[Scan]
initial_time=2016-01-15T20:39:13
final_time=2016-01-15T20:39:35
ip_count=19
run=1023
dataset=1
scan=48
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.798E-6
ql1_vset=
ql1_vmon=-8.8004E1
ql1_imon=-7.16579E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.21392E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.81994E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.37199E-8
mult1=-9.45141E-9
mult2=-2.54695E-9
rf_tmon=-5.76815E-3
rf_agc=3.17474E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.9402E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62708E0
bslens_imon=1.89607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19286E1
lens5a_imon=2.01047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12535E2
lens4a_imon=2.05425E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.01843E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=2.57933E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0017E0
lens1_imon=1.61128E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65125E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03396E1
cs_ea2_imon=1.47838E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.95099E-5
olens2_vset=0.0E0
olens2_vmon=6.4373E-4
olens2_imon=1.04925E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=4.28085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14495E1
os_ea1_imon=2.33059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.20945E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91999E2
cs_nozzle_imon=1.93799E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.9481E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.16621E-9
tplens_vset=0.0E0
tplens_vmon=-1.67027E0
tplens_imon=-4.14704E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99816E1
iondef3_imon=8.92933E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98302E1
iondef2_imon=9.45566E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03086E2
lens6_imon=2.97957E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=9.61351E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22806E0
ionrepsh_imon=1.70873E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34313E1
lens5b_imon=2.20802E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19502E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00269E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11604E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.24389E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58293E1
iondef1_imon=5.16576E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50046E1
iondef4_imon=5.42815E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.51519E-8
olens1_vset=0.0E0
olens1_vmon=1.83582E-3
olens1_imon=1.2251E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-1.55633E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82756E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.8671E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=7.26024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.97905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.24004E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33499E1
os_fil1_imon=9.42264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64211E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.95104E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65492E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.33464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22727E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.4223E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.51483E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.665E3	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80042E1	-8.82149E-4	-8.80011E1	8.58307E-4	4.19617E-3	9.62973E-2	1.58339E1	-1.98812E1	-1.99502E1	1.50242E1	2.2372E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41756E-2
2.0E0	3.597E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80045E1	-9.29832E-4	-8.80012E1	5.72205E-4	3.98159E-3	9.61781E-2	1.58347E1	-1.98416E1	-1.99489E1	1.50403E1	2.24155E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.42024E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80043E1	-1.14441E-3	-8.80014E1	7.62939E-4	4.26769E-3	9.61542E-2	1.58277E1	-1.98628E1	-1.99732E1	1.50311E1	2.23608E-9	2.51952E-3	2.51952E-3	6.34164E-3	2.41192E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80044E1	-9.77516E-4	-8.80014E1	7.15256E-4	4.43459E-3	9.63926E-2	1.58405E1	-1.98514E1	-1.99555E1	1.50022E1	2.23637E-9	2.52765E-3	2.52765E-3	6.29684E-3	2.42079E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80042E1	-7.15256E-4	-8.80012E1	5.72205E-4	4.1008E-3	9.64403E-2	1.58413E1	-1.98838E1	-1.99504E1	1.50317E1	2.24109E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.41546E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80043E1	-5.00679E-4	-8.80012E1	9.29832E-4	4.12464E-3	9.64403E-2	1.58071E1	-1.98278E1	-1.99143E1	1.50262E1	2.2344E-9	2.51739E-3	2.51739E-3	6.33166E-3	2.41405E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80044E1	-5.00679E-4	-8.80014E1	5.24521E-4	4.24385E-3	9.67264E-2	1.58234E1	-1.98349E1	-1.99763E1	1.50551E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80043E1	-3.33786E-4	-8.80015E1	7.86781E-4	4.48227E-3	9.64403E-2	1.58221E1	-1.98641E1	-1.99502E1	1.50593E1	2.23526E-9	2.51662E-3	2.51662E-3	6.36244E-3	2.41966E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80045E1	-7.39098E-4	-8.80015E1	7.39098E-4	4.07696E-3	9.63211E-2	1.58413E1	-1.9832E1	-1.99774E1	1.5031E1	2.2406E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.41817E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80042E1	-5.72205E-4	-8.80012E1	8.10623E-4	4.26769E-3	9.62257E-2	1.57861E1	-1.98252E1	-2.00062E1	1.50251E1	2.24109E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.40708E-2
1.4E1	1.34E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80045E1	-1.0252E-3	-8.80012E1	7.15256E-4	4.17233E-3	9.59635E-2	1.58693E1	-1.98448E1	-1.99453E1	1.50074E1	2.23506E-9	2.52301E-3	2.52301E-3	6.33863E-3	2.41734E-2
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80043E1	-7.86781E-4	-8.80016E1	6.91414E-4	4.02927E-3	9.63926E-2	1.58356E1	-1.97862E1	-1.99402E1	1.50405E1	2.23446E-9	2.51758E-3	2.51758E-3	6.31902E-3	2.41781E-2
1.6E1	4.83E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80041E1	-8.10623E-4	-8.80013E1	5.48363E-4	4.07696E-3	9.62019E-2	1.58095E1	-1.98332E1	-1.99264E1	1.50261E1	2.2406E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.41199E-2
1.7E1	1.183E3	1.0E0	6.87E2	4.7E2	-7.29374E-2	-8.8004E1	-8.58307E-4	-8.80016E1	4.76837E-4	4.29153E-3	9.62973E-2	1.58113E1	-1.98615E1	-1.99504E1	1.50443E1	2.24657E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.41479E-2
1.8E1	5.242E3	8.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80043E1	-6.91414E-4	-8.80017E1	6.67572E-4	4.29153E-3	9.65595E-2	1.58492E1	-1.98284E1	-1.99654E1	1.50335E1	2.2406E-9	2.51632E-3	2.51632E-3	6.28592E-3	2.40788E-2
1.9E1	2.556E3	2.0E0	7.68E2	5.29E2	-7.201E-2	-8.80042E1	-6.91414E-4	-8.80013E1	6.19888E-4	4.22001E-3	9.67503E-2	1.58105E1	-1.98159E1	-1.99549E1	1.50432E1	2.24459E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.42121E-2
2.0E1	3.7E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80043E1	-7.62939E-4	-8.80015E1	2.6226E-4	4.45843E-3	9.63688E-2	1.58632E1	-1.98716E1	-1.99298E1	1.49866E1	2.23429E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.41966E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80041E1	-1.0252E-3	-8.80017E1	4.76837E-4	4.64916E-3	9.64642E-2	1.58301E1	-1.98585E1	-1.99483E1	1.50532E1	2.23566E-9	2.5147E-3	2.5147E-3	6.33538E-3	2.39775E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.8004E1	-7.86781E-4	-8.80011E1	8.58307E-4	4.24385E-3	9.62973E-2	1.58115E1	-1.98387E1	-1.99272E1	1.50412E1	2.24012E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.41471E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.8004E1	-6.91414E-4	-8.80014E1	9.05991E-4	4.26769E-3	9.62734E-2	1.58293E1	-1.98302E1	-1.99816E1	1.50046E1	2.23964E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.4223E-2