[Scan]
initial_time=2016-01-15T20:35:44
final_time=2016-01-15T20:36:06
ip_count=19
run=1023
dataset=1
scan=41
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.78724E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.54189E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.16602E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.79838E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.36291E-8
mult1=-9.20382E-9
mult2=-2.88004E-9
rf_tmon=-4.78673E-3
rf_agc=3.23417E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.57628E-3
ql5_imon=6.15871E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12588E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.86521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.0198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04237E1
cs_ea1_imon=2.57537E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97166E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.52704E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.95855E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.05933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14933E1
os_ea1_imon=2.35546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.18277E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92005E2
cs_nozzle_imon=1.93773E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.97297E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99967E1
olens4_imon=4.13692E-9
tplens_vset=0.0E0
tplens_vmon=-1.72615E0
tplens_imon=-4.25519E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99419E1
iondef3_imon=8.83921E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9883E1
iondef2_imon=9.46647E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03106E2
lens6_imon=2.97924E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=9.64677E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22086E0
ionrepsh_imon=1.76677E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.1936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27733E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00388E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70915E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11436E1
os_restr2_imon=3.40797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01533E1
cs_anode2_imon=2.2547E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58486E1
iondef1_imon=5.64522E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50074E1
iondef4_imon=5.33805E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.52892E-8
olens1_vset=0.0E0
olens1_vmon=1.54972E-3
olens1_imon=1.24141E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19922E0
cs_ionaccel_imon=-1.6212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56741E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82755E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.2278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33458E1
os_fil1_imon=9.40738E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.95332E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62222E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66755E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77136E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.42177E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49992E-1
res40_imon=-2.35641E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.728E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80043E1	-9.05991E-4	-8.80016E1	8.34465E-4	4.12464E-3	9.62973E-2	1.58174E1	-1.98458E1	-2.00145E1	1.50068E1	2.23818E-9	2.52318E-3	2.52318E-3	6.28006E-3	2.41546E-2
2.0E0	3.846E3	3.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80042E1	-5.96046E-4	-8.80013E1	8.34465E-4	4.60148E-3	9.63449E-2	1.58263E1	-1.98525E1	-1.9954E1	1.50106E1	2.23869E-9	2.51739E-3	2.51739E-3	6.36144E-3	2.42024E-2
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.8004E1	-6.67572E-4	-8.80014E1	9.53674E-4	4.24385E-3	9.62496E-2	1.58622E1	-1.98605E1	-1.99372E1	1.5001E1	2.24304E-9	2.51334E-3	2.51334E-3	6.28552E-3	2.42177E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13143E-2	-8.80042E1	-7.62939E-4	-8.80015E1	9.29832E-4	4.41074E-3	9.60112E-2	1.5825E1	-1.98375E1	-1.99968E1	1.50521E1	2.23964E-9	2.51739E-3	2.51739E-3	6.24316E-3	2.41199E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80043E1	-5.72205E-4	-8.80014E1	9.53674E-4	4.19617E-3	9.62019E-2	1.58026E1	-1.98588E1	-1.99818E1	1.50346E1	2.23773E-9	2.52169E-3	2.52169E-3	6.36144E-3	2.41405E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80043E1	-8.34465E-4	-8.80016E1	1.21593E-3	4.05312E-3	9.63211E-2	1.58066E1	-1.98343E1	-1.99629E1	1.50363E1	2.24597E-9	2.52209E-3	2.52209E-3	6.37351E-3	2.42177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80042E1	-9.05991E-4	-8.80014E1	1.23978E-3	4.19617E-3	9.63688E-2	1.58132E1	-1.98204E1	-1.99697E1	1.50364E1	2.23563E-9	2.52043E-3	2.52043E-3	6.25166E-3	2.41541E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80044E1	-4.76837E-4	-8.80016E1	9.77516E-4	4.07696E-3	9.64403E-2	1.5841E1	-1.98193E1	-1.99855E1	1.50659E1					
1.2E1	1.22E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80045E1	-6.67572E-4	-8.80015E1	9.77516E-4	4.33922E-3	9.61065E-2	1.58579E1	-1.98441E1	-1.99345E1	1.50113E1	2.23469E-9	2.52874E-3	2.52874E-3	6.27686E-3	2.41012E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80041E1	-7.15256E-4	-8.80013E1	9.05991E-4	4.17233E-3	9.63688E-2	1.5878E1	-1.98939E1	-1.99191E1	1.50508E1	2.23446E-9	2.52338E-3	2.52338E-3	6.28423E-3	2.41781E-2
1.4E1	1.41E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80043E1	-7.39098E-4	-8.80013E1	8.58307E-4	4.33922E-3	9.61065E-2	1.57807E1	-1.98182E1	-1.99456E1	1.50455E1	2.23332E-9	2.5188E-3	2.5188E-3	6.35692E-3	2.41546E-2
1.5E1	1.19E2	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80042E1	-1.09673E-3	-8.80013E1	8.10623E-4	4.12464E-3	9.65834E-2	1.58347E1	-1.9811E1	-1.99786E1	1.50184E1	2.24012E-9	2.52209E-3	2.52209E-3	6.3957E-3	2.41337E-2
1.6E1	4.16E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.8004E1	-7.86781E-4	-8.80017E1	7.86781E-4	4.26769E-3	9.63449E-2	1.58445E1	-1.988E1	-1.99732E1	1.50292E1	2.23583E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.42437E-2
1.7E1	1.307E3	3.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80041E1	-1.0252E-3	-8.8001E1	6.4373E-4	4.36306E-3	9.64165E-2	1.58215E1	-1.98482E1	-1.99355E1	1.50587E1	2.23818E-9	2.51443E-3	2.51443E-3	6.26916E-3	2.40918E-2
1.8E1	5.325E3	5.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80045E1	-9.29832E-4	-8.80012E1	9.77516E-4	4.29153E-3	9.65834E-2	1.58179E1	-1.98741E1	-1.99298E1	1.50016E1	2.23964E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.42851E-2
1.9E1	2.535E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80044E1	-1.0252E-3	-8.80013E1	9.05991E-4	4.17233E-3	9.61304E-2	1.58197E1	-1.98675E1	-1.99354E1	1.50094E1	2.24062E-9	2.52697E-3	2.52697E-3	6.35223E-3	2.40839E-2
2.0E1	3.6E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80043E1	-8.10623E-4	-8.80015E1	9.53674E-4	3.95775E-3	9.62019E-2	1.58329E1	-1.98398E1	-1.9939E1	1.50611E1	2.24207E-9	2.5199E-3	2.5199E-3	6.36244E-3	2.41127E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80044E1	-9.29832E-4	-8.80014E1	9.05991E-4	3.86238E-3	9.62973E-2	1.58406E1	-1.98446E1	-1.99523E1	1.50543E1	2.23583E-9	2.52707E-3	2.52707E-3	6.2752E-3	2.41611E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80046E1	-1.0252E-3	-8.80014E1	7.39098E-4	3.93391E-3	9.63449E-2	1.58287E1	-1.98687E1	-1.99714E1	1.50364E1	2.23583E-9	2.51954E-3	2.51954E-3	6.35601E-3	2.41199E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80043E1	-7.15256E-4	-8.80014E1	4.76837E-4	3.57628E-3	9.63688E-2	1.58486E1	-1.9883E1	-1.99419E1	1.50074E1	2.23526E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.42177E-2