[Scan]
initial_time=2016-01-15T20:43:26
final_time=2016-01-15T20:43:47
ip_count=19
run=1023
dataset=1
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.78524E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.54726E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.16397E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.72298E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.35626E-8
mult1=-1.03583E-8
mult2=-2.8105E-9
rf_tmon=-4.25171E-3
rf_agc=3.40097E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.79953E-10
bslens_vset=-6.2E0
bslens_vmon=-6.74064E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12438E2
lens4a_imon=2.04649E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.8508E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02431E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0494E1
cs_ea1_imon=2.58798E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94943E0
lens1_imon=1.30846E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.53209E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.96901E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.06726E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.25598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15594E1
os_ea1_imon=2.37241E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.16006E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.96901E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.22895E-9
tplens_vset=0.0E0
tplens_vmon=-1.66426E0
tplens_imon=-3.57025E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99917E1
iondef3_imon=8.67338E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98724E1
iondef2_imon=9.39437E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03089E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.6488E-2
ql6_imon=9.58753E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30257E0
ionrepsh_imon=1.74695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33351E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26772E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71582E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01612E0
os_ef2alow_imon=-2.342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.05218E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.41121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.27008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02284E1
cs_anode2_imon=2.21974E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58383E1
iondef1_imon=5.40369E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50358E1
iondef4_imon=5.5651E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.52807E-8
olens1_vset=0.0E0
olens1_vmon=2.07424E-3
olens1_imon=1.24781E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02183E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82725E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.86009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.18454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.12487E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33453E1
os_fil1_imon=9.40372E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65141E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30936E1
cs_fil1_imon=9.94972E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74429E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22706E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.625E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80039E1	-6.19888E-4	-8.80014E1	9.77516E-4	4.24385E-3	9.63449E-2	1.57987E1	-1.98134E1	-2.00009E1	1.50238E1	2.2372E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.40918E-2
2.0E0	3.757E3	5.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80041E1	-7.62939E-4	-8.80014E1	7.39098E-4	4.31538E-3	9.60588E-2	1.58462E1	-1.98819E1	-1.99113E1	1.4977E1	2.23583E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.41611E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80041E1	-8.10623E-4	-8.80017E1	7.86781E-4	4.22001E-3	9.59396E-2	1.58044E1	-1.98771E1	-1.99337E1	1.50659E1	2.24012E-9	2.52977E-3	2.52977E-3	6.29098E-3	2.42387E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80042E1	-6.91414E-4	-8.80018E1	5.72205E-4	4.41074E-3	9.65357E-2	1.58431E1	-1.98561E1	-1.9969E1	1.50437E1	2.23964E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.4223E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80045E1	-8.34465E-4	-8.80015E1	8.10623E-4	4.17233E-3	9.65834E-2	1.58359E1	-1.9835E1	-1.99786E1	1.50244E1	2.24597E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.40708E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80042E1	-7.15256E-4	-8.80013E1	8.34465E-4	3.93391E-3	9.62973E-2	1.58333E1	-1.98198E1	-1.99685E1	1.50773E1	2.24012E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8004E1	-7.39098E-4	-8.80018E1	8.34465E-4	3.60012E-3	9.6488E-2	1.58087E1	-1.98373E1	-1.99481E1	1.50503E1	2.23575E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.42282E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80042E1	-7.62939E-4	-8.80016E1	7.62939E-4	3.91006E-3	9.63926E-2	1.57837E1	-1.98765E1	-1.9936E1	1.50298E1					
1.2E1	1.21E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80044E1	-1.07288E-3	-8.80015E1	7.15256E-4	4.33922E-3	9.64403E-2	1.58095E1	-1.98611E1	-1.9902E1	1.49496E1	2.23773E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.41405E-2
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.06958E-2	-8.80045E1	-9.53674E-4	-8.80016E1	8.58307E-4	3.8147E-3	9.6488E-2	1.58343E1	-1.98664E1	-1.99974E1	1.50405E1	2.23731E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.40664E-2
1.4E1	1.6E2	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80043E1	-8.10623E-4	-8.80015E1	8.34465E-4	3.98159E-3	9.63211E-2	1.58041E1	-1.98008E1	-1.99666E1	1.49878E1	2.23911E-9	2.51611E-3	2.51611E-3	6.3245E-3	2.40323E-2
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.06958E-2	-8.8004E1	-9.77516E-4	-8.80018E1	1.0252E-3	3.76701E-3	9.62496E-2	1.58586E1	-1.98647E1	-1.99514E1	1.50439E1	2.24207E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.41966E-2
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.06187E-2	-8.80044E1	-9.29832E-4	-8.80014E1	8.34465E-4	4.00543E-3	9.62257E-2	1.58311E1	-1.98687E1	-1.99937E1	1.50064E1	2.2406E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.40378E-2
1.7E1	1.247E3	2.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80045E1	-1.07288E-3	-8.80016E1	6.91414E-4	4.33922E-3	9.67503E-2	1.58443E1	-1.98314E1	-1.99492E1	1.50364E1	2.24062E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.41693E-2
1.8E1	5.204E3	2.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80043E1	-1.0252E-3	-8.80015E1	7.15256E-4	4.07696E-3	9.66549E-2	1.58325E1	-1.98573E1	-1.99784E1	1.50364E1	2.24155E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.41199E-2
1.9E1	2.577E3	5.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80045E1	-9.29832E-4	-8.80014E1	7.15256E-4	4.05312E-3	9.64165E-2	1.58307E1	-1.98679E1	-1.99365E1	1.49891E1	2.23773E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.42024E-2
2.0E1	3.0E1	0.0E0	8.08E2	5.58E2	-7.10051E-2	-8.80043E1	-1.16825E-3	-8.80011E1	5.00679E-4	4.05312E-3	9.63449E-2	1.58606E1	-1.98633E1	-1.99581E1	1.50262E1	2.23429E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.40499E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.09279E-2	-8.80044E1	-8.58307E-4	-8.80012E1	8.58307E-4	4.48227E-3	9.62019E-2	1.58276E1	-1.98688E1	-1.99634E1	1.50035E1	2.23729E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.41627E-2
2.2E1	2.2E1	0.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80045E1	-1.09673E-3	-8.8001E1	9.53674E-4	4.50611E-3	9.65595E-2	1.58119E1	-1.98597E1	-1.99486E1	1.50611E1	2.23885E-9	2.52069E-3	2.52069E-3	6.33131E-3	2.41641E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80043E1	-9.53674E-4	-8.80012E1	8.34465E-4	4.673E-3	9.6488E-2	1.58383E1	-1.98724E1	-1.99917E1	1.50358E1