[Scan]
initial_time=2016-01-15T20:47:05
final_time=2016-01-15T20:47:25
ip_count=19
run=1023
dataset=1
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79365E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.05194E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.19557E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.66249E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.35794E-8
mult1=-8.2699E-9
mult2=-2.74677E-9
rf_tmon=-5.67748E-3
rf_agc=3.22945E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=6.12712E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64096E0
bslens_imon=2.52469E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=2.03313E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04759E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=2.85548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02106E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04682E1
cs_ea1_imon=2.56975E-5
lens1_vset=-2.7E0
lens1_vmon=-2.89514E0
lens1_imon=1.151E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03556E1
cs_ea2_imon=1.54389E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.95243E-5
olens2_vset=0.0E0
olens2_vmon=7.86781E-4
olens2_imon=1.07302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14859E1
os_ea1_imon=2.38132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24536E0
cs_ionrep_imon=1.21332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93486E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=2.98594E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.07144E-9
tplens_vset=0.0E0
tplens_vmon=-1.69224E0
tplens_imon=-2.26363E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99785E1
iondef3_imon=8.79445E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98529E1
iondef2_imon=9.19114E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03069E2
lens6_imon=2.98206E-4
ql6_vset=1.0E-1
ql6_vmon=9.61542E-2
ql6_imon=9.57096E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25883E0
ionrepsh_imon=1.8043E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33052E1
lens5b_imon=2.18813E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.1074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28883E0
os_ea2_imon=-8.47095E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00799E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.1665E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03714E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11532E1
os_restr2_imon=3.41121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.25741E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.26299E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58115E1
iondef1_imon=5.44103E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5052E1
iondef4_imon=5.24435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.52816E-8
olens1_vset=0.0E0
olens1_vmon=1.85966E-3
olens1_imon=1.25312E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20102E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.56986E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82741E2
mask1_imon=2.38998E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92424E3
multa_neg_imon=1.02269E-4
defgrida_vset=2.902E3
defgrida_vmon=2.93772E3
defgrida_imon=6.26745E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49937E3
multb_neg_imon=9.16175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37291E0
defgridb_imon=5.54388E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33435E1
os_fil1_imon=9.4197E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65429E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=9.95723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66944E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10802E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6403E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22781E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.40378E-2
chamber_ion_pmon=2.2473E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00137E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.668E3	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.8004E1	-9.53674E-4	-8.80013E1	5.00679E-4	3.95775E-3	9.62496E-2	1.57873E1	-1.98458E1	-1.99939E1	1.50376E1	2.23332E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41337E-2
2.0E0	3.639E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80041E1	-1.12057E-3	-8.80014E1	4.29153E-4	3.6478E-3	9.62734E-2	1.58093E1	-1.98037E1	-1.99445E1	1.49938E1	2.24012E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.41756E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80042E1	-1.07288E-3	-8.80013E1	7.39098E-4	3.8147E-3	9.61304E-2	1.58315E1	-1.98104E1	-1.9972E1	1.50611E1	2.23566E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.41265E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80039E1	-1.0252E-3	-8.80011E1	9.77516E-4	4.00543E-3	9.62257E-2	1.58678E1	-1.98672E1	-1.99883E1	1.50416E1	2.23964E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80039E1	-1.14441E-3	-8.80012E1	9.05991E-4	4.07696E-3	9.62019E-2	1.57744E1	-1.9852E1	-1.99224E1	1.50256E1	2.23918E-9	2.52553E-3	2.52553E-3	6.31798E-3	2.40462E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.8004E1	-8.10623E-4	-8.80013E1	1.12057E-3	4.05312E-3	9.64403E-2	1.58628E1	-1.98487E1	-1.99319E1	1.5025E1	2.23863E-9	2.52585E-3	2.52585E-3	6.32418E-3	2.42121E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80041E1	-9.77516E-4	-8.80015E1	9.29832E-4	3.79086E-3	9.62019E-2	1.58077E1	-1.98537E1	-1.9927E1	1.50665E1	2.23678E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.41405E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80039E1	-8.34465E-4	-8.80012E1	9.53674E-4	4.24385E-3	9.63211E-2	1.57723E1	-1.98464E1	-1.99612E1	1.50226E1	2.24109E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.40918E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80038E1	-7.39098E-4	-8.80013E1	5.00679E-4	4.22001E-3	9.62257E-2	1.58123E1	-1.98132E1	-1.99795E1	1.50257E1	2.2406E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.41611E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80038E1	-8.82149E-4	-8.80012E1	5.00679E-4	4.26769E-3	9.62496E-2	1.58066E1	-1.98653E1	-1.99283E1	1.50241E1	2.23263E-9	2.51393E-3	2.51393E-3	6.33388E-3	2.41269E-2
1.4E1	1.57E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80039E1	-7.62939E-4	-8.80013E1	6.91414E-4	3.95775E-3	9.63926E-2	1.58581E1	-1.9906E1	-1.99402E1	1.5013E1	2.2381E-9	2.51384E-3	2.51384E-3	6.28468E-3	2.42282E-2
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80035E1	-9.05991E-4	-8.80013E1	5.48363E-4	4.12464E-3	9.63926E-2	1.58393E1	-1.986E1	-1.99573E1	1.5028E1	2.23869E-9	2.51632E-3	2.51632E-3	6.35601E-3	2.40994E-2
1.6E1	4.11E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80041E1	-1.0252E-3	-8.80011E1	6.91414E-4	3.83854E-3	9.62973E-2	1.57932E1	-1.98511E1	-1.99402E1	1.50394E1	2.24402E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.40708E-2
1.7E1	1.288E3	3.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80039E1	-8.10623E-4	-8.80012E1	6.91414E-4	3.95775E-3	9.61542E-2	1.58311E1	-1.98531E1	-1.99636E1	1.5016E1	2.23915E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.41966E-2
1.8E1	5.15E3	2.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80042E1	-8.82149E-4	-8.80013E1	1.07288E-3	3.83854E-3	9.61542E-2	1.58374E1	-1.99012E1	-1.99296E1	1.50178E1	2.24109E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.40918E-2
1.9E1	2.623E3	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80043E1	-8.34465E-4	-8.80011E1	9.05991E-4	4.17233E-3	9.60588E-2	1.58329E1	-1.98561E1	-1.9927E1	1.50346E1	2.23964E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.42024E-2
2.0E1	4.5E1	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80042E1	-1.14441E-3	-8.80011E1	1.14441E-3	4.02927E-3	9.63926E-2	1.58323E1	-1.98537E1	-1.99876E1	1.50467E1	2.23041E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41756E-2
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80041E1	-8.58307E-4	-8.80014E1	8.58307E-4	3.71933E-3	9.63211E-2	1.5851E1	-1.98482E1	-1.99821E1	1.50527E1	2.24012E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41127E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80042E1	-1.0252E-3	-8.80011E1	6.67572E-4	3.76701E-3	9.61304E-2	1.57867E1	-1.98386E1	-1.99167E1	1.50292E1	2.23869E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.4223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80044E1	-9.77516E-4	-8.80011E1	6.67572E-4	4.07696E-3	9.61542E-2	1.58115E1	-1.98529E1	-1.99785E1	1.5052E1	2.2473E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.40378E-2