[Scan]
initial_time=2016-01-15T20:42:32
final_time=2016-01-15T20:42:52
ip_count=19
run=1023
dataset=1
scan=55
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.76694E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.31576E-10
ql2_vset=
ql2_vmon=-1.23978E-3
ql2_imon=1.16194E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.71716E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=1.35753E-8
mult1=-1.01149E-8
mult2=-2.72449E-9
rf_tmon=-3.74685E-3
rf_agc=3.42304E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=6.01125E-10
bslens_vset=-6.2E0
bslens_vmon=-6.78537E0
bslens_imon=3.12372E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.94899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12392E2
lens4a_imon=2.04463E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.84323E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02896E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05731E1
cs_ea1_imon=2.56521E-5
lens1_vset=-2.7E0
lens1_vmon=-2.85073E0
lens1_imon=7.87711E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03466E1
cs_ea2_imon=1.56992E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.97657E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.0608E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.27328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16196E1
os_ea1_imon=2.40664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.11759E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.98126E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.18187E-9
tplens_vset=0.0E0
tplens_vmon=-1.71753E0
tplens_imon=4.44389E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00421E1
iondef3_imon=8.46469E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98724E1
iondef2_imon=8.88588E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03101E2
lens6_imon=2.9859E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=9.34219E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.39072E0
ionrepsh_imon=1.77663E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32737E1
lens5b_imon=2.09942E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.16833E0
os_ea2_imon=-3.02427E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06269E2
lens4b_imon=2.01154E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.14524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.41265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.23416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02212E1
cs_anode2_imon=2.24677E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57935E1
iondef1_imon=5.1518E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50044E1
iondef4_imon=5.59033E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52779E-8
olens1_vset=0.0E0
olens1_vmon=1.85966E-3
olens1_imon=1.24403E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47543E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.15541E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82761E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92563E3
multa_neg_imon=7.90546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.17823E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50194E3
multb_neg_imon=7.53382E-5
defgridb_vset=0.0E0
defgridb_vmon=-8.12027E-1
defgridb_imon=5.81013E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33467E1
os_fil1_imon=9.40426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64745E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.96924E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63477E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66621E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7787E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.41611E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25965E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.714E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80042E1	-8.10623E-4	-8.80016E1	6.67572E-4	4.26769E-3	9.60588E-2	1.59062E1	-1.99342E1	-1.98645E1	1.50226E1	2.24251E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.42024E-2
2.0E0	3.647E3	5.0E0	3.16E2	1.6E2	-7.09279E-2	-8.80041E1	-9.77516E-4	-8.80014E1	5.24521E-4	4.36306E-3	9.61304E-2	1.58197E1	-1.98459E1	-1.99316E1	1.50503E1	2.23429E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.41127E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80041E1	-6.91414E-4	-8.80014E1	6.67572E-4	4.36306E-3	9.62019E-2	1.57896E1	-1.98724E1	-1.99396E1	1.49953E1	2.23566E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.42336E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.08504E-2	-8.80044E1	-1.00136E-3	-8.80011E1	8.58307E-4	4.41074E-3	9.64403E-2	1.58083E1	-1.98537E1	-1.99558E1	1.49992E1	2.23731E-9	2.51498E-3	2.51498E-3	6.31798E-3	2.40462E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80043E1	-1.0252E-3	-8.80013E1	6.19888E-4	4.62532E-3	9.65834E-2	1.58032E1	-1.98228E1	-1.99602E1	1.50611E1	2.23818E-9	2.52318E-3	2.52318E-3	6.28552E-3	2.41546E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80043E1	-1.04904E-3	-8.80012E1	8.10623E-4	4.55379E-3	9.67026E-2	1.5854E1	-1.98575E1	-1.99659E1	1.50136E1	2.23773E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.42024E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.03094E-2	-8.80043E1	-9.77516E-4	-8.80012E1	7.15256E-4	4.45843E-3	9.6488E-2	1.58353E1	-1.98699E1	-1.9939E1	1.50298E1	2.24109E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80042E1	-1.09673E-3	-8.80015E1	7.62939E-4	4.22001E-3	9.65595E-2	1.58179E1	-1.98546E1	-1.99331E1	1.50617E1	2.24012E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.39665E-2
1.2E1	1.2E2	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.8004E1	-1.14441E-3	-8.80013E1	9.53674E-4	4.52995E-3	9.63211E-2	1.58023E1	-1.98537E1	-1.99101E1	1.50443E1	2.24207E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.40499E-2
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.8004E1	-9.53674E-4	-8.80013E1	5.72205E-4	4.45843E-3	9.62257E-2	1.58577E1	-1.98312E1	-1.99365E1	1.50142E1	2.24012E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.41127E-2
1.4E1	1.51E2	0.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80039E1	-1.04904E-3	-8.80012E1	4.05312E-4	4.33922E-3	9.60827E-2	1.58162E1	-1.98623E1	-1.99437E1	1.5031E1	2.24109E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41756E-2
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80041E1	-1.12057E-3	-8.80012E1	3.8147E-4	4.31538E-3	9.60112E-2	1.5851E1	-1.97871E1	-2.00011E1	1.50715E1	2.23392E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.41405E-2
1.6E1	4.34E2	1.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80042E1	-9.77516E-4	-8.80012E1	5.00679E-4	4.36306E-3	9.63688E-2	1.57841E1	-1.98498E1	-1.99268E1	1.50347E1	2.23414E-9	2.52509E-3	2.52509E-3	6.31779E-3	2.42132E-2
1.7E1	1.342E3	0.0E0	6.87E2	4.7E2	-7.05415E-2	-8.80039E1	-1.26362E-3	-8.80011E1	6.4373E-4	4.48227E-3	9.62973E-2	1.58456E1	-1.9826E1	-1.98933E1	1.4983E1	2.23858E-9	2.5257E-3	2.5257E-3	6.32483E-3	2.41115E-2
1.8E1	5.344E3	2.0E0	7.27E2	5.0E2	-7.08504E-2	-8.8004E1	-1.0252E-3	-8.80011E1	5.96046E-4	4.14848E-3	9.62496E-2	1.57979E1	-1.98493E1	-1.99638E1	1.50382E1	2.23866E-9	2.52099E-3	2.52099E-3	6.31014E-3	2.40918E-2
1.9E1	2.624E3	1.0E0	7.68E2	5.29E2	-7.10825E-2	-8.80043E1	-1.0252E-3	-8.80011E1	7.15256E-4	4.29153E-3	9.57489E-2	1.57805E1	-1.98698E1	-1.99598E1	1.49848E1					
2.0E1	4.5E1	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80042E1	-1.23978E-3	-8.80008E1	7.62939E-4	4.07696E-3	9.63688E-2	1.57967E1	-1.98275E1	-1.99691E1	1.50821E1	2.23429E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.41546E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80043E1	-1.21593E-3	-8.80011E1	6.19888E-4	4.07696E-3	9.62973E-2	1.58095E1	-1.98056E1	-1.99432E1	1.5022E1	2.24012E-9	2.52318E-3	2.52318E-3	6.28006E-3	2.41546E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80042E1	-1.21593E-3	-8.80014E1	3.09944E-4	4.26769E-3	9.62496E-2	1.58185E1	-1.98741E1	-1.99703E1	1.50418E1	2.24251E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.40994E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80043E1	-1.23978E-3	-8.80015E1	6.19888E-4	4.14848E-3	9.61065E-2	1.57935E1	-1.98724E1	-2.00421E1	1.50044E1	2.23773E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.41611E-2