[Scan]
initial_time=2016-01-15T20:37:14
final_time=2016-01-15T20:37:35
ip_count=19
run=1023
dataset=1
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.84231E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.87795E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.19158E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.69755E-9
ql4_vset=
ql4_vmon=1.23978E-3
ql4_imon=1.36986E-8
mult1=-1.02654E-8
mult2=-2.77008E-9
rf_tmon=-4.11845E-3
rf_agc=3.30306E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.86238E-3
ql5_imon=6.21045E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72442E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19424E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54235E1
cs_ef1b_imon=2.8407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04675E2
lens23_imon=1.02445E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.58185E-5
lens1_vset=-2.7E0
lens1_vmon=-2.91098E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.52524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.95387E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.06091E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.29382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.3807E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63972E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.17232E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93658E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02115E1
cs_anode1_imon=2.9654E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.10177E-9
tplens_vset=0.0E0
tplens_vmon=-1.67208E0
tplens_imon=-1.81596E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.9972E1
iondef3_imon=8.66257E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98562E1
iondef2_imon=9.26099E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03094E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.64642E-2
ql6_imon=9.53805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.75308E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.15863E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24309E0
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06185E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.00951E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.24641E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57971E1
iondef1_imon=5.09006E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49929E1
iondef4_imon=5.24075E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52491E-8
olens1_vset=0.0E0
olens1_vmon=1.64509E-3
olens1_imon=1.22693E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17219E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82728E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.87071E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=6.73752E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93665E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50298E3
multb_neg_imon=5.91559E-5
defgridb_vset=0.0E0
defgridb_vmon=-9.95543E-1
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33462E1
os_fil1_imon=9.40468E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06747E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64635E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.95819E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62492E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6584E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.79211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.41337E-2
chamber_ion_pmon=2.22654E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.29569E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.665E3	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80042E1	-7.39098E-4	-8.80013E1	9.53674E-4	4.26769E-3	9.64642E-2	1.58261E1	-1.98521E1	-2.00022E1	1.50572E1	2.23623E-9	2.51225E-3	2.51225E-3	6.29098E-3	2.40918E-2
2.0E0	3.738E3	2.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80042E1	-1.00136E-3	-8.8001E1	7.62939E-4	4.14848E-3	9.61304E-2	1.58185E1	-1.98609E1	-1.99486E1	1.50388E1	2.2394E-9	2.52026E-3	2.52026E-3	6.38388E-3	2.41267E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80043E1	-1.21593E-3	-8.80012E1	7.39098E-4	3.95775E-3	9.62019E-2	1.584E1	-1.98515E1	-1.99448E1	1.50323E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80042E1	-1.19209E-3	-8.8001E1	6.67572E-4	3.95775E-3	9.65118E-2	1.58457E1	-1.98623E1	-1.99726E1	1.50329E1	2.23782E-9	2.51783E-3	2.51783E-3	6.3543E-3	2.40742E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80042E1	-1.00136E-3	-8.80012E1	8.34465E-4	4.05312E-3	9.65595E-2	1.58443E1	-1.98573E1	-1.99648E1	1.5064E1	2.23583E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.40788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80042E1	-5.48363E-4	-8.80016E1	5.00679E-4	3.88622E-3	9.63926E-2	1.58552E1	-1.98302E1	-1.99522E1	1.50769E1	2.23665E-9	2.52921E-3	2.52921E-3	6.26844E-3	2.41479E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80041E1	-5.72205E-4	-8.80013E1	6.67572E-4	4.45843E-3	9.61542E-2	1.58067E1	-1.98286E1	-1.9969E1	1.50332E1	2.2406E-9	2.52492E-3	2.52492E-3	6.2645E-3	2.39355E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80043E1	-8.34465E-4	-8.80015E1	7.39098E-4	3.88622E-3	9.63211E-2	1.58472E1	-1.98834E1	-1.99396E1	1.50635E1	2.23779E-9	2.52564E-3	2.52564E-3	6.25517E-3	2.41098E-2
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80044E1	-7.15256E-4	-8.80012E1	5.24521E-4	3.62396E-3	9.6035E-2	1.58327E1	-1.98275E1	-1.99478E1	1.50641E1	2.23644E-9	2.51787E-3	2.51787E-3	6.38532E-3	2.41513E-2
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80044E1	-7.15256E-4	-8.80013E1	4.52995E-4	3.76701E-3	9.63211E-2	1.57987E1	-1.98272E1	-1.99612E1	1.50533E1					
1.4E1	1.47E2	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80043E1	-9.53674E-4	-8.80013E1	3.57628E-4	3.83854E-3	9.61304E-2	1.58041E1	-1.98404E1	-1.99678E1	1.50172E1	2.23623E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41756E-2
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80043E1	-1.19209E-3	-8.80012E1	5.96046E-4	3.8147E-3	9.6035E-2	1.58371E1	-1.98452E1	-1.99137E1	1.49998E1	2.23429E-9	2.5188E-3	2.5188E-3	6.26371E-3	2.41337E-2
1.6E1	3.92E2	0.0E0	6.47E2	4.41E2	-7.45602E-2	-8.80045E1	-8.34465E-4	-8.80013E1	8.34465E-4	3.8147E-3	9.61065E-2	1.5896E1	-1.98735E1	-1.99468E1	1.50364E1	2.23235E-9	2.51662E-3	2.51662E-3	6.39014E-3	2.41756E-2
1.7E1	1.275E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80043E1	-7.15256E-4	-8.80013E1	6.67572E-4	4.24385E-3	9.58204E-2	1.58353E1	-1.98555E1	-1.9951E1	1.50358E1	2.2372E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.42177E-2
1.8E1	5.199E3	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80044E1	-9.29832E-4	-8.80015E1	8.34465E-4	3.86238E-3	9.61065E-2	1.57987E1	-1.9844E1	-1.99648E1	1.50509E1	2.23487E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.41611E-2
1.9E1	2.507E3	2.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80043E1	-9.05991E-4	-8.80017E1	5.96046E-4	3.79086E-3	9.61781E-2	1.58527E1	-1.98428E1	-1.99366E1	1.50322E1	2.24012E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.41546E-2
2.0E1	4.1E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80044E1	-7.62939E-4	-8.80012E1	9.53674E-4	3.6478E-3	9.62257E-2	1.58522E1	-1.98507E1	-1.99354E1	1.50207E1	2.2372E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80043E1	-9.29832E-4	-8.80014E1	1.07288E-3	3.71933E-3	9.63449E-2	1.57867E1	-1.98706E1	-1.99337E1	1.50244E1	2.23869E-9	2.52276E-3	2.52276E-3	6.26985E-3	2.40994E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80045E1	-7.86781E-4	-8.80014E1	9.77516E-4	3.8147E-3	9.61304E-2	1.586E1	-1.98729E1	-1.99654E1	1.50551E1	2.23297E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.40994E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80045E1	-6.19888E-4	-8.80015E1	1.23978E-3	3.86238E-3	9.64642E-2	1.57971E1	-1.98562E1	-1.9972E1	1.49929E1	2.22654E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41337E-2