[Scan]
initial_time=2016-01-15T20:36:44
final_time=2016-01-15T20:37:06
ip_count=19
run=1023
dataset=1
scan=43
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.76975E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.73275E-10
ql2_vset=
ql2_vmon=-1.35899E-3
ql2_imon=1.1994E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.83446E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.36711E-8
mult1=-8.95775E-9
mult2=-2.84836E-9
rf_tmon=-5.16132E-3
rf_agc=3.20238E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=6.15287E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68946E0
bslens_imon=2.40257E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19504E1
lens5a_imon=2.00652E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05177E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.84212E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.0226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04554E1
cs_ea1_imon=2.57766E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01106E0
lens1_imon=1.64823E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03893E1
cs_ea2_imon=1.51081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84493E1
cs_ef1a_imon=2.94464E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.0571E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=4.28331E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1534E1
os_ea1_imon=2.37917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21849E0
cs_ionrep_imon=1.19239E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93549E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=2.94568E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.12747E-9
tplens_vset=0.0E0
tplens_vmon=-1.693E0
tplens_imon=-3.36683E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9921E1
iondef3_imon=8.4755E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98657E1
iondef2_imon=9.28893E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03113E2
lens6_imon=2.9812E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=9.66966E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27006E0
ionrepsh_imon=1.77118E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33588E1
lens5b_imon=2.18554E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.14898E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21734E0
os_ea2_imon=-4.02731E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00567E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71941E1
cs_ef2a_imon=3.1681E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.98737E0
os_ef2alow_imon=-2.8665E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.343E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1165E1
os_restr2_imon=3.37592E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2899E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.23187E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58239E1
iondef1_imon=5.57287E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50715E1
iondef4_imon=5.27601E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.52137E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.23323E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1284E0
cs_ionaccel_imon=-1.77875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02144E2
cs_ionfocb_imon=1.47518E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=2.8024E-1
window_imon=-7.46599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82776E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86721E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.52649E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.97378E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.87992E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48481E0
defgridb_imon=6.17077E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33485E1
os_fil1_imon=9.38435E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08128E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64421E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.96003E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63073E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66384E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23262E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.12634E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22815E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35223E-3
inlet_lpb_pmon=2.41265E-2
