[Scan]
initial_time=2016-01-15T20:29:25
final_time=2016-01-15T20:29:51
ip_count=19
run=1023
dataset=1
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.77323E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.47097E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.18579E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.73405E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.3583E-8
mult1=-7.21186E-9
mult2=-2.33336E-9
rf_tmon=-1.12297E-2
rf_agc=2.60335E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=6.48439E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72682E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04841E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.86557E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.01919E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04345E1
cs_ea1_imon=2.54941E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9302E0
lens1_imon=1.53197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.50217E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.95964E-5
olens2_vset=0.0E0
olens2_vmon=8.58307E-4
olens2_imon=1.06675E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15624E1
os_ea1_imon=2.35006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92018E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.97477E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99973E1
olens4_imon=4.20396E-9
tplens_vset=0.0E0
tplens_vmon=-1.66847E0
tplens_imon=-2.12827E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98885E1
iondef3_imon=8.44267E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98741E1
iondef2_imon=9.28983E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03115E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=9.89711E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23227E0
ionrepsh_imon=1.78047E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26592E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.1474E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.40292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.23235E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58642E1
iondef1_imon=5.32078E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50641E1
iondef4_imon=5.39572E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.53614E-8
olens1_vset=0.0E0
olens1_vmon=1.93119E-3
olens1_imon=1.24482E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82749E2
mask1_imon=2.38954E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.69284E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.33377E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50081E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.31935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33449E1
os_fil1_imon=9.4436E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65137E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.96221E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62828E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66867E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74687E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.97734E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22822E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.40583E-2
chamber_ion_pmon=2.24442E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47589E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.727E3	2.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80042E1	-1.14441E-3	-8.80015E1	8.34465E-4	4.57764E-3	9.62019E-2	1.58073E1	-1.98181E1	-1.99555E1	1.49818E1	2.23665E-9	2.51359E-3	2.51359E-3	6.33538E-3	2.41907E-2
2.0E0	3.935E3	7.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80042E1	-1.12057E-3	-8.80014E1	6.4373E-4	4.45843E-3	9.61781E-2	1.58528E1	-1.98669E1	-1.99864E1	1.50112E1	2.23392E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.41405E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80041E1	-1.0252E-3	-8.80015E1	4.52995E-4	4.36306E-3	9.64403E-2	1.58138E1	-1.98464E1	-1.99838E1	1.50387E1	2.23915E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.41546E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80042E1	-1.0252E-3	-8.80018E1	5.00679E-4	4.48227E-3	9.62257E-2	1.58069E1	-1.98698E1	-1.99561E1	1.50292E1	2.22983E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.42079E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80043E1	-1.35899E-3	-8.80018E1	7.86781E-4	4.48227E-3	9.62734E-2	1.58209E1	-1.98286E1	-1.99806E1	1.50109E1	2.23764E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.40626E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80042E1	-1.35899E-3	-8.80015E1	5.48363E-4	4.43459E-3	9.6488E-2	1.58025E1	-1.98632E1	-1.99516E1	1.5059E1	2.2323E-9	2.52509E-3	2.52509E-3	6.3126E-3	2.41933E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80041E1	-1.00136E-3	-8.80015E1	5.72205E-4	4.33922E-3	9.64165E-2	1.58392E1	-1.98446E1	-1.99408E1	1.50364E1	2.23961E-9	2.52106E-3	2.52106E-3	6.31321E-3	2.41781E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80042E1	-9.29832E-4	-8.80018E1	5.48363E-4	4.50611E-3	9.64165E-2	1.57928E1	-1.9849E1	-1.99475E1	1.5037E1	2.24061E-9	2.51826E-3	2.51826E-3	6.31014E-3	2.41337E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80041E1	-1.04904E-3	-8.80018E1	6.91414E-4	4.45843E-3	9.61304E-2	1.58449E1	-1.98747E1	-1.99385E1	1.50618E1					
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80043E1	-1.04904E-3	-8.80018E1	4.76837E-4	4.62532E-3	9.62973E-2	1.5851E1	-1.98434E1	-1.99744E1	1.50456E1	2.24058E-9	2.52717E-3	2.52717E-3	6.3282E-3	2.41337E-2
1.4E1	1.61E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80044E1	-1.00136E-3	-8.80017E1	7.39098E-4	4.3869E-3	9.62973E-2	1.58301E1	-1.98673E1	-1.99267E1	1.50316E1	2.23392E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.40788E-2
1.5E1	1.35E2	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80043E1	-1.00136E-3	-8.80016E1	5.00679E-4	4.31538E-3	9.62257E-2	1.58209E1	-1.9847E1	-1.9972E1	1.50281E1	2.23818E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41337E-2
1.6E1	4.05E2	2.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80042E1	-6.4373E-4	-8.80015E1	5.48363E-4	4.43459E-3	9.61542E-2	1.58185E1	-1.98302E1	-1.99648E1	1.50425E1	2.23869E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.4223E-2
1.7E1	1.292E3	3.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80041E1	-6.67572E-4	-8.80016E1	7.15256E-4	4.36306E-3	9.63449E-2	1.58516E1	-1.98537E1	-1.99167E1	1.49409E1	2.24062E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.41693E-2
1.8E1	5.438E3	2.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80041E1	-8.34465E-4	-8.80015E1	7.15256E-4	4.41074E-3	9.62019E-2	1.58239E1	-1.9832E1	-1.9927E1	1.50262E1	2.24304E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.41337E-2
1.9E1	2.6E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80043E1	-8.34465E-4	-8.80017E1	6.91414E-4	4.26769E-3	9.61542E-2	1.58275E1	-1.98585E1	-1.99498E1	1.50382E1	2.23202E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.40788E-2
2.0E1	4.9E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80045E1	-8.58307E-4	-8.80017E1	8.58307E-4	4.62532E-3	9.62973E-2	1.58419E1	-1.98416E1	-1.99738E1	1.5025E1	2.24109E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.40708E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80045E1	-8.34465E-4	-8.80012E1	5.24521E-4	4.673E-3	9.64403E-2	1.57861E1	-1.98399E1	-1.99425E1	1.503E1	2.23369E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.40839E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80044E1	-8.82149E-4	-8.80013E1	5.72205E-4	4.45843E-3	9.58681E-2	1.58401E1	-1.98573E1	-1.99276E1	1.50406E1	2.23731E-9	2.51709E-3	2.51709E-3	6.33919E-3	2.41067E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80045E1	-9.29832E-4	-8.80012E1	4.05312E-4	4.45843E-3	9.6035E-2	1.58642E1	-1.98741E1	-1.98885E1	1.50641E1	2.24442E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.40583E-2