[Scan]
initial_time=2016-01-15T20:48:27
final_time=2016-01-15T20:48:47
ip_count=19
run=1023
dataset=1
scan=68
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80176E-6
ql1_vset=
ql1_vmon=-8.80046E1
ql1_imon=-7.52914E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.1906E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.76606E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.35435E-8
mult1=-9.91312E-9
mult2=-2.8526E-9
rf_tmon=-4.72184E-3
rf_agc=3.27664E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=6.21533E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70524E0
bslens_imon=2.28228E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19847E1
lens5a_imon=2.01366E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.858E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.01985E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0478E1
cs_ea1_imon=2.57893E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98452E0
lens1_imon=1.71297E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04143E1
cs_ea2_imon=1.48769E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.97117E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.0733E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15067E1
os_ea1_imon=2.33945E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25149E0
cs_ionrep_imon=1.2236E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93677E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.98991E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99966E1
olens4_imon=4.2076E-9
tplens_vset=0.0E0
tplens_vmon=-1.68184E0
tplens_imon=-5.42238E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99142E1
iondef3_imon=8.72834E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98358E1
iondef2_imon=9.57312E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03059E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=9.78482E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30842E0
ionrepsh_imon=1.79695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.19033E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22455E0
os_ea2_imon=-6.26716E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04795E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29818E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24281E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58728E1
iondef1_imon=5.23167E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5037E1
iondef4_imon=5.53267E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.53204E-8
olens1_vset=0.0E0
olens1_vmon=1.81198E-3
olens1_imon=1.2542E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1842E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02128E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.9257E-6
window_vset=0.0E0
window_vmon=3.11646E-1
window_imon=-6.84173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8275E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.09387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.91022E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.2261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3392E0
defgridb_imon=6.0434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33473E1
os_fil1_imon=9.40822E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0832E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65386E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.95963E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62882E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67093E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25257E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61666E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22817E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31009E-3
inlet_lpb_pmon=2.41611E-2
chamber_ion_pmon=2.24347E-9
chamber_cvt_pmon=2.52223E-3
foreline_cvt_pmon=2.52223E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.29259E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=187
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.599E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80043E1	-8.10623E-4	-8.80011E1	4.29153E-4	3.93391E-3	9.62257E-2	1.58427E1	-1.9844E1	-1.99385E1	1.50609E1	2.23332E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.41127E-2
2.0E0	3.754E3	3.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80045E1	-6.67572E-4	-8.80013E1	7.39098E-4	3.98159E-3	9.62257E-2	1.58445E1	-1.98715E1	-1.99777E1	1.50191E1	2.2415E-9	2.51783E-3	2.51783E-3	6.33341E-3	2.41535E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80043E1	-7.15256E-4	-8.80013E1	9.05991E-4	4.02927E-3	9.61065E-2	1.58185E1	-1.98706E1	-1.99591E1	1.50388E1	2.23105E-9	2.51725E-3	2.51725E-3	6.31879E-3	2.40974E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80043E1	-1.00136E-3	-8.80012E1	6.67572E-4	4.24385E-3	9.60112E-2	1.5846E1	-1.98255E1	-1.99323E1	1.50145E1	2.24538E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80046E1	-8.58307E-4	-8.80009E1	5.96046E-4	4.24385E-3	9.63688E-2	1.58295E1	-1.98857E1	-1.99843E1	1.50701E1	2.2369E-9	2.51369E-3	2.51369E-3	6.3282E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80043E1	-1.04904E-3	-8.80013E1	5.72205E-4	4.33922E-3	9.65118E-2	1.58001E1	-1.9792E1	-1.99108E1	1.50415E1	2.23665E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.41693E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80043E1	-1.0252E-3	-8.8001E1	8.58307E-4	4.02927E-3	9.64403E-2	1.58023E1	-1.98597E1	-1.99384E1	1.50584E1	2.24109E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80045E1	-7.86781E-4	-8.8001E1	6.4373E-4	4.22001E-3	9.62973E-2	1.58616E1	-1.98659E1	-1.99714E1	1.49956E1	2.23623E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.41337E-2
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80046E1	-8.34465E-4	-8.80011E1	3.57628E-4	4.22001E-3	9.59635E-2	1.58035E1	-1.98525E1	-1.99528E1	1.50154E1	2.2372E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41756E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80046E1	-7.39098E-4	-8.80011E1	5.72205E-4	4.24385E-3	9.63926E-2	1.57997E1	-1.98989E1	-1.99089E1	1.50022E1	2.23773E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.42024E-2
1.4E1	1.48E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80048E1	-8.82149E-4	-8.80007E1	3.09944E-4	4.02927E-3	9.66311E-2	1.58233E1	-1.98629E1	-1.99408E1	1.50265E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.42809E-2
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80048E1	-7.39098E-4	-8.80012E1	8.34465E-4	4.02927E-3	9.65118E-2	1.58347E1	-1.9831E1	-1.99645E1	1.49941E1	2.23487E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.41817E-2
1.6E1	4.14E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80047E1	-1.00136E-3	-8.80012E1	5.48363E-4	4.31538E-3	9.66072E-2	1.5812E1	-1.99012E1	-1.99119E1	1.50388E1	2.24161E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.41479E-2
1.7E1	1.239E3	1.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80047E1	-6.67572E-4	-8.80014E1	6.19888E-4	4.31538E-3	9.64165E-2	1.58289E1	-1.98202E1	-1.99873E1	1.50412E1	2.2372E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41966E-2
1.8E1	5.159E3	6.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80046E1	-3.33786E-4	-8.80014E1	5.24521E-4	4.12464E-3	9.62734E-2	1.58209E1	-1.98251E1	-1.99437E1	1.49968E1	2.24304E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.41546E-2
1.9E1	2.618E3	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80047E1	-4.05312E-4	-8.80013E1	7.62939E-4	4.26769E-3	9.63211E-2	1.57674E1	-1.9841E1	-1.99937E1	1.50262E1	2.24442E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.41611E-2
2.0E1	4.1E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80049E1	-6.19888E-4	-8.80014E1	7.86781E-4	4.14848E-3	9.64403E-2	1.58582E1	-1.98789E1	-1.99131E1	1.50569E1	2.23863E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.41693E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80048E1	-5.00679E-4	-8.80013E1	8.10623E-4	4.05312E-3	9.63449E-2	1.58297E1	-1.98387E1	-1.99685E1	1.50004E1	2.23392E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.41199E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80045E1	-4.76837E-4	-8.80012E1	8.34465E-4	4.24385E-3	9.63688E-2	1.58143E1	-1.98416E1	-1.9972E1	1.50382E1	2.24402E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41337E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80046E1	-5.00679E-4	-8.80011E1	8.34465E-4	4.22001E-3	9.63211E-2	1.58728E1	-1.98358E1	-1.99142E1	1.5037E1	2.24347E-9	2.52223E-3	2.52223E-3	6.31009E-3	2.41611E-2