[Scan]
initial_time=2016-01-15T20:45:44
final_time=2016-01-15T20:46:03
ip_count=19
run=1023
dataset=1
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.84797E-6
ql1_vset=
ql1_vmon=-8.80046E1
ql1_imon=-7.03311E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.16047E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.69524E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.35676E-8
mult1=-9.67877E-9
mult2=-2.65074E-9
rf_tmon=-5.51439E-3
rf_agc=3.20832E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=6.07693E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.85764E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.56662E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00646E0
lens1_imon=1.64425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03207E1
cs_ea2_imon=1.53807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84749E1
cs_ef1a_imon=2.95783E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.07143E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.36594E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.20466E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01593E1
cs_anode1_imon=2.98414E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.16473E-9
tplens_vset=0.0E0
tplens_vmon=-1.74349E0
tplens_imon=-2.63493E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99478E1
iondef3_imon=9.00976E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98358E1
iondef2_imon=9.20443E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03081E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=9.29153E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.78158E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.1511E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74868E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29457E0
os_ea2_imon=-4.617E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.42491E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.27061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02097E1
cs_anode2_imon=2.26011E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58439E1
iondef1_imon=5.6367E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50222E1
iondef4_imon=5.4678E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.53001E-8
olens1_vset=0.0E0
olens1_vmon=1.85966E-3
olens1_imon=1.2492E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02133E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-5.9047E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82728E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.87371E1
mask2_imon=-4.49916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=6.8224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.40287E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50595E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33464E1
os_fil1_imon=9.41363E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05996E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65269E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.96396E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67404E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2286E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31779E-3
inlet_lpb_pmon=2.41535E-2
chamber_ion_pmon=2.23598E-9
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.96533E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.662E3	3.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80046E1	-7.62939E-4	-8.80011E1	8.34465E-4	4.07696E-3	9.62496E-2	1.57955E1	-1.98405E1	-1.99691E1	1.50555E1	2.23583E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.4223E-2
2.0E0	3.856E3	7.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80041E1	-1.09673E-3	-8.80011E1	7.86781E-4	3.69549E-3	9.65595E-2	1.58442E1	-1.99034E1	-1.99053E1	1.50078E1	2.23869E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.41611E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80043E1	-1.04904E-3	-8.80015E1	7.62939E-4	3.98159E-3	9.65834E-2	1.58622E1	-1.98818E1	-1.99254E1	1.50462E1	2.24255E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41651E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80044E1	-1.23978E-3	-8.80014E1	3.09944E-4	3.83854E-3	9.63449E-2	1.58131E1	-1.98416E1	-1.9969E1	1.5034E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80045E1	-8.58307E-4	-8.80012E1	5.48363E-4	4.24385E-3	9.66787E-2	1.58457E1	-1.98187E1	-1.99709E1	1.50364E1	2.23332E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80046E1	-1.00136E-3	-8.80013E1	6.91414E-4	4.05312E-3	9.6488E-2	1.57915E1	-1.98825E1	-1.9984E1	1.50358E1	2.24304E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80043E1	-1.12057E-3	-8.80014E1	7.39098E-4	4.12464E-3	9.58443E-2	1.58035E1	-1.98681E1	-1.99354E1	1.5022E1	2.23429E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.42387E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80044E1	-8.34465E-4	-8.80013E1	5.72205E-4	4.26769E-3	9.62257E-2	1.5866E1	-1.98362E1	-1.99804E1	1.5025E1	2.23392E-9	2.5131E-3	2.5131E-3	6.30202E-3	2.39764E-2
1.2E1	1.13E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80045E1	-9.53674E-4	-8.80015E1	5.72205E-4	4.36306E-3	9.65357E-2	1.58582E1	-1.98921E1	-1.996E1	1.50304E1	2.23818E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.40708E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80043E1	-9.29832E-4	-8.80014E1	8.82149E-4	4.26769E-3	9.63688E-2	1.58504E1	-1.98296E1	-1.99222E1	1.50382E1	2.23041E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.40918E-2
1.4E1	1.45E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80047E1	-8.58307E-4	-8.80016E1	8.58307E-4	3.88622E-3	9.63926E-2	1.57932E1	-1.98653E1	-2.00015E1	1.50394E1	2.23818E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41756E-2
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80043E1	-1.14441E-3	-8.80011E1	8.82149E-4	4.00543E-3	9.62973E-2	1.57987E1	-1.98771E1	-1.99252E1	1.5008E1	2.23623E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.42387E-2
1.6E1	4.09E2	1.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80045E1	-7.39098E-4	-8.80013E1	6.19888E-4	3.95775E-3	9.63211E-2	1.58365E1	-1.9808E1	-1.99612E1	1.50058E1	2.23773E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.41817E-2
1.7E1	1.266E3	1.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80047E1	-9.53674E-4	-8.80011E1	4.52995E-4	4.31538E-3	9.64642E-2	1.57867E1	-1.98549E1	-1.99732E1	1.50683E1	2.23818E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.42387E-2
1.8E1	5.237E3	1.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80045E1	-8.10623E-4	-8.80012E1	3.8147E-4	4.36306E-3	9.63211E-2	1.58571E1	-1.98986E1	-1.99292E1	1.50166E1	2.23938E-9	2.52285E-3	2.52285E-3	6.31017E-3	2.41725E-2
1.9E1	2.568E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80044E1	-6.19888E-4	-8.80011E1	4.29153E-4	4.3869E-3	9.61542E-2	1.58126E1	-1.98706E1	-1.99685E1	1.49235E1					
2.0E1	5.5E1	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80044E1	-9.53674E-4	-8.80011E1	5.96046E-4	4.17233E-3	9.61781E-2	1.58497E1	-1.98361E1	-1.99916E1	1.50388E1	2.23915E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41756E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80047E1	-1.04904E-3	-8.80012E1	7.86781E-4	4.43459E-3	9.62257E-2	1.58238E1	-1.98653E1	-1.99832E1	1.5008E1	2.23818E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.40918E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80045E1	-1.14441E-3	-8.80013E1	6.67572E-4	4.14848E-3	9.63211E-2	1.58351E1	-1.98719E1	-1.99271E1	1.50335E1	2.23583E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.41199E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80046E1	-1.00136E-3	-8.80014E1	6.67572E-4	3.98159E-3	9.62257E-2	1.58439E1	-1.98358E1	-1.99478E1	1.50222E1	2.23598E-9	2.51575E-3	2.51575E-3	6.31779E-3	2.41535E-2