	-1.99414E1	1.50116E1	2.24012E-9	2.51007E-3	2.51007E-3	6.32936E-3	2.41127E-2
1.9E1	2.585E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80044E1	-9.77516E-4	-8.80016E1	1.00136E-3	4.55379E-3	9.63449E-2	1.58341E1	-1.98729E1	-2.00141E1	1.50058E1	2.23566E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.40839E-2
2.0E1	3.9E1	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80046E1	-8.82149E-4	-8.80017E1	1.07288E-3	4.41074E-3	9.62496E-2	1.57795E1	-1.98597E1	-1.99888E1	1.50057E1	2.23915E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.41127E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80046E1	-7.62939E-4	-8.80017E1	7.86781E-4	4.62532E-3	9.63211E-2	1.58628E1	-1.98771E1	-1.99473E1	1.50264E1	2.2372E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.40918E-2
2.2E1	2.6E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80047E1	-7.86781E-4	-8.80014E1	5.24521E-4	4.55379E-3	9.62973E-2	1.58816E1	-1.98597E1	-1.99276E1	1.50406E1	2.23773E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.40994E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80047E1	-6.4373E-4	-8.80017E1	1.07288E-3	4.29153E-3	9.63211E-2	1.58636E1	-1.98537E1	-1.99372E1	1.50509E1	2.23583E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.4223E-2