[Scan]
initial_time=2016-01-15T20:30:01
final_time=2016-01-15T20:30:27
ip_count=19
run=1023
dataset=1
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.81767E-6
ql1_vset=
ql1_vmon=-8.80048E1
ql1_imon=-8.25775E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.20447E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.80432E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.36623E-8
mult1=-9.67129E-9
mult2=-2.70464E-9
rf_tmon=-4.66054E-3
rf_agc=3.31092E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=6.18434E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65861E0
bslens_imon=2.53821E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19714E1
lens5a_imon=1.98968E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04889E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53992E1
cs_ef1b_imon=2.85562E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04693E2
lens23_imon=1.02353E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04532E1
cs_ea1_imon=2.57823E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98271E0
lens1_imon=1.64357E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65095E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.51833E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84881E1
cs_ef1a_imon=2.95333E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.06458E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11198E1
os_restr1_imon=4.26616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15424E1
os_ea1_imon=2.35954E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63547E1
os_ef1bup_imon=3.07091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23139E0
cs_ionrep_imon=1.19154E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91976E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.97563E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.20723E-9
tplens_vset=0.0E0
tplens_vmon=-1.64834E0
tplens_imon=-2.65828E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99458E1
iondef3_imon=8.56462E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98365E1
iondef2_imon=9.39299E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03114E2
lens6_imon=2.98143E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=9.57048E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28661E0
ionrepsh_imon=1.79045E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33665E1
lens5b_imon=2.1686E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74677E1
cs_ef2b_imon=3.13051E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23139E0
os_ea2_imon=-9.24384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.0071E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71528E1
cs_ef2a_imon=3.15565E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07213E0
os_ef2alow_imon=-2.42804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94721E-1
os_ef2bup_imon=-5.23778E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.40216E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.28644E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01822E1
cs_anode2_imon=2.24136E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58395E1
iondef1_imon=5.31326E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50326E1
iondef4_imon=5.36463E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.53437E-8
olens1_vset=0.0E0
olens1_vmon=1.7643E-3
olens1_imon=1.23966E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16933E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47242E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.93111E-6
window_vset=0.0E0
window_vmon=2.60065E-1
window_imon=-6.23807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.3891E-4
mask2_vset=0.0E0
mask2_vmon=-1.86675E1
mask2_imon=-7.94094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=6.93273E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9366E3
defgrida_imon=7.1771E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.65755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33431E0
defgridb_imon=6.00081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33427E1
os_fil1_imon=9.41028E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07316E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64966E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30881E1
cs_fil1_imon=9.97426E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63392E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67257E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22601E-2
