[Scan]
initial_time=2016-01-15T20:35:14
final_time=2016-01-15T20:35:36
ip_count=19
run=1023
dataset=1
scan=40
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.79156E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.96485E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.19545E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.85662E-9
ql4_vset=
ql4_vmon=8.82149E-4
ql4_imon=1.3654E-8
mult1=-9.5959E-9
mult2=-2.73059E-9
rf_tmon=-7.07194E-3
rf_agc=3.05818E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=6.35326E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61205E0
bslens_imon=2.28626E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19717E1
lens5a_imon=2.01E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12549E2
lens4a_imon=2.05041E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5418E1
cs_ef1b_imon=2.84207E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04708E1
cs_ea1_imon=2.56662E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97881E0
lens1_imon=1.81444E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64911E1
os_ef1alow_imon=3.01528E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04345E1
cs_ea2_imon=1.52366E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84356E1
cs_ef1a_imon=2.93711E-5
olens2_vset=0.0E0
olens2_vmon=1.26362E-3
olens2_imon=1.06192E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11669E1
os_restr1_imon=4.28449E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14733E1
os_ea1_imon=2.34621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63424E1
os_ef1bup_imon=3.07626E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2125E0
cs_ionrep_imon=1.20691E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91998E2
cs_nozzle_imon=1.93602E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0221E1
cs_anode1_imon=2.96338E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.18296E-9
tplens_vset=0.0E0
tplens_vmon=-1.66068E0
tplens_imon=-2.31218E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99588E1
iondef3_imon=8.89836E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9847E1
iondef2_imon=9.32069E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03077E2
lens6_imon=2.98197E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=9.75943E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2433E0
ionrepsh_imon=1.75759E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33927E1
lens5b_imon=2.18355E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74263E1
cs_ef2b_imon=3.14405E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2598E0
os_ea2_imon=-6.04056E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00191E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71809E1
cs_ef2a_imon=3.16546E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01023E0
os_ef2alow_imon=-2.3283E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89315E-1
os_ef2bup_imon=-5.12426E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10983E1
os_restr2_imon=3.42267E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30819E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02269E1
cs_anode2_imon=2.22742E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58329E1
iondef1_imon=5.37455E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50497E1
iondef4_imon=5.57628E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.5254E-8
olens1_vset=0.0E0
olens1_vmon=1.81198E-3
olens1_imon=1.23692E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16312E0
cs_ionaccel_imon=-2.08828E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02157E2
cs_ionfocb_imon=1.47564E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56329E1
einzel_imon=7.66513E-6
window_vset=0.0E0
window_vmon=1.98302E-1
window_imon=-7.16249E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82718E2
mask1_imon=2.39292E-4
mask2_vset=0.0E0
mask2_vmon=-1.86982E1
mask2_imon=-6.96787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.13975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.8164E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.75701E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57432E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33468E1
os_fil1_imon=9.41269E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07118E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.96469E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63415E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26192E-2
os_fil2_imon=-2.55605E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0179E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.20466E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15243E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.41966E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17436E-1
