[Scan]
initial_time=2016-01-15T20:34:44
final_time=2016-01-15T20:35:06
ip_count=19
run=1023
dataset=1
scan=39
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.85686E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.44474E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.20804E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.83787E-9
ql4_vset=
ql4_vmon=8.82149E-4
ql4_imon=1.36742E-8
mult1=-9.49958E-9
mult2=-2.85634E-9
rf_tmon=-4.18798E-3
rf_agc=3.3622E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.79086E-3
ql5_imon=6.09982E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71601E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19088E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12438E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=2.83386E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02406E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=2.5714E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95003E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04309E1
cs_ea2_imon=1.53281E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=2.9463E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.04931E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=2.37132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16798E0
cs_ionrep_imon=1.16439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9202E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.95711E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99965E1
olens4_imon=4.18394E-9
tplens_vset=0.0E0
tplens_vmon=-1.72495E0
tplens_imon=-2.38062E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99414E1
iondef3_imon=8.63012E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98344E1
iondef2_imon=9.60346E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03089E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=9.64439E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23648E0
ionrepsh_imon=1.71991E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30377E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00345E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7163E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1149E1
os_restr2_imon=3.38454E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.33966E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.24569E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5771E1
iondef1_imon=5.61999E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50106E1
iondef4_imon=5.32003E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.52237E-8
olens1_vset=0.0E0
olens1_vmon=1.85966E-3
olens1_imon=1.22686E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02124E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.88966E-6
window_vset=0.0E0
window_vmon=2.73204E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82723E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.29411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.0115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2151E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33434E1
os_fil1_imon=9.42997E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63987E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.95458E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65614E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6324E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=2.42387E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10949E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.709E3	2.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80049E1	-8.58307E-4	-8.80011E1	7.62939E-4	4.05312E-3	9.59396E-2	1.57809E1	-1.98672E1	-1.9939E1	1.50138E1	2.24155E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.42851E-2
2.0E0	3.659E3	5.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80046E1	-8.10623E-4	-8.80009E1	7.86781E-4	3.71933E-3	9.61065E-2	1.5821E1	-1.98491E1	-1.99539E1	1.50602E1	2.2406E-9	2.51739E-3	2.51739E-3	6.36144E-3	2.41611E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80047E1	-1.0252E-3	-8.80012E1	7.39098E-4	4.29153E-3	9.61542E-2	1.58133E1	-1.9844E1	-1.99703E1	1.50277E1	2.24012E-9	2.51271E-3	2.51271E-3	6.23385E-3	2.42282E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80048E1	-9.77516E-4	-8.80013E1	5.72205E-4	3.95775E-3	9.62973E-2	1.58558E1	-1.98314E1	-1.99348E1	1.50298E1	2.23637E-9	2.51498E-3	2.51498E-3	6.31269E-3	2.41269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80047E1	-9.53674E-4	-8.80013E1	8.10623E-4	4.07696E-3	9.6035E-2	1.57855E1	-1.98116E1	-1.99661E1	1.50418E1	2.2372E-9	2.51116E-3	2.51116E-3	6.34588E-3	2.40499E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80045E1	-5.72205E-4	-8.80014E1	7.62939E-4	4.05312E-3	9.59158E-2	1.57969E1	-1.98633E1	-1.99402E1	1.50358E1	2.2406E-9	2.51632E-3	2.51632E-3	6.25382E-3	2.42644E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80047E1	-7.86781E-4	-8.80015E1	8.10623E-4	3.93391E-3	9.62496E-2	1.58738E1	-1.98627E1	-1.99702E1	1.50303E1	2.23332E-9	2.52209E-3	2.52209E-3	6.35692E-3	2.41966E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80047E1	-9.05991E-4	-8.80012E1	8.34465E-4	3.67165E-3	9.61542E-2	1.58309E1	-1.9844E1	-1.99484E1	1.50433E1	2.24012E-9	2.52538E-3	2.52538E-3	6.36244E-3	2.41337E-2
1.2E1	1.18E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80045E1	-8.10623E-4	-8.80015E1	7.62939E-4	3.86238E-3	9.60588E-2	1.5812E1	-1.98434E1	-1.99567E1	1.50461E1	2.23107E-9	2.51847E-3	2.51847E-3	6.26985E-3	2.42644E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80046E1	-1.00136E-3	-8.80014E1	9.05991E-4	3.74317E-3	9.60588E-2	1.57867E1	-1.98068E1	-1.99654E1	1.50202E1	2.24251E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.41199E-2
1.4E1	1.59E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80048E1	-1.12057E-3	-8.80014E1	7.15256E-4	4.00543E-3	9.61781E-2	1.57981E1	-1.98374E1	-1.99888E1	1.50833E1	2.23623E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41127E-2
1.5E1	1.35E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80046E1	-8.10623E-4	-8.80011E1	9.77516E-4	3.86238E-3	9.59873E-2	1.58245E1	-1.98362E1	-1.99438E1	1.49639E1	2.24109E-9	2.51552E-3	2.51552E-3	6.39014E-3	2.42598E-2
1.6E1	4.38E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80045E1	-7.39098E-4	-8.80013E1	7.86781E-4	4.1008E-3	9.62734E-2	1.58269E1	-1.98501E1	-1.99191E1	1.505E1	2.23623E-9	2.52538E-3	2.52538E-3	6.36797E-3	2.42177E-2
1.7E1	1.296E3	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80046E1	-3.8147E-4	-8.80013E1	8.34465E-4	4.02927E-3	9.61304E-2	1.58323E1	-1.98627E1	-1.99768E1	1.50359E1	2.23818E-9	2.52209E-3	2.52209E-3	6.35692E-3	2.40708E-2
1.8E1	5.384E3	4.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80044E1	-6.67572E-4	-8.80011E1	8.10623E-4	4.17233E-3	9.58204E-2	1.58321E1	-1.98582E1	-1.99242E1	1.50561E1	2.24109E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.40708E-2
1.9E1	2.491E3	3.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80044E1	-5.72205E-4	-8.80008E1	9.77516E-4	3.95775E-3	9.61304E-2	1.57787E1	-1.98747E1	-1.99377E1	1.49872E1	2.23773E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.42437E-2
2.0E1	3.5E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80043E1	-6.19888E-4	-8.80014E1	9.53674E-4	3.91006E-3	9.61781E-2	1.58339E1	-1.98411E1	-1.9936E1	1.50196E1	2.23764E-9	2.52027E-3	2.52027E-3	6.27399E-3	2.42336E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80045E1	-5.96046E-4	-8.80011E1	7.15256E-4	3.83854E-3	9.6035E-2	1.58516E1	-1.98597E1	-1.99191E1	1.50316E1	2.24155E-9	2.52384E-3	2.52384E-3	6.23784E-3	2.41817E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80045E1	-6.91414E-4	-8.80012E1	8.34465E-4	3.83854E-3	9.59396E-2	1.57957E1	-1.98927E1	-1.9942E1	1.50094E1	2.23623E-9	2.51443E-3	2.51443E-3	6.26916E-3	2.41337E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80045E1	-8.34465E-4	-8.80013E1	8.82149E-4	3.79086E-3	9.58443E-2	1.5771E1	-1.98344E1	-1.99414E1	1.50106E1	2.24012E-9	2.51443E-3	2.51443E-3	6.3514E-3	2.42387E-2