os_fil2_imon=-2.61416E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91268E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.42495E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22808E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40045E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86622E-1
res40_imon=-2.30235E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.709E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80048E1	-9.29832E-4	-8.80013E1	6.91414E-4	4.52995E-3	9.61304E-2	1.58527E1	-1.9851E1	-1.9946E1	1.50381E1	2.23684E-9	2.52359E-3	2.52359E-3	6.30124E-3	2.41337E-2
2.0E0	3.854E3	2.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80049E1	-1.12057E-3	-8.80013E1	6.19888E-4	4.3869E-3	9.61542E-2	1.5869E1	-1.98366E1	-1.99564E1	1.49904E1	2.23487E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.40788E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80047E1	-7.62939E-4	-8.80012E1	7.15256E-4	4.26769E-3	9.60588E-2	1.57989E1	-1.98492E1	-1.99425E1	1.503E1	2.24359E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.42121E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80043E1	-8.58307E-4	-8.80014E1	8.10623E-4	4.69685E-3	9.60112E-2	1.58192E1	-1.98887E1	-1.9948E1	1.50145E1	2.23263E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.41674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80047E1	-9.05991E-4	-8.80015E1	5.24521E-4	4.673E-3	9.63449E-2	1.58426E1	-1.98753E1	-1.99593E1	1.50528E1	2.24284E-9	2.52364E-3	2.52364E-3	6.31251E-3	2.41597E-2
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80044E1	-8.82149E-4	-8.80012E1	6.19888E-4	4.52995E-3	9.59635E-2	1.58218E1	-1.98329E1	-2.00815E1	1.49833E1	2.23858E-9	2.5199E-3	2.5199E-3	6.32483E-3	2.41115E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80046E1	-6.4373E-4	-8.80013E1	5.72205E-4	4.36306E-3	9.60112E-2	1.57395E1	-1.98546E1	-1.99768E1	1.5022E1	2.23251E-9	2.52022E-3	2.52022E-3	6.33611E-3	2.41276E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80043E1	-6.67572E-4	-8.80015E1	5.72205E-4	4.3869E-3	9.62734E-2	1.58404E1	-1.98476E1	-1.99768E1	1.50232E1	2.23915E-9	2.52867E-3	2.52867E-3	6.34037E-3	2.41546E-2
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80045E1	-4.05312E-4	-8.80017E1	4.29153E-4	4.22001E-3	9.62257E-2	1.58089E1	-1.98404E1	-1.99462E1	1.5004E1	2.23678E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.40994E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80046E1	-4.05312E-4	-8.80016E1	6.4373E-4	4.64916E-3	9.6035E-2	1.58582E1	-1.99125E1	-1.99426E1	1.50402E1	2.24251E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.40378E-2
1.4E1	1.44E2	0.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80047E1	-6.67572E-4	-8.80016E1	8.82149E-4	4.3869E-3	9.59635E-2	1.58179E1	-1.9834E1	-1.9949E1	1.50537E1	2.23623E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41337E-2
1.5E1	1.18E2	0.0E0	6.06E2	4.11E2	-7.13143E-2	-8.80043E1	-6.91414E-4	-8.80014E1	6.4373E-4	4.62532E-3	9.63211E-2	1.58462E1	-1.98663E1	-1.9927E1	1.50683E1	2.23699E-9	2.51863E-3	2.51863E-3	6.32371E-3	2.41267E-2
1.6E1	4.29E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80045E1	-7.15256E-4	-8.80016E1	5.96046E-4	4.81606E-3	9.61304E-2	1.58657E1	-1.9867E1	-1.99685E1	1.50022E1					
1.7E1	1.317E3	1.0E0	6.87E2	4.7E2	-7.286E-2	-8.80045E1	-5.72205E-4	-8.80015E1	3.33786E-4	5.00679E-3	9.59158E-2	1.58338E1	-1.98551E1	-1.99487E1	1.5019E1	2.23429E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.41756E-2
1.8E1	5.288E3	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80045E1	-8.82149E-4	-8.80014E1	7.62939E-4	4.74453E-3	9.62496E-2	1.58576E1	-1.98927E1	-1.99432E1	1.50154E1	2.2372E-9	2.52099E-3	2.52099E-3	6.26916E-3	2.41966E-2
1.9E1	2.578E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80047E1	-1.19209E-3	-8.80015E1	2.14577E-4	4.93526E-3	9.61304E-2	1.58463E1	-1.98419E1	-1.99697E1	1.50355E1	2.23549E-9	2.52056E-3	2.52056E-3	6.30989E-3	2.41305E-2
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80047E1	-8.82149E-4	-8.80015E1	5.72205E-4	4.64916E-3	9.61304E-2	1.58502E1	-1.9866E1	-1.9964E1	1.50788E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80046E1	-9.53674E-4	-8.80013E1	3.8147E-4	4.64916E-3	9.59873E-2	1.58079E1	-1.98352E1	-1.99697E1	1.50112E1	2.22964E-9	2.51439E-3	2.51439E-3	6.31332E-3	2.41035E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80049E1	-1.09673E-3	-8.80014E1	9.29832E-4	4.69685E-3	9.64642E-2	1.58047E1	-1.99072E1	-1.99888E1	1.50184E1	2.23726E-9	2.51578E-3	2.51578E-3	6.31817E-3	2.41097E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80048E1	-1.21593E-3	-8.80011E1	6.91414E-4	4.52995E-3	9.62734E-2	1.58395E1	-1.98365E1	-1.99458E1	1.50326E1