res40_imon=-2.71429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=113
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.686E3	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80043E1	-7.39098E-4	-8.80016E1	8.82149E-4	4.19617E-3	9.63449E-2	1.57936E1	-1.98886E1	-1.99471E1	1.50068E1	2.23469E-9	2.51244E-3	2.51244E-3	6.33809E-3	2.41012E-2
2.0E0	3.705E3	4.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80043E1	-5.96046E-4	-8.80013E1	7.86781E-4	4.02927E-3	9.66072E-2	1.5851E1	-1.98411E1	-1.99278E1	1.50533E1	2.23825E-9	2.51814E-3	2.51814E-3	6.26527E-3	2.41674E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80047E1	-7.62939E-4	-8.80014E1	1.09673E-3	4.31538E-3	9.63688E-2	1.58374E1	-1.98517E1	-1.99071E1	1.50364E1	2.2363E-9	2.51471E-3	2.51471E-3	6.34789E-3	2.42127E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80047E1	-8.10623E-4	-8.80014E1	8.82149E-4	4.17233E-3	9.63211E-2	1.58179E1	-1.98501E1	-1.9963E1	1.5016E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80043E1	-8.58307E-4	-8.80013E1	9.77516E-4	3.8147E-3	9.59873E-2	1.58425E1	-1.98434E1	-1.99486E1	1.50659E1	2.23041E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.41127E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80046E1	-1.09673E-3	-8.80013E1	9.77516E-4	4.19617E-3	9.64165E-2	1.58203E1	-1.98452E1	-1.99414E1	1.49945E1	2.23429E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.41127E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80042E1	-8.34465E-4	-8.8001E1	6.91414E-4	4.12464E-3	9.61304E-2	1.58E1	-1.98226E1	-1.99437E1	1.50491E1	2.24597E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.8004E1	-5.96046E-4	-8.80013E1	9.77516E-4	3.93391E-3	9.62257E-2	1.5824E1	-1.98098E1	-1.99659E1	1.50334E1	2.23356E-9	2.51814E-3	2.51814E-3	6.24954E-3	2.41269E-2
1.2E1	8.2E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80042E1	-4.05312E-4	-8.80012E1	7.86781E-4	4.24385E-3	9.62496E-2	1.58041E1	-1.982E1	-1.99486E1	1.50394E1	2.23818E-9	2.52209E-3	2.52209E-3	6.37905E-3	2.40708E-2
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80043E1	-5.72205E-4	-8.80012E1	9.29832E-4	3.91006E-3	9.63211E-2	1.58971E1	-1.98759E1	-1.99282E1	1.50288E1	2.23171E-9	2.51804E-3	2.51804E-3	6.27954E-3	2.41265E-2
1.4E1	1.42E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80041E1	-5.72205E-4	-8.80012E1	8.10623E-4	3.83854E-3	9.62734E-2	1.58426E1	-1.98358E1	-1.99434E1	1.50596E1	2.2369E-9	2.52093E-3	2.52093E-3	6.34385E-3	2.41933E-2
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80041E1	-8.10623E-4	-8.8001E1	6.19888E-4	4.07696E-3	9.60112E-2	1.58203E1	-1.98122E1	-1.99402E1	1.504E1	2.24012E-9	2.52293E-3	2.52293E-3	6.26204E-3	2.40757E-2
1.6E1	4.76E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80051E1	-9.05991E-4	-8.80013E1	7.15256E-4	4.1008E-3	9.61542E-2	1.58425E1	-1.98452E1	-1.99666E1	1.50847E1	2.23468E-9	2.51915E-3	2.51915E-3	6.36912E-3	2.4255E-2
1.7E1	1.277E3	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80052E1	-9.05991E-4	-8.80013E1	6.19888E-4	4.29153E-3	9.59635E-2	1.58056E1	-1.98588E1	-1.992E1	1.50274E1	2.24174E-9	2.51625E-3	2.51625E-3	6.3074E-3	2.41476E-2
1.8E1	5.179E3	8.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80045E1	-7.39098E-4	-8.80015E1	6.19888E-4	4.26769E-3	9.62019E-2	1.58296E1	-1.98365E1	-1.99883E1	1.50178E1	2.23138E-9	2.51225E-3	2.51225E-3	6.36244E-3	2.41337E-2
1.9E1	2.583E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80046E1	-7.86781E-4	-8.80017E1	5.96046E-4	4.33922E-3	9.59158E-2	1.58149E1	-1.98717E1	-1.99654E1	1.50473E1	2.23773E-9	2.52276E-3	2.52276E-3	6.25916E-3	2.40583E-2
2.0E1	3.8E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80042E1	-6.4373E-4	-8.80015E1	8.58307E-4	4.31538E-3	9.59396E-2	1.58079E1	-1.98364E1	-1.99868E1	1.50172E1	2.2372E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.41337E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80044E1	-5.72205E-4	-8.80015E1	6.67572E-4	3.95775E-3	9.62734E-2	1.58347E1	-1.98645E1	-1.99191E1	1.50763E1	2.23678E-9	2.51739E-3	2.51739E-3	6.3723E-3	2.41611E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80041E1	-6.19888E-4	-8.80017E1	7.15256E-4	3.98159E-3	9.59158E-2	1.58415E1	-1.98741E1	-1.99844E1	1.50509E1	2.23964E-9	2.51417E-3	2.51417E-3	6.33977E-3	2.40788E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80043E1	-7.15256E-4	-8.80013E1	8.82149E-4	4.05312E-3	9.60588E-2	1.58329E1	-1.9847E1	-1.99588E1	1.50497E1	2.24109E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41966E-2