[Scan]
initial_time=2016-01-15T20:32:59
final_time=2016-01-15T20:33:24
ip_count=19
run=1023
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.80733E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.99203E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.20913E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.82629E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.36941E-8
mult1=-9.57182E-9
mult2=-2.65274E-9
rf_tmon=-4.206E-3
rf_agc=3.33516E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=6.05226E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65259E0
bslens_imon=2.34104E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19921E1
lens5a_imon=1.98942E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12535E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5431E1
cs_ef1b_imon=2.82982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02003E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04492E1
cs_ea1_imon=2.5826E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9686E0
lens1_imon=1.67624E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64714E1
os_ef1alow_imon=2.98027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03647E1
cs_ea2_imon=1.50275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84887E1
cs_ef1a_imon=2.96194E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.05235E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1141E1
os_restr1_imon=4.27259E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14694E1
os_ea1_imon=2.349E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63217E1
os_ef1bup_imon=3.09929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24659E0
cs_ionrep_imon=1.19606E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02046E1
cs_anode1_imon=2.95894E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99967E1
olens4_imon=4.19629E-9
tplens_vset=0.0E0
tplens_vmon=-1.6849E0
tplens_imon=-2.70438E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9966E1
iondef3_imon=8.86424E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98416E1
iondef2_imon=9.20583E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03104E2
lens6_imon=2.9821E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=9.49514E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24475E0
ionrepsh_imon=1.75618E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34068E1
lens5b_imon=2.17711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74757E1
cs_ef2b_imon=3.1195E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23985E0
os_ea2_imon=-6.23044E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06173E2
lens4b_imon=2.00465E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71638E1
cs_ef2a_imon=3.1674E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05206E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81414E-1
os_ef2bup_imon=-5.36628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11473E1
os_restr2_imon=3.39383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29708E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02065E1
cs_anode2_imon=2.23775E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58275E1
iondef1_imon=5.12883E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50375E1
iondef4_imon=5.28136E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.52453E-8
olens1_vset=0.0E0
olens1_vmon=2.12193E-3
olens1_imon=1.2321E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17443E0
cs_ionaccel_imon=-2.13269E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02161E2
cs_ionfocb_imon=1.47597E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5628E1
einzel_imon=7.77018E-6
window_vset=0.0E0
window_vmon=2.7623E-1
window_imon=-7.21738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82738E2
mask1_imon=2.39118E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-8.45243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=5.98463E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.33629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58128E0
defgridb_imon=5.95892E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33442E1
os_fil1_imon=9.42008E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07392E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64134E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30876E1
cs_fil1_imon=9.96656E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63139E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52853E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82859E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43222E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36778E-1
