[Scan]
initial_time=2016-01-15T20:33:34
final_time=2016-01-15T20:34:00
ip_count=19
run=1023
dataset=1
scan=37
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.77833E-6
ql1_vset=
ql1_vmon=-8.8004E1
ql1_imon=-7.8423E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.24662E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.89536E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.37352E-8
mult1=-1.09416E-8
mult2=-2.48612E-9
rf_tmon=-4.50948E-3
rf_agc=3.3781E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=6.30414E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70462E0
bslens_imon=2.29697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19884E1
lens5a_imon=2.01439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05045E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54217E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04694E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.58738E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99737E0
lens1_imon=1.65787E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03819E1
cs_ea2_imon=1.50716E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.95495E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=1.05599E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11652E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15116E1
os_ea1_imon=2.37875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2117E0
cs_ionrep_imon=1.18834E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91993E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.95891E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.21264E-9
tplens_vset=0.0E0
tplens_vmon=-1.70816E0
tplens_imon=-1.96979E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99998E1
iondef3_imon=8.88995E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98393E1
iondef2_imon=9.19848E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03069E2
lens6_imon=2.98181E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=9.77945E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29066E0
ionrepsh_imon=1.76904E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18335E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27658E0
os_ea2_imon=-6.85484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72002E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.39824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.24317E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58256E1
iondef1_imon=5.19862E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50839E1
iondef4_imon=5.33805E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.52492E-8
olens1_vset=0.0E0
olens1_vmon=1.43051E-3
olens1_imon=1.22632E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02155E2
cs_ionfocb_imon=1.47587E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.68999E-1
window_imon=-7.27421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82789E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.87011E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=8.05619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.60904E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.99837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43419E0
defgridb_imon=5.97729E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33425E1
os_fil1_imon=9.40132E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06963E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64169E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.95777E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62083E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65974E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69936E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.58981E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22702E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=2.41756E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03741E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=191
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.736E3	1.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80045E1	-7.62939E-4	-8.80014E1	9.05991E-4	3.91006E-3	9.62257E-2	1.57921E1	-1.98795E1	-1.99979E1	1.5034E1	2.2372E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.41127E-2
2.0E0	3.828E3	4.0E0	3.16E2	1.6E2	-7.17007E-2	-8.80044E1	-8.10623E-4	-8.80013E1	8.82149E-4	3.91006E-3	9.59396E-2	1.58295E1	-1.99016E1	-1.99396E1	1.50394E1	2.24207E-9	2.51771E-3	2.51771E-3	6.26371E-3	2.40499E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80046E1	-6.4373E-4	-8.80013E1	6.67572E-4	4.07696E-3	9.61065E-2	1.58348E1	-1.98515E1	-1.99668E1	1.50167E1	2.24359E-9	2.52139E-3	2.52139E-3	6.34661E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80045E1	-8.10623E-4	-8.80013E1	7.86781E-4	4.31538E-3	9.62019E-2	1.58386E1	-1.98399E1	-1.99396E1	1.50418E1	2.23356E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.41674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80046E1	-6.67572E-4	-8.80017E1	5.24521E-4	4.26769E-3	9.61542E-2	1.57915E1	-1.98537E1	-1.99336E1	1.50304E1	2.23678E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.4223E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80048E1	-6.91414E-4	-8.80016E1	5.96046E-4	4.07696E-3	9.62734E-2	1.58095E1	-1.98398E1	-1.99876E1	1.50262E1	2.23235E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.40499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8005E1	-4.76837E-4	-8.80016E1	3.57628E-4	4.22001E-3	9.62496E-2	1.58185E1	-1.98621E1	-1.996E1	1.5034E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80047E1	-5.72205E-4	-8.80014E1	1.00136E-3	4.02927E-3	9.61065E-2	1.58498E1	-1.98375E1	-1.99532E1	1.50509E1	2.2372E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.41337E-2
1.2E1	1.15E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80045E1	-5.24521E-4	-8.80014E1	8.58307E-4	4.1008E-3	9.57966E-2	1.58311E1	-1.98615E1	-1.99762E1	1.50064E1	2.23235E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.40499E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80045E1	-7.15256E-4	-8.80015E1	7.62939E-4	3.93391E-3	9.59396E-2	1.58726E1	-1.98621E1	-1.99143E1	1.50172E1	2.23392E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.41199E-2
1.4E1	1.33E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80043E1	-5.72205E-4	-8.80019E1	7.15256E-4	3.8147E-3	9.62734E-2	1.58087E1	-1.98174E1	-1.99315E1	1.503E1	2.24109E-9	2.51552E-3	2.51552E-3	6.36244E-3	2.41337E-2
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80042E1	-6.4373E-4	-8.80018E1	6.91414E-4	4.02927E-3	9.61542E-2	1.58029E1	-1.98148E1	-1.99414E1	1.50623E1	2.23356E-9	2.52131E-3	2.52131E-3	6.25478E-3	2.41674E-2
1.6E1	4.22E2	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80044E1	-7.15256E-4	-8.80018E1	8.34465E-4	4.14848E-3	9.61065E-2	1.58386E1	-1.98287E1	-1.99537E1	1.50376E1	2.23709E-9	2.52179E-3	2.52179E-3	6.38758E-3	2.41192E-2
1.7E1	1.252E3	2.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80042E1	-8.58307E-4	-8.80017E1	4.05312E-4	4.1008E-3	9.63688E-2	1.58125E1	-1.98386E1	-1.9948E1	1.50238E1	2.23773E-9	2.51739E-3	2.51739E-3	6.26985E-3	2.41611E-2
1.8E1	5.279E3	2.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80046E1	-8.82149E-4	-8.80017E1	4.52995E-4	4.29153E-3	9.64165E-2	1.58359E1	-1.98657E1	-1.99107E1	1.50352E1	2.24402E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.41756E-2
1.9E1	2.521E3	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80043E1	-8.58307E-4	-8.80016E1	7.62939E-4	4.26769E-3	9.62973E-2	1.58527E1	-1.9831E1	-1.99532E1	1.50329E1	2.23915E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.41337E-2
2.0E1	3.8E1	0.0E0	8.08E2	5.58E2	-7.45602E-2	-8.80042E1	-1.0252E-3	-8.80018E1	9.05991E-4	4.14848E-3	9.63688E-2	1.57945E1	-1.98735E1	-1.99612E1	1.50534E1	2.24347E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.41817E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80042E1	-1.0252E-3	-8.80018E1	6.67572E-4	4.02927E-3	9.62734E-2	1.58533E1	-1.9866E1	-1.99384E1	1.50213E1	2.23623E-9	2.52647E-3	2.52647E-3	6.33486E-3	2.40918E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80043E1	-7.86781E-4	-8.80018E1	9.05991E-4	4.17233E-3	9.61065E-2	1.58389E1	-1.9838E1	-1.9966E1	1.50485E1	2.24106E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.41067E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.8004E1	-9.29832E-4	-8.80018E1	6.67572E-4	4.24385E-3	9.62257E-2	1.58256E1	-1.98393E1	-1.99998E1	1.50839E1	2.23623E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.41756E-2