[Scan]
initial_time=2016-01-15T20:44:49
final_time=2016-01-15T20:45:09
ip_count=19
run=1023
dataset=1
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.7658E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.04026E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.27589E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.81143E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.35888E-8
mult1=-9.72835E-9
mult2=-2.7246E-9
rf_tmon=-6.27885E-3
rf_agc=3.11165E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=6.66845E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64659E0
bslens_imon=2.3678E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19897E1
lens5a_imon=2.00652E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=2.8699E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.02246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04472E1
cs_ea1_imon=2.5707E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01511E0
lens1_imon=1.3319E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03603E1
cs_ea2_imon=1.53097E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=2.96612E-5
olens2_vset=0.0E0
olens2_vmon=8.58307E-4
olens2_imon=1.06903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.37569E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63389E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25789E0
cs_ionrep_imon=1.183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02278E1
cs_anode1_imon=2.9672E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.14015E-9
tplens_vset=0.0E0
tplens_vmon=-1.66171E0
tplens_imon=-4.23588E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99282E1
iondef3_imon=8.94826E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98344E1
iondef2_imon=9.2646E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.98186E-4
ql6_vset=1.0E-1
ql6_vmon=9.61542E-2
ql6_imon=9.38368E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27933E0
ionrepsh_imon=1.78473E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34196E1
lens5b_imon=2.17442E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74069E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25557E0
os_ea2_imon=-8.51161E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71906E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.33839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.41013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30067E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.2547E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58047E1
iondef1_imon=5.30867E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50515E1
iondef4_imon=5.13263E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.5407E-8
olens1_vset=0.0E0
olens1_vmon=1.7643E-3
olens1_imon=1.248E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.64643E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5685E1
einzel_imon=7.95453E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82735E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.04678E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.5462E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.36659E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46451E0
defgridb_imon=5.84053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33449E1
os_fil1_imon=9.43423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65315E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.96347E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6712E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.09582E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69131E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22817E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.41817E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.88434E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.639E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80041E1	-1.09673E-3	-8.80014E1	8.34465E-4	4.24385E-3	9.62734E-2	1.58311E1	-1.98561E1	-1.99191E1	1.50097E1	2.23487E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.42437E-2
2.0E0	3.737E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80045E1	-1.3113E-3	-8.80014E1	6.91414E-4	4.29153E-3	9.61542E-2	1.58179E1	-1.98507E1	-1.99648E1	1.50533E1	2.23678E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.40994E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80046E1	-8.82149E-4	-8.80011E1	9.53674E-4	4.02927E-3	9.59158E-2	1.58421E1	-1.98814E1	-1.99379E1	1.50262E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.40708E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80045E1	-6.4373E-4	-8.80013E1	6.91414E-4	4.26769E-3	9.58443E-2	1.58257E1	-1.98464E1	-1.99882E1	1.50184E1	2.23289E-9	2.5216E-3	2.5216E-3	6.29211E-3	2.41597E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80046E1	-1.0252E-3	-8.80017E1	1.0252E-3	4.02927E-3	9.61304E-2	1.58375E1	-1.98337E1	-1.99414E1	1.50247E1	2.24207E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.41756E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80046E1	-1.0252E-3	-8.80013E1	1.00136E-3	4.12464E-3	9.61065E-2	1.58392E1	-1.9847E1	-1.99508E1	1.50381E1	2.23963E-9	2.5147E-3	2.5147E-3	6.31299E-3	2.41907E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80043E1	-1.21593E-3	-8.80013E1	8.58307E-4	4.07696E-3	9.5892E-2	1.58227E1	-1.98531E1	-1.99426E1	1.50298E1	2.23964E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.41817E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80042E1	-9.29832E-4	-8.80014E1	6.19888E-4	3.95775E-3	9.61065E-2	1.58091E1	-1.98576E1	-1.9936E1	1.50485E1	2.24161E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.41265E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80042E1	-7.86781E-4	-8.80016E1	7.39098E-4	3.79086E-3	9.61304E-2	1.5832E1	-1.98465E1	-1.99671E1	1.50581E1	2.23637E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.40261E-2
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80043E1	-9.53674E-4	-8.80016E1	6.91414E-4	3.93391E-3	9.62496E-2	1.58415E1	-1.98305E1	-1.99396E1	1.5037E1	2.23468E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.40839E-2
1.4E1	1.48E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80043E1	-1.12057E-3	-8.80013E1	5.96046E-4	4.36306E-3	9.61304E-2	1.58168E1	-1.98635E1	-1.99514E1	1.50148E1	2.23487E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.41199E-2
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80042E1	-8.58307E-4	-8.80014E1	4.29153E-4	4.22001E-3	9.62734E-2	1.58179E1	-1.98643E1	-1.99702E1	1.50346E1	2.24207E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.41127E-2
1.6E1	4.33E2	1.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80044E1	-1.09673E-3	-8.80013E1	6.4373E-4	4.31538E-3	9.6035E-2	1.58445E1	-1.98423E1	-1.99638E1	1.50132E1	2.23623E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41756E-2
1.7E1	1.261E3	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80044E1	-1.04904E-3	-8.80015E1	7.62939E-4	4.22001E-3	9.63449E-2	1.58299E1	-1.98344E1	-1.99648E1	1.50431E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41756E-2
1.8E1	5.223E3	2.0E0	7.27E2	5.0E2	-7.201E-2	-8.80044E1	-1.0252E-3	-8.80011E1	6.19888E-4	4.33922E-3	9.65834E-2	1.58395E1	-1.98549E1	-1.99636E1	1.50214E1	2.23843E-9	2.52514E-3	2.52514E-3	6.31283E-3	2.4106E-2
1.9E1	2.661E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80044E1	-8.34465E-4	-8.80012E1	5.72205E-4	4.41074E-3	9.62496E-2	1.58245E1	-1.98368E1	-1.99167E1	1.5025E1					
2.0E1	3.9E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80045E1	-8.82149E-4	-8.80014E1	7.39098E-4	4.36306E-3	9.65595E-2	1.5792E1	-1.98717E1	-1.99508E1	1.50178E1	2.24012E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80044E1	-9.29832E-4	-8.80011E1	6.67572E-4	4.07696E-3	9.66549E-2	1.58371E1	-1.98495E1	-1.99672E1	1.5159E1	2.23818E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.40708E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80045E1	-6.91414E-4	-8.80015E1	6.91414E-4	4.12464E-3	9.62973E-2	1.58345E1	-1.98529E1	-1.99644E1	1.50242E1	2.23773E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.4223E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80045E1	-5.96046E-4	-8.80016E1	7.86781E-4	4.3869E-3	9.61542E-2	1.58047E1	-1.98344E1	-1.99282E1	1.50515E1	2.23583E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.41817E-2