[Scan]
initial_time=2016-01-15T20:44:21
final_time=2016-01-15T20:44:42
ip_count=19
run=1023
dataset=1
scan=59
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.79475E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.44629E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.1863E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.74079E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.35912E-8
mult1=-8.2594E-9
mult2=-2.84636E-9
rf_tmon=-4.8549E-3
rf_agc=3.30151E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.79858E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67095E0
bslens_imon=2.26758E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19407E1
lens5a_imon=2.00337E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.05218E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=2.87206E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04578E1
cs_ea1_imon=2.57893E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99982E0
lens1_imon=1.76439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03715E1
cs_ea2_imon=1.50826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.96072E-5
olens2_vset=0.0E0
olens2_vmon=8.10623E-4
olens2_imon=1.06921E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14645E1
os_ea1_imon=2.36626E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20251E0
cs_ionrep_imon=1.19973E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92018E2
cs_nozzle_imon=1.93659E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.9964E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.15658E-9
tplens_vset=0.0E0
tplens_vmon=-1.66163E0
tplens_imon=-4.9449E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99222E1
iondef3_imon=8.9377E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98603E1
iondef2_imon=9.43723E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03067E2
lens6_imon=2.98107E-4
ql6_vset=1.0E-1
ql6_vmon=9.62973E-2
ql6_imon=9.48596E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26373E0
ionrepsh_imon=1.76463E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34025E1
lens5b_imon=2.176E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26495E0
os_ea2_imon=-7.80981E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00535E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71564E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28826E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23272E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57975E1
iondef1_imon=5.31615E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50388E1
iondef4_imon=5.30922E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.52351E-8
olens1_vset=0.0E0
olens1_vmon=1.66893E-3
olens1_imon=1.24505E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02122E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56615E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.68999E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82755E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.83309E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.03143E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62418E0
defgridb_imon=6.20501E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33478E1
os_fil1_imon=9.44558E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65345E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.96936E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63333E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25257E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65474E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.23033E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.41546E-2
chamber_ion_pmon=2.23235E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43385E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.719E3	2.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80044E1	-5.24521E-4	-8.80013E1	1.07288E-3	4.02927E-3	9.63449E-2	1.5815E1	-1.98605E1	-1.9998E1	1.50479E1	2.23818E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41966E-2
2.0E0	3.666E3	2.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80042E1	-6.91414E-4	-8.80014E1	6.19888E-4	3.98159E-3	9.62734E-2	1.58424E1	-1.9819E1	-1.99702E1	1.50455E1	2.24155E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.41405E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80043E1	-5.72205E-4	-8.80012E1	6.91414E-4	4.36306E-3	9.61542E-2	1.58707E1	-1.98498E1	-1.99715E1	1.50097E1	2.23665E-9	2.51136E-3	2.51136E-3	6.31858E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80045E1	-7.15256E-4	-8.80013E1	7.62939E-4	4.36306E-3	9.58681E-2	1.58606E1	-1.99077E1	-1.99372E1	1.50244E1	2.242E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.42079E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80044E1	-6.19888E-4	-8.80014E1	8.10623E-4	4.26769E-3	9.60112E-2	1.58419E1	-1.98565E1	-1.99254E1	1.50491E1	2.23964E-9	2.51793E-3	2.51793E-3	6.31278E-3	2.41714E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80043E1	-1.04904E-3	-8.80013E1	9.77516E-4	4.33922E-3	9.63211E-2	1.58272E1	-1.98385E1	-1.99601E1	1.50259E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80043E1	-1.0252E-3	-8.80015E1	7.62939E-4	4.45843E-3	9.61781E-2	1.58113E1	-1.98236E1	-1.99444E1	1.50527E1	2.23369E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.40413E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80045E1	-9.53674E-4	-8.80011E1	7.62939E-4	4.33922E-3	9.62734E-2	1.58303E1	-1.98452E1	-1.99461E1	1.50497E1	2.23623E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41966E-2
1.2E1	1.37E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80043E1	-1.26362E-3	-8.80013E1	9.29832E-4	4.07696E-3	9.64403E-2	1.57989E1	-1.98814E1	-1.99487E1	1.50364E1	2.23526E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.41966E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80042E1	-1.40667E-3	-8.80012E1	8.10623E-4	3.71933E-3	9.6488E-2	1.58498E1	-1.98939E1	-1.99498E1	1.50581E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41337E-2
1.4E1	1.4E2	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80043E1	-1.26362E-3	-8.80012E1	6.91414E-4	3.74317E-3	9.65357E-2	1.58251E1	-1.98993E1	-1.99432E1	1.50334E1	2.23818E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.41127E-2
1.5E1	1.18E2	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.8004E1	-8.10623E-4	-8.80014E1	1.00136E-3	3.95775E-3	9.61304E-2	1.58582E1	-1.9835E1	-1.9981E1	1.50118E1	2.24304E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.41756E-2
1.6E1	4.21E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80042E1	-7.15256E-4	-8.80014E1	9.05991E-4	4.05312E-3	9.64403E-2	1.5848E1	-1.98602E1	-1.99583E1	1.50227E1	2.24012E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.40918E-2
1.7E1	1.282E3	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.8004E1	-9.77516E-4	-8.80014E1	7.15256E-4	4.45843E-3	9.66787E-2	1.58167E1	-1.98434E1	-1.993E1	1.50545E1	2.23768E-9	2.52013E-3	2.52013E-3	6.30052E-3	2.41556E-2
1.8E1	5.277E3	7.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80043E1	-8.82149E-4	-8.80012E1	6.4373E-4	4.24385E-3	9.64642E-2	1.58419E1	-1.98164E1	-1.99642E1	1.49866E1	2.2372E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.41127E-2
1.9E1	2.558E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80042E1	-1.04904E-3	-8.80014E1	5.72205E-4	4.33922E-3	9.61542E-2	1.58221E1	-1.98641E1	-1.99667E1	1.49993E1	2.24012E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.42177E-2
2.0E1	3.5E1	0.0E0	8.08E2	5.58E2	-7.17007E-2	-8.8004E1	-1.38283E-3	-8.80013E1	9.53674E-4	4.33922E-3	9.65834E-2	1.58191E1	-1.98392E1	-1.99594E1	1.49445E1	2.24155E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.40378E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80042E1	-9.53674E-4	-8.8001E1	5.00679E-4	4.1008E-3	9.64642E-2	1.58296E1	-1.98423E1	-1.991E1	1.51296E1	2.24109E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.42177E-2
2.2E1	2.6E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80041E1	-1.0252E-3	-8.80013E1	9.53674E-4	4.14848E-3	9.6488E-2	1.58179E1	-1.99197E1	-1.99738E1	1.49908E1	2.23297E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.41405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80043E1	-9.29832E-4	-8.80012E1	7.86781E-4	4.26769E-3	9.62973E-2	1.57975E1	-1.98603E1	-1.99222E1	1.50388E1	2.23235E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41546E-2