[Scan]
initial_time=2016-01-15T20:47:32
final_time=2016-01-15T20:47:52
ip_count=19
run=1023
dataset=1
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.76711E-6
ql1_vset=
ql1_vmon=-8.80046E1
ql1_imon=-7.52139E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.16832E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.75385E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.35387E-8
mult1=-1.01979E-8
mult2=-2.65074E-9
rf_tmon=-4.98107E-3
rf_agc=3.24023E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=6.08802E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.31064E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.86809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04692E2
lens23_imon=1.02481E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.55806E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01973E0
lens1_imon=1.61128E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.94702E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.07215E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.27436E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.3497E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.99567E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.12643E-9
tplens_vset=0.0E0
tplens_vmon=-1.6925E0
tplens_imon=-2.52482E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99204E1
iondef3_imon=8.53279E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97888E1
iondef2_imon=9.416E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03064E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=9.59051E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.76173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33934E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30437E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06166E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.13507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.23596E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58269E1
iondef1_imon=5.23426E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50346E1
iondef4_imon=5.43176E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.53012E-8
olens1_vset=0.0E0
olens1_vmon=1.83582E-3
olens1_imon=1.25571E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19201E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47554E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82723E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92715E3
multa_neg_imon=6.82044E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50179E3
multb_neg_imon=6.51041E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20306E0
defgridb_imon=6.4311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33465E1
os_fil1_imon=9.42498E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65423E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.94984E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63165E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67153E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64891E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2277E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.41199E-2
chamber_ion_pmon=2.24347E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.67E3	2.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80043E1	-7.39098E-4	-8.80013E1	5.48363E-4	4.36306E-3	9.63926E-2	1.57418E1	-1.988E1	-1.99709E1	1.5028E1	2.23773E-9	2.52923E-3	2.52923E-3	6.31817E-3	2.41199E-2
2.0E0	3.705E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80043E1	-8.10623E-4	-8.80012E1	2.38419E-4	4.43459E-3	9.65834E-2	1.58271E1	-1.98453E1	-1.99677E1	1.50491E1	2.23526E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41756E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80046E1	-8.34465E-4	-8.80012E1	5.96046E-4	4.07696E-3	9.64403E-2	1.58359E1	-1.98486E1	-1.9968E1	1.5001E1	2.2327E-9	2.51248E-3	2.51248E-3	6.32418E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80042E1	-8.34465E-4	-8.80011E1	4.76837E-4	4.05312E-3	9.64165E-2	1.57932E1	-1.98918E1	-1.99449E1	1.5037E1	2.242E-9	2.51498E-3	2.51498E-3	6.32858E-3	2.41471E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80042E1	-7.39098E-4	-8.8001E1	6.19888E-4	4.33922E-3	9.60827E-2	1.58362E1	-1.98594E1	-1.99218E1	1.50334E1	2.23583E-9	2.53031E-3	2.53031E-3	6.32356E-3	2.42024E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80045E1	-7.15256E-4	-8.80015E1	5.72205E-4	4.33922E-3	9.63688E-2	1.58073E1	-1.98523E1	-1.99496E1	1.50364E1	2.2327E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.40839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80043E1	-5.72205E-4	-8.80018E1	4.76837E-4	4.29153E-3	9.64403E-2	1.58406E1	-1.98782E1	-1.99437E1	1.5034E1	2.24538E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.42024E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80043E1	-6.91414E-4	-8.80016E1	4.05312E-4	3.86238E-3	9.62496E-2	1.58267E1	-1.98524E1	-1.99605E1	1.5049E1	2.24243E-9	2.51369E-3	2.51369E-3	6.323E-3	2.42132E-2
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80041E1	-7.86781E-4	-8.80018E1	5.00679E-4	3.88622E-3	9.63211E-2	1.57921E1	-1.98302E1	-1.99672E1	1.50328E1	2.23592E-9	2.52029E-3	2.52029E-3	6.30149E-3	2.40583E-2
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80039E1	-8.58307E-4	-8.80016E1	3.8147E-4	4.36306E-3	9.65595E-2	1.58317E1	-1.98188E1	-1.99618E1	1.50076E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.4223E-2
1.4E1	1.64E2	0.0E0	5.66E2	3.82E2	-7.0464E-2	-8.8004E1	-1.12057E-3	-8.80012E1	8.58307E-4	4.3869E-3	9.65118E-2	1.58402E1	-1.98434E1	-1.99692E1	1.50219E1	2.23468E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.40626E-2
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80039E1	-1.04904E-3	-8.80013E1	5.48363E-4	4.07696E-3	9.63211E-2	1.58041E1	-1.9851E1	-1.99527E1	1.50415E1	2.23747E-9	2.52134E-3	2.52134E-3	6.27491E-3	2.41579E-2
1.6E1	4.73E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80045E1	-9.05991E-4	-8.80013E1	6.19888E-4	4.31538E-3	9.67503E-2	1.58522E1	-1.98789E1	-1.99924E1	1.50322E1					
1.7E1	1.192E3	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80043E1	-1.12057E-3	-8.80014E1	8.34465E-4	4.43459E-3	9.62257E-2	1.58221E1	-1.98386E1	-1.99654E1	1.50425E1	2.24109E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.41546E-2
1.8E1	5.167E3	3.0E0	7.27E2	5.0E2	-7.201E-2	-8.80043E1	-9.77516E-4	-8.80015E1	7.39098E-4	4.57764E-3	9.62496E-2	1.58368E1	-1.98853E1	-1.99372E1	1.50572E1	2.24402E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.41756E-2
1.9E1	2.542E3	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80044E1	-8.34465E-4	-8.80014E1	7.62939E-4	4.45843E-3	9.63449E-2	1.58299E1	-1.98585E1	-1.99774E1	1.50364E1	2.23892E-9	2.51538E-3	2.51538E-3	6.32644E-3	2.40852E-2
2.0E1	3.5E1	0.0E0	8.08E2	5.58E2	-7.17007E-2	-8.80047E1	-8.58307E-4	-8.80014E1	5.48363E-4	4.72069E-3	9.65118E-2	1.58437E1	-1.98513E1	-1.99372E1	1.50491E1					
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80047E1	-1.04904E-3	-8.80016E1	9.05991E-4	4.62532E-3	9.61542E-2	1.58209E1	-1.98375E1	-1.9929E1	1.50545E1	2.23011E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.40788E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80045E1	-9.29832E-4	-8.80013E1	6.91414E-4	4.55379E-3	9.60588E-2	1.58498E1	-1.98711E1	-1.99396E1	1.5007E1	2.24402E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.41127E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80046E1	-9.53674E-4	-8.80014E1	7.39098E-4	4.24385E-3	9.64165E-2	1.58269E1	-1.97888E1	-1.99204E1	1.50346E1	2.24347E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.41199E-2