[Scan]
initial_time=2016-01-15T20:39:43
final_time=2016-01-15T20:40:05
ip_count=19
run=1023
dataset=1
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.80911E-6
ql1_vset=
ql1_vmon=-8.80042E1
ql1_imon=-7.99179E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.17997E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.78151E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.36752E-8
mult1=-9.72397E-9
mult2=-2.41753E-9
rf_tmon=-5.5477E-3
rf_agc=3.25304E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.91135E-10
bslens_vset=-6.2E0
bslens_vmon=-6.94612E0
bslens_imon=3.83554E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20578E1
lens5a_imon=1.91422E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12248E2
lens4a_imon=2.04206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.8735E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0476E2
lens23_imon=1.03639E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06388E1
cs_ea1_imon=2.57392E-5
lens1_vset=-2.7E0
lens1_vmon=-2.73013E0
lens1_imon=-6.1419E-8
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02999E1
cs_ea2_imon=1.63123E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.97009E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.04922E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.17835E1
os_ea1_imon=2.45856E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.04253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17039E0
cs_ionrep_imon=1.07895E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91759E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.97405E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99966E1
olens4_imon=4.19105E-9
tplens_vset=0.0E0
tplens_vmon=-1.8379E0
tplens_imon=9.47968E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99756E1
iondef3_imon=7.98844E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98004E1
iondef2_imon=8.45348E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03123E2
lens6_imon=2.99535E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=9.44102E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.52127E0
ionrepsh_imon=1.78804E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.31927E1
lens5b_imon=2.05986E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.18E0
os_ea2_imon=-8.30488E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06411E2
lens4b_imon=2.01553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1161E1
os_restr2_imon=3.39968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.16914E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.26083E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5802E1
iondef1_imon=5.16216E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5013E1
iondef4_imon=5.28399E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52598E-8
olens1_vset=0.0E0
olens1_vmon=1.78814E-3
olens1_imon=1.22688E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.21003E0
cs_ionaccel_imon=-1.59237E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-7.74273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82763E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=8.11101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93657E3
defgrida_imon=5.17658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50268E3
multb_neg_imon=8.1795E-5
defgridb_vset=0.0E0
defgridb_vmon=3.30442E-2
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33455E1
os_fil1_imon=9.40156E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07936E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63743E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.95254E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6239E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65863E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.57182E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22837E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.42177E-2
chamber_ion_pmon=2.23332E-9
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8512E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.661E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80045E1	-7.15256E-4	-8.80013E1	8.58307E-4	4.05312E-3	9.63449E-2	1.57128E1	-1.96404E1	-1.9966E1	1.50112E1	2.24012E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.43231E-2
2.0E0	3.744E3	4.0E0	3.16E2	1.6E2	-7.09279E-2	-8.80041E1	-8.58307E-4	-8.80013E1	8.58307E-4	4.24385E-3	9.61304E-2	1.58105E1	-1.98135E1	-1.99524E1	1.50214E1	2.24109E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.41756E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80043E1	-4.76837E-4	-8.80012E1	9.53674E-4	3.93391E-3	9.61781E-2	1.58061E1	-1.98087E1	-1.9976E1	1.49993E1	2.23665E-9	2.52921E-3	2.52921E-3	6.29067E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80042E1	-1.0252E-3	-8.80015E1	5.24521E-4	3.74317E-3	9.62257E-2	1.58268E1	-1.98865E1	-1.99461E1	1.5037E1	2.23918E-9	2.51077E-3	2.51077E-3	6.29157E-3	2.41674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80042E1	-1.0252E-3	-8.80012E1	5.24521E-4	4.07696E-3	9.62019E-2	1.58023E1	-1.98278E1	-1.99071E1	1.50016E1	2.24106E-9	2.52342E-3	2.52342E-3	6.30212E-3	2.41674E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80045E1	-9.29832E-4	-8.80011E1	5.00679E-4	4.17233E-3	9.62734E-2	1.58289E1	-1.98624E1	-1.99353E1	1.5004E1	2.23915E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80047E1	-6.91414E-4	-8.80018E1	5.72205E-4	4.22001E-3	9.62734E-2	1.5825E1	-1.98511E1	-1.99254E1	1.50605E1	2.24037E-9	2.51787E-3	2.51787E-3	6.3379E-3	2.41196E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80045E1	-7.86781E-4	-8.80017E1	5.96046E-4	4.24385E-3	9.63688E-2	1.5816E1	-1.98545E1	-1.99696E1	1.50575E1					
1.2E1	1.23E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80044E1	-5.48363E-4	-8.80012E1	6.4373E-4	4.05312E-3	9.61304E-2	1.58226E1	-1.98469E1	-1.9979E1	1.50462E1	2.24012E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.41756E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80046E1	-5.72205E-4	-8.80012E1	4.29153E-4	4.05312E-3	9.61304E-2	1.58822E1	-1.98722E1	-1.99475E1	1.50584E1	2.242E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.41674E-2
1.4E1	1.36E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80043E1	-6.67572E-4	-8.80014E1	6.19888E-4	3.71933E-3	9.61781E-2	1.58191E1	-1.98747E1	-1.99624E1	1.50166E1	2.23608E-9	2.52521E-3	2.52521E-3	6.29035E-3	2.40974E-2
1.5E1	1.22E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80041E1	-6.4373E-4	-8.80018E1	1.16825E-3	4.05312E-3	9.60112E-2	1.58041E1	-1.98651E1	-1.99336E1	1.50671E1	2.23392E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.41611E-2
1.6E1	4.07E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.8004E1	-8.34465E-4	-8.80017E1	9.05991E-4	4.14848E-3	9.62019E-2	1.58125E1	-1.98326E1	-1.9966E1	1.50202E1	2.23381E-9	2.51716E-3	2.51716E-3	6.32386E-3	2.41651E-2
1.7E1	1.352E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.8004E1	-9.05991E-4	-8.80013E1	7.62939E-4	4.24385E-3	9.60588E-2	1.58383E1	-1.99161E1	-1.99017E1	1.50346E1					
1.8E1	5.008E3	8.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80042E1	-1.19209E-3	-8.8001E1	7.39098E-4	3.83854E-3	9.62496E-2	1.58038E1	-1.98305E1	-1.99897E1	1.50166E1	2.24207E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41337E-2
1.9E1	2.569E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80043E1	-9.53674E-4	-8.80014E1	6.91414E-4	4.22001E-3	9.62019E-2	1.57927E1	-1.98675E1	-1.99588E1	1.50593E1	2.24155E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.41405E-2
2.0E1	3.6E1	2.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80042E1	-1.0252E-3	-8.80013E1	6.19888E-4	4.22001E-3	9.63688E-2	1.58107E1	-1.98278E1	-1.99468E1	1.50743E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41966E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80044E1	-8.10623E-4	-8.80013E1	6.67572E-4	4.22001E-3	9.63211E-2	1.58203E1	-1.98641E1	-1.99561E1	1.50202E1	2.24109E-9	2.52538E-3	2.52538E-3	6.34588E-3	2.42387E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80044E1	-6.91414E-4	-8.80014E1	7.86781E-4	4.14848E-3	9.63449E-2	1.58588E1	-1.98188E1	-1.999E1	1.50219E1	2.23011E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.40994E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80042E1	-7.62939E-4	-8.80013E1	5.00679E-4	4.3869E-3	9.64403E-2	1.5802E1	-1.98004E1	-1.99756E1	1.5013E1	2.23332E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.42177E-2