cs_fil2_imon=-2.60636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.56116E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31925E-3
inlet_lpb_pmon=2.41488E-2
chamber_ion_pmon=2.24187E-9
chamber_cvt_pmon=2.51675E-3
foreline_cvt_pmon=2.51675E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11781E-1
res40_imon=-2.59303E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.758E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80041E1	-1.09673E-3	-8.80015E1	8.10623E-4	4.17233E-3	9.60588E-2	1.57997E1	-1.98529E1	-1.9988E1	1.50594E1	2.23764E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.41265E-2
2.0E0	3.847E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80044E1	-9.29832E-4	-8.80016E1	7.62939E-4	3.95775E-3	9.58204E-2	1.58001E1	-1.98477E1	-1.99561E1	1.50004E1	2.23392E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.41611E-2
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80046E1	-9.05991E-4	-8.80014E1	6.91414E-4	4.41074E-3	9.62734E-2	1.5811E1	-1.98776E1	-1.99709E1	1.50138E1	2.23665E-9	2.5147E-3	2.5147E-3	6.34661E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80046E1	-1.00136E-3	-8.80013E1	5.72205E-4	3.8147E-3	9.64403E-2	1.58401E1	-1.98663E1	-1.99666E1	1.5025E1	2.23544E-9	2.52553E-3	2.52553E-3	6.32328E-3	2.41674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80045E1	-1.07288E-3	-8.80014E1	6.19888E-4	3.95775E-3	9.62973E-2	1.58552E1	-1.98609E1	-1.99552E1	1.50124E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.42177E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80044E1	-1.21593E-3	-8.80014E1	6.4373E-4	3.98159E-3	9.67979E-2	1.58209E1	-1.98555E1	-1.9966E1	1.5016E1	2.24109E-9	2.51225E-3	2.51225E-3	6.3514E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80046E1	-1.0252E-3	-8.80016E1	6.4373E-4	3.8147E-3	9.6488E-2	1.58038E1	-1.98464E1	-1.99325E1	1.50394E1	2.2372E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80042E1	-1.19209E-3	-8.80015E1	4.52995E-4	4.24385E-3	9.61781E-2	1.58345E1	-1.98246E1	-1.99396E1	1.50306E1	2.23487E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.41611E-2
1.2E1	1.12E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80041E1	-7.62939E-4	-8.80014E1	6.91414E-4	4.24385E-3	9.63211E-2	1.58245E1	-1.98753E1	-1.99618E1	1.50503E1	2.23773E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.42024E-2
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80043E1	-7.39098E-4	-8.80015E1	6.67572E-4	4.00543E-3	9.61781E-2	1.57567E1	-1.9811E1	-1.99861E1	1.50378E1	2.24161E-9	2.51915E-3	2.51915E-3	6.34099E-3	2.41265E-2
1.4E1	1.7E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80043E1	-7.15256E-4	-8.80012E1	7.62939E-4	4.17233E-3	9.63449E-2	1.58233E1	-1.98216E1	-1.99431E1	1.50323E1	2.2372E-9	2.51662E-3	2.51662E-3	6.26371E-3	2.41127E-2
1.5E1	1.17E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80045E1	-5.00679E-4	-8.80014E1	7.86781E-4	4.31538E-3	9.64403E-2	1.58405E1	-1.98447E1	-1.99438E1	1.50064E1	2.24109E-9	2.51443E-3	2.51443E-3	6.34588E-3	2.40499E-2
1.6E1	4.29E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80045E1	-4.52995E-4	-8.80014E1	6.4373E-4	4.05312E-3	9.63449E-2	1.58231E1	-1.9835E1	-1.99765E1	1.50462E1	2.24499E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.41546E-2
1.7E1	1.214E3	1.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80044E1	-6.67572E-4	-8.80015E1	5.48363E-4	3.91006E-3	9.62973E-2	1.5823E1	-1.98578E1	-1.99395E1	1.50203E1	2.23322E-9	2.51575E-3	2.51575E-3	6.2557E-3	2.42731E-2
1.8E1	5.254E3	7.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80045E1	-8.34465E-4	-8.80017E1	8.10623E-4	4.00543E-3	9.64403E-2	1.58456E1	-1.9844E1	-1.99648E1	1.50322E1	2.23858E-9	2.51874E-3	2.51874E-3	6.34815E-3	2.42004E-2
1.9E1	2.612E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80048E1	-7.86781E-4	-8.80014E1	7.15256E-4	4.26769E-3	9.62257E-2	1.58395E1	-1.98392E1	-1.996E1	1.50478E1	2.24109E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.41127E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80046E1	-1.07288E-3	-8.80018E1	7.39098E-4	4.1008E-3	9.65357E-2	1.58362E1	-1.98576E1	-1.99584E1	1.50245E1	2.24012E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80049E1	-7.15256E-4	-8.80016E1	7.86781E-4	3.93391E-3	9.62496E-2	1.57935E1	-1.98516E1	-1.99882E1	1.50078E1	2.2369E-9	2.51886E-3	2.51886E-3	6.35953E-3	2.41138E-2
2.2E1	2.4E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80042E1	-7.62939E-4	-8.80015E1	5.96046E-4	3.62396E-3	9.65118E-2	1.58362E1	-1.98329E1	-1.99493E1	1.50367E1	2.23407E-9	2.51838E-3	2.51838E-3	6.29035E-3	2.41627E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80043E1	-8.10623E-4	-8.80013E1	8.34465E-4	3.91006E-3	9.63449E-2	1.58275E1	-1.98416E1	-1.9966E1	1.50375E1	2.24187E-9	2.51675E-3	2.51675E-3	6.31925E-3	2.41488E-2