chamber_ion_pmon=2.23369E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.63261E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.689E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80043E1	-7.86781E-4	-8.80014E1	7.15256E-4	4.17233E-3	9.64403E-2	1.5791E1	-1.98104E1	-2.0015E1	1.50621E1	2.24106E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.40865E-2
2.0E0	3.689E3	6.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80049E1	-5.24521E-4	-8.80016E1	4.29153E-4	4.14848E-3	9.65595E-2	1.58105E1	-1.9849E1	-1.99885E1	1.50581E1	2.23072E-9	2.51693E-3	2.51693E-3	6.34661E-3	2.41052E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80043E1	-4.05312E-4	-8.80017E1	5.24521E-4	3.8147E-3	9.63688E-2	1.58592E1	-1.98959E1	-1.99614E1	1.50575E1	2.22088E-9	2.51693E-3	2.51693E-3	6.38606E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80044E1	-5.72205E-4	-8.80016E1	6.91414E-4	3.67165E-3	9.62257E-2	1.57817E1	-1.98703E1	-1.99961E1	1.50491E1	2.21873E-9	2.51203E-3	2.51203E-3	6.405E-3	2.41611E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80043E1	-1.04904E-3	-8.80013E1	7.62939E-4	3.52859E-3	9.65357E-2	1.58463E1	-1.98214E1	-1.99564E1	1.50671E1	2.2323E-9	2.5199E-3	2.5199E-3	6.36477E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80043E1	-9.29832E-4	-8.80013E1	1.0252E-3	3.95775E-3	9.6488E-2	1.58436E1	-1.97902E1	-1.99696E1	1.50316E1	2.24643E-9	2.52384E-3	2.52384E-3	6.36687E-3	2.41261E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80042E1	-9.53674E-4	-8.80014E1	6.91414E-4	3.62396E-3	9.62257E-2	1.58557E1	-1.98782E1	-1.99225E1	1.50328E1	2.23915E-9	2.52099E-3	2.52099E-3	6.36797E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80043E1	-8.58307E-4	-8.80016E1	6.4373E-4	3.91006E-3	9.64642E-2	1.58091E1	-1.98582E1	-1.9988E1	1.50659E1	2.23603E-9	2.52406E-3	2.52406E-3	6.27761E-3	2.40852E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80043E1	-1.00136E-3	-8.80013E1	7.15256E-4	3.88622E-3	9.63688E-2	1.57885E1	-1.98074E1	-1.99708E1	1.50404E1					
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80044E1	-9.29832E-4	-8.80012E1	7.62939E-4	3.83854E-3	9.64642E-2	1.58311E1	-1.98729E1	-1.99318E1	1.50485E1	2.23869E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.40994E-2
1.4E1	1.45E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80042E1	-9.53674E-4	-8.80015E1	9.77516E-4	4.12464E-3	9.62019E-2	1.58538E1	-1.9849E1	-1.99458E1	1.50282E1	2.23915E-9	2.51116E-3	2.51116E-3	6.41797E-3	2.41756E-2
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80043E1	-9.77516E-4	-8.80013E1	1.0252E-3	4.31538E-3	9.60588E-2	1.58329E1	-1.98651E1	-1.99179E1	1.50449E1	2.2452E-9	2.52197E-3	2.52197E-3	6.38576E-3	2.40742E-2
1.6E1	4.48E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80041E1	-4.52995E-4	-8.80013E1	8.34465E-4	4.22001E-3	9.61304E-2	1.58095E1	-1.98633E1	-1.99222E1	1.50062E1	2.23332E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41337E-2
1.7E1	1.223E3	0.0E0	6.87E2	4.7E2	-7.42513E-2	-8.8004E1	-7.86781E-4	-8.80011E1	8.34465E-4	4.05312E-3	9.62496E-2	1.5863E1	-1.98525E1	-1.99384E1	1.50431E1	2.23526E-9	2.51662E-3	2.51662E-3	6.26371E-3	2.42177E-2
1.8E1	5.092E3	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.8004E1	-8.10623E-4	-8.80011E1	8.10623E-4	3.62396E-3	9.61542E-2	1.58268E1	-1.98281E1	-1.99732E1	1.50268E1	2.24155E-9	2.51525E-3	2.51525E-3	6.35601E-3	2.40994E-2
1.9E1	2.565E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80041E1	-8.58307E-4	-8.80011E1	1.00136E-3	3.76701E-3	9.60588E-2	1.58109E1	-1.98216E1	-1.99602E1	1.50491E1	2.23623E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.41337E-2
2.0E1	4.6E1	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80041E1	-8.10623E-4	-8.80014E1	7.15256E-4	3.8147E-3	9.62019E-2	1.58362E1	-1.98435E1	-1.99463E1	1.50418E1	2.23678E-9	2.52276E-3	2.52276E-3	6.2645E-3	2.40788E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80042E1	-9.77516E-4	-8.80013E1	6.67572E-4	3.8147E-3	9.64165E-2	1.57719E1	-1.98712E1	-1.99272E1	1.50474E1	2.24304E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.41546E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80041E1	-1.12057E-3	-8.80013E1	9.77516E-4	3.71933E-3	9.63926E-2	1.58047E1	-1.99029E1	-1.99324E1	1.501E1	2.24347E-9	2.51525E-3	2.51525E-3	6.38318E-3	2.40994E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80043E1	-1.35899E-3	-8.80014E1	7.39098E-4	3.93391E-3	9.62257E-2	1.58239E1	-1.98657E1	-1.9921E1	1.50715E1	2.23369E-9	2.52027E-3	2.52027E-3	6.35223E-3	2.41265E-2