[Scan]
initial_time=2016-01-15T20:41:08
final_time=2016-01-15T20:41:29
ip_count=19
run=1023
dataset=1
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81924E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.55501E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.18201E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.78215E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.37E-8
mult1=-1.01979E-8
mult2=-2.99407E-9
rf_tmon=-5.8763E-3
rf_agc=3.20478E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=6.09517E-10
bslens_vset=-6.2E0
bslens_vmon=-6.91187E0
bslens_imon=3.98334E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20235E1
lens5a_imon=1.89115E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1223E2
lens4a_imon=2.04282E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=2.84611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04737E2
lens23_imon=1.03758E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06226E1
cs_ea1_imon=2.55626E-5
lens1_vset=-2.7E0
lens1_vmon=-2.75176E0
lens1_imon=8.27791E-8
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03234E1
cs_ea2_imon=1.60527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83643E1
cs_ef1a_imon=2.95099E-5
olens2_vset=0.0E0
olens2_vmon=7.62939E-4
olens2_imon=1.05877E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.17781E1
os_ea1_imon=2.45316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.11932E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9178E2
cs_nozzle_imon=1.93128E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.96144E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.19157E-9
tplens_vset=0.0E0
tplens_vmon=-1.77301E0
tplens_imon=8.21795E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99258E1
iondef3_imon=8.42464E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98549E1
iondef2_imon=8.16148E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03093E2
lens6_imon=2.98919E-4
ql6_vset=1.0E-1
ql6_vmon=9.61781E-2
ql6_imon=9.27496E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.43835E0
ionrepsh_imon=1.81941E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32865E1
lens5b_imon=2.05769E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74898E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.16678E0
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06314E2
lens4b_imon=2.01495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.40112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23176E2
cs_ionfoca_imon=6.21348E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01491E1
cs_anode2_imon=2.23956E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58618E1
iondef1_imon=4.81969E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5016E1
iondef4_imon=5.39572E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.52005E-8
olens1_vset=0.0E0
olens1_vmon=1.90735E-3
olens1_imon=1.23231E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1842E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=8.20681E-6
window_vset=0.0E0
window_vmon=2.68399E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.87641E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92582E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=4.73677E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50261E3
multb_neg_imon=8.41743E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.85758E-1
defgridb_imon=5.87233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33451E1
os_fil1_imon=9.40462E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64098E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.95152E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62786E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66022E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.28308E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.40918E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45787E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.696E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80044E1	-6.19888E-4	-8.80011E1	8.82149E-4	4.33922E-3	9.61542E-2	1.5641E1	-1.96918E1	-2.01248E1	1.50335E1	2.23623E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.41756E-2
2.0E0	3.726E3	1.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80046E1	-8.10623E-4	-8.80013E1	1.04904E-3	4.31538E-3	9.60588E-2	1.58216E1	-1.98692E1	-1.99689E1	1.50372E1	2.23678E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.41611E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80046E1	-9.29832E-4	-8.80013E1	1.0252E-3	4.12464E-3	9.60588E-2	1.58138E1	-1.98472E1	-1.9924E1	1.50411E1	2.24402E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.41546E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80046E1	-1.09673E-3	-8.80014E1	8.82149E-4	4.24385E-3	9.6035E-2	1.58015E1	-1.98338E1	-1.99726E1	1.50048E1	2.24057E-9	2.52324E-3	2.52324E-3	6.3275E-3	2.42041E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80047E1	-8.34465E-4	-8.80014E1	7.86781E-4	4.41074E-3	9.59635E-2	1.58262E1	-1.98588E1	-1.99425E1	1.50126E1	2.23961E-9	2.51527E-3	2.51527E-3	6.32483E-3	2.40893E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80047E1	-7.15256E-4	-8.80015E1	8.58307E-4	4.14848E-3	9.61781E-2	1.58222E1	-1.98649E1	-1.99567E1	1.50372E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41127E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80044E1	-7.15256E-4	-8.80013E1	1.07288E-3	4.07696E-3	9.59396E-2	1.57903E1	-1.98284E1	-1.99306E1	1.49884E1	2.23235E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80043E1	-8.82149E-4	-8.80012E1	8.34465E-4	4.29153E-3	9.59873E-2	1.58233E1	-1.98423E1	-1.99254E1	1.50398E1	2.23072E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.41693E-2
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80044E1	-7.86781E-4	-8.80013E1	1.09673E-3	4.07696E-3	9.60588E-2	1.58047E1	-1.98026E1	-1.99612E1	1.49698E1	2.23487E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.41611E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80042E1	-6.91414E-4	-8.80016E1	8.58307E-4	4.07696E-3	9.61065E-2	1.58419E1	-1.98218E1	-1.99414E1	1.5031E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.40918E-2
1.4E1	1.47E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80043E1	-7.15256E-4	-8.80015E1	9.53674E-4	4.07696E-3	9.61781E-2	1.58089E1	-1.9847E1	-1.99991E1	1.50046E1	2.23623E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.41546E-2
1.5E1	1.45E2	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80045E1	-9.77516E-4	-8.80016E1	5.48363E-4	4.36306E-3	9.61781E-2	1.57969E1	-1.98128E1	-1.99101E1	1.49674E1	2.24155E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.40788E-2
1.6E1	4.6E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80045E1	-1.00136E-3	-8.80015E1	6.4373E-4	4.50611E-3	9.63211E-2	1.58732E1	-1.98813E1	-1.99378E1	1.50467E1	2.23369E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.41052E-2
1.7E1	1.214E3	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80045E1	-8.34465E-4	-8.80018E1	7.15256E-4	4.29153E-3	9.62973E-2	1.58162E1	-1.98647E1	-1.99414E1	1.50154E1	2.23487E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.41817E-2
1.8E1	5.101E3	4.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80046E1	-6.19888E-4	-8.80015E1	7.86781E-4	4.22001E-3	9.65357E-2	1.57945E1	-1.98452E1	-1.99684E1	1.50563E1	2.23915E-9	2.5199E-3	2.5199E-3	6.31563E-3	2.40813E-2
1.9E1	2.47E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80045E1	-8.34465E-4	-8.80013E1	6.91414E-4	3.76701E-3	9.62496E-2	1.58442E1	-1.98857E1	-1.99512E1	1.50388E1					
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80043E1	-7.39098E-4	-8.80016E1	9.29832E-4	4.22001E-3	9.66072E-2	1.58292E1	-1.98458E1	-1.99419E1	1.50611E1	2.23526E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41127E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80043E1	-1.04904E-3	-8.80015E1	1.00136E-3	4.17233E-3	9.62257E-2	1.58359E1	-1.98515E1	-1.99744E1	1.5041E1	2.23332E-9	2.51443E-3	2.51443E-3	6.29645E-3	2.41966E-2
2.2E1	2.4E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80043E1	-8.34465E-4	-8.80014E1	8.82149E-4	4.14848E-3	9.6035E-2	1.58221E1	-1.9817E1	-1.9942E1	1.50316E1	2.2369E-9	2.52093E-3	2.52093E-3	6.33863E-3	2.4094E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80044E1	-6.19888E-4	-8.80015E1	5.72205E-4	4.26769E-3	9.61781E-2	1.58618E1	-1.98549E1	-1.99258E1	1.5016E1	2.23623E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40918E-2