[Scan]
initial_time=2016-01-15T20:38:13
final_time=2016-01-15T20:38:35
ip_count=19
run=1023
dataset=1
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79921E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.06649E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.17764E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.60338E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.37307E-8
mult1=-1.20763E-8
mult2=-2.72859E-9
rf_tmon=-2.61982E-3
rf_agc=3.4361E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=6.07455E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72983E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=2.83494E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02882E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04567E1
cs_ea1_imon=2.56095E-5
lens1_vset=-2.7E0
lens1_vmon=-2.88094E0
lens1_imon=1.77711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02987E1
cs_ea2_imon=1.51046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84736E1
cs_ef1a_imon=2.96901E-5
olens2_vset=0.0E0
olens2_vmon=7.86781E-4
olens2_imon=1.04178E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16712E1
os_ea1_imon=2.35582E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20463E0
cs_ionrep_imon=1.1853E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02218E1
cs_anode1_imon=2.96108E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.20463E-9
tplens_vset=0.0E0
tplens_vmon=-1.73276E0
tplens_imon=-1.04678E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00159E1
iondef3_imon=8.64454E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98338E1
iondef2_imon=9.13482E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03099E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=9.57406E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=1.78768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32919E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21725E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00962E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23129E2
cs_ionfoca_imon=6.21925E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.2547E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5875E1
iondef1_imon=5.9192E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50364E1
iondef4_imon=5.33085E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52231E-8
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=1.23187E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1818E0
cs_ionaccel_imon=-1.62481E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02126E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-6.6255E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82755E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=6.69787E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.00572E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50268E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13088E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33502E1
os_fil1_imon=9.42708E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07636E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64162E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.96329E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62978E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65604E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32046E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22701E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.41337E-2
chamber_ion_pmon=2.23429E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97734E-1
res40_imon=-2.24829E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.606E3	5.0E0	1.47E2	4.1E1	-7.286E-2	-8.80044E1	-9.53674E-4	-8.8001E1	8.58307E-4	4.33922E-3	9.63449E-2	1.5871E1	-1.99189E1	-1.99042E1	1.50497E1	2.24304E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.41337E-2
2.0E0	3.759E3	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80046E1	-9.53674E-4	-8.80011E1	7.62939E-4	4.24385E-3	9.63211E-2	1.57981E1	-1.98362E1	-1.99961E1	1.50128E1	2.23869E-9	2.51739E-3	2.51739E-3	6.35601E-3	2.4223E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80047E1	-8.58307E-4	-8.80012E1	7.86781E-4	4.14848E-3	9.63449E-2	1.58041E1	-1.98724E1	-2.0001E1	1.50259E1	2.23963E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80045E1	-9.05991E-4	-8.80009E1	8.58307E-4	4.22001E-3	9.6035E-2	1.58582E1	-1.98591E1	-1.9978E1	1.50262E1	2.23825E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.41674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80043E1	-8.82149E-4	-8.80011E1	6.19888E-4	3.93391E-3	9.61781E-2	1.57903E1	-1.98214E1	-1.99561E1	1.5031E1	2.24207E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80044E1	-7.86781E-4	-8.8001E1	6.91414E-4	4.07696E-3	9.63211E-2	1.58238E1	-1.98735E1	-1.99172E1	1.50265E1	2.23915E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.40708E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80046E1	-1.23978E-3	-8.80007E1	8.10623E-4	4.24385E-3	9.59873E-2	1.57716E1	-1.98609E1	-1.99804E1	1.5025E1	2.24538E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.41611E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80045E1	-6.91414E-4	-8.80011E1	7.62939E-4	4.31538E-3	9.60827E-2	1.58174E1	-1.98263E1	-1.99962E1	1.50244E1	2.23623E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.41337E-2
1.2E1	1.08E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80043E1	-9.77516E-4	-8.80012E1	1.00136E-3	3.93391E-3	9.62973E-2	1.58179E1	-1.98302E1	-1.99462E1	1.50412E1	2.23429E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41127E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80044E1	-5.96046E-4	-8.80013E1	8.34465E-4	3.95775E-3	9.63211E-2	1.58155E1	-1.98254E1	-2.00309E1	1.50683E1	2.23507E-9	2.52134E-3	2.52134E-3	6.31012E-3	2.41995E-2
1.4E1	1.43E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80043E1	-8.34465E-4	-8.80012E1	6.67572E-4	4.31538E-3	9.6035E-2	1.58654E1	-1.98825E1	-1.99246E1	1.50142E1					
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80043E1	-1.0252E-3	-8.80014E1	7.15256E-4	3.98159E-3	9.62019E-2	1.58329E1	-1.98915E1	-1.99282E1	1.50467E1	2.24109E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.41127E-2
1.6E1	4.3E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80045E1	-8.82149E-4	-8.80013E1	7.86781E-4	4.07696E-3	9.62019E-2	1.5851E1	-1.99053E1	-1.9936E1	1.5019E1	2.24062E-9	2.51248E-3	2.51248E-3	6.31858E-3	2.41479E-2
1.7E1	1.279E3	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80043E1	-9.05991E-4	-8.80011E1	7.86781E-4	4.31538E-3	9.63688E-2	1.57845E1	-1.9872E1	-1.99473E1	1.50581E1	2.23678E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.41199E-2
1.8E1	5.188E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80043E1	-1.07288E-3	-8.80015E1	6.4373E-4	4.36306E-3	9.62257E-2	1.58751E1	-1.98397E1	-1.99211E1	1.50409E1	2.23289E-9	2.51854E-3	2.51854E-3	6.29721E-3	2.41402E-2
1.9E1	2.505E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80041E1	-9.77516E-4	-8.80013E1	8.10623E-4	4.3869E-3	9.64165E-2	1.57619E1	-1.98204E1	-1.99909E1	1.50196E1	2.23755E-9	2.51874E-3	2.51874E-3	6.3074E-3	2.41337E-2
2.0E1	4.4E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80043E1	-7.86781E-4	-8.80011E1	7.39098E-4	4.41074E-3	9.65595E-2	1.58577E1	-1.98422E1	-1.99218E1	1.50376E1	2.22631E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.41611E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80045E1	-9.53674E-4	-8.80012E1	7.62939E-4	4.02927E-3	9.64403E-2	1.59057E1	-1.98502E1	-1.99265E1	1.50083E1	2.24109E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40918E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80044E1	-8.10623E-4	-8.80011E1	5.24521E-4	4.50611E-3	9.63449E-2	1.58131E1	-1.98458E1	-1.99378E1	1.49902E1	2.23782E-9	2.51886E-3	2.51886E-3	6.33341E-3	2.41933E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80043E1	-5.96046E-4	-8.80011E1	5.72205E-4	4.45843E-3	9.65118E-2	1.5875E1	-1.98338E1	-2.00159E1	1.50364E1	2.23429E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41337E-2