[Scan]
initial_time=2016-01-15T20:31:47
final_time=2016-01-15T20:32:13
ip_count=19
run=1023
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.84869E-6
ql1_vset=
ql1_vmon=-8.80046E1
ql1_imon=-7.44736E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.20683E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.81888E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=1.3596E-8
mult1=-1.03151E-8
mult2=-2.84672E-9
rf_tmon=-5.31764E-3
rf_agc=3.25599E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.88047E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=2.00614E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53991E1
cs_ef1b_imon=2.85359E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.58149E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=3.00094E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.51082E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84828E1
cs_ef1a_imon=2.93352E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.06336E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.27531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63004E1
os_ef1bup_imon=3.08504E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93734E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=2.95194E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99967E1
olens4_imon=4.19034E-9
tplens_vset=0.0E0
tplens_vmon=-1.64984E0
tplens_imon=-3.49815E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99355E1
iondef3_imon=8.77793E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98877E1
iondef2_imon=9.53857E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03117E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=9.76789E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.76317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74982E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26952E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.15837E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03429E0
os_ef2alow_imon=-2.64061E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86805E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11297E1
os_restr2_imon=3.4065E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24194E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58014E1
iondef1_imon=5.37125E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50118E1
iondef4_imon=5.488E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.52489E-8
olens1_vset=0.0E0
olens1_vmon=1.62125E-3
olens1_imon=1.23782E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17127E0
cs_ionaccel_imon=-1.77527E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47004E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.5245E-6
window_vset=0.0E0
window_vmon=2.26374E-1
window_imon=-5.27658E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.8697E1
mask2_imon=-1.00377E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=6.89975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33465E1
os_fil1_imon=9.42194E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07103E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.96883E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66705E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.29984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38266E-1
cs_fil2_imon=-2.5881E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.42354E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98013E-1
res40_imon=-2.42862E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=231
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.704E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80043E1	-5.24521E-4	-8.80013E1	6.4373E-4	4.57764E-3	9.61065E-2	1.58401E1	-1.98741E1	-1.99756E1	1.50503E1	2.23915E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41546E-2
2.0E0	3.83E3	2.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80045E1	-1.0252E-3	-8.80013E1	7.15256E-4	4.33922E-3	9.62257E-2	1.58093E1	-1.98588E1	-1.99585E1	1.4956E1	2.2426E-9	2.52585E-3	2.52585E-3	6.34099E-3	2.41479E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80047E1	-8.82149E-4	-8.80017E1	7.15256E-4	4.48227E-3	9.58443E-2	1.58303E1	-1.9824E1	-1.99178E1	1.50172E1	2.24109E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41966E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80048E1	-7.62939E-4	-8.80013E1	7.39098E-4	4.33922E-3	9.6035E-2	1.58197E1	-1.98659E1	-1.99178E1	1.5031E1	2.2406E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.42024E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80048E1	-6.67572E-4	-8.80013E1	5.96046E-4	4.19617E-3	9.64165E-2	1.58125E1	-1.98657E1	-2.00063E1	1.50172E1	2.24109E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.40708E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80049E1	-1.00136E-3	-8.80013E1	7.86781E-4	4.41074E-3	9.61304E-2	1.58431E1	-1.97966E1	-1.99558E1	1.50112E1	2.23869E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.42024E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.8005E1	-8.10623E-4	-8.80016E1	8.10623E-4	4.36306E-3	9.62973E-2	1.58079E1	-1.98936E1	-1.99242E1	1.50298E1	2.23526E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.40291E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80048E1	-1.00136E-3	-8.80016E1	7.39098E-4	4.24385E-3	9.64165E-2	1.57952E1	-1.98753E1	-1.995E1	1.50352E1	2.23964E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.40994E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80052E1	-1.19209E-3	-8.80014E1	8.82149E-4	4.19617E-3	9.62973E-2	1.58616E1	-1.98717E1	-1.9926E1	1.50717E1	2.23468E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.40413E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80045E1	-6.19888E-4	-8.80015E1	9.05991E-4	4.14848E-3	9.62496E-2	1.58675E1	-1.99054E1	-1.99773E1	1.50545E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41817E-2
1.4E1	1.21E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80043E1	-8.34465E-4	-8.80014E1	8.82149E-4	4.02927E-3	9.60588E-2	1.57744E1	-1.98686E1	-1.99677E1	1.50298E1	2.23915E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.41546E-2
1.5E1	1.21E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80039E1	-8.58307E-4	-8.80013E1	8.58307E-4	4.12464E-3	9.64642E-2	1.58492E1	-1.98676E1	-1.99632E1	1.50352E1	2.24012E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.42177E-2
1.6E1	4.53E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80043E1	-1.07288E-3	-8.80011E1	7.62939E-4	4.02927E-3	9.6488E-2	1.58954E1	-1.9826E1	-1.99726E1	1.50058E1	2.23583E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.40378E-2
1.7E1	1.252E3	5.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80043E1	-1.14441E-3	-8.80011E1	9.77516E-4	4.31538E-3	9.63211E-2	1.57579E1	-1.98233E1	-1.99622E1	1.5013E1	2.24558E-9	2.51581E-3	2.51581E-3	6.3074E-3	2.40839E-2
1.8E1	5.411E3	2.0E0	7.27E2	5.0E2	-7.42513E-2	-8.80044E1	-1.00136E-3	-8.80013E1	7.15256E-4	4.26769E-3	9.63449E-2	1.58419E1	-1.98681E1	-1.99258E1	1.50584E1	2.23818E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40499E-2
1.9E1	2.443E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80045E1	-9.05991E-4	-8.80011E1	6.67572E-4	4.48227E-3	9.62496E-2	1.58256E1	-1.98098E1	-1.99184E1	1.50259E1	2.23429E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.41756E-2
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80043E1	-1.35899E-3	-8.80012E1	7.86781E-4	4.52995E-3	9.62257E-2	1.58083E1	-1.98747E1	-1.9978E1	1.5007E1	2.24155E-9	2.51203E-3	2.51203E-3	6.30202E-3	2.41199E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80048E1	-1.0252E-3	-8.8001E1	7.39098E-4	4.57764E-3	9.61542E-2	1.57961E1	-1.98729E1	-1.99591E1	1.50352E1	2.24304E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.41546E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80043E1	-8.34465E-4	-8.80012E1	5.96046E-4	4.36306E-3	9.62734E-2	1.58286E1	-1.98269E1	-2.00163E1	1.501E1	2.2341E-9	2.52026E-3	2.52026E-3	6.30469E-3	2.41995E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80046E1	-7.39098E-4	-8.80011E1	6.19888E-4	4.26769E-3	9.62734E-2	1.58014E1	-1.98877E1	-1.99355E1	1.50118E1