[Scan]
initial_time=2016-01-15T20:48:54
final_time=2016-01-15T20:49:14
ip_count=19
run=1023
dataset=1
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83143E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.41315E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.19745E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.90848E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.35455E-8
mult1=-8.77601E-9
mult2=-2.63041E-9
rf_tmon=-3.8972E-3
rf_agc=3.44241E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=6.29497E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=2.0303E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.8735E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.57284E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99509E0
lens1_imon=1.8456E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.5101E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.9636E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.07529E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.35438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91991E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=2.98594E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.18402E-9
tplens_vset=0.0E0
tplens_vmon=-1.72194E0
tplens_imon=-3.85865E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99188E1
iondef3_imon=8.86084E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98367E1
iondef2_imon=9.33669E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03085E2
lens6_imon=2.97924E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=8.78501E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.20189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2533E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.15137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.41337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.25722E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5794E1
iondef1_imon=5.4145E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49734E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.52874E-8
olens1_vset=0.0E0
olens1_vmon=2.00272E-3
olens1_imon=1.25613E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1872E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=8.07346E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8274E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5339E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33436E1
os_fil1_imon=9.41045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=9.95068E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62462E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67034E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74687E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22932E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.43442E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44876E-1
res40_imon=-2.32398E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.622E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80042E1	-9.53674E-4	-8.80012E1	5.72205E-4	4.45843E-3	9.60112E-2	1.57985E1	-1.9847E1	-1.99667E1	1.50292E1	2.23429E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.41546E-2
2.0E0	3.754E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80043E1	-1.21593E-3	-8.8001E1	4.29153E-4	4.29153E-3	9.63211E-2	1.57819E1	-1.98458E1	-1.99774E1	1.50394E1	2.23544E-9	2.52236E-3	2.52236E-3	6.31269E-3	2.41674E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80039E1	-6.91414E-4	-8.80012E1	3.09944E-4	4.41074E-3	9.60112E-2	1.58492E1	-1.98812E1	-1.99614E1	1.50491E1	2.2372E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.40918E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80044E1	-9.29832E-4	-8.80013E1	5.48363E-4	4.64916E-3	9.63211E-2	1.57867E1	-1.98452E1	-1.99107E1	1.50166E1	2.24634E-9	2.52276E-3	2.52276E-3	6.35059E-3	2.41817E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80044E1	-1.07288E-3	-8.80011E1	7.15256E-4	4.33922E-3	9.64403E-2	1.58305E1	-1.98368E1	-1.99882E1	1.49998E1	2.23869E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.4223E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80046E1	-1.12057E-3	-8.80015E1	4.29153E-4	4.22001E-3	9.63688E-2	1.57849E1	-1.98747E1	-1.99744E1	1.50833E1	2.23429E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.42387E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80044E1	-1.0252E-3	-8.80016E1	3.8147E-4	4.14848E-3	9.61065E-2	1.58347E1	-1.98507E1	-1.99336E1	1.49884E1	2.2406E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.4223E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80043E1	-8.82149E-4	-8.80014E1	4.52995E-4	4.36306E-3	9.62496E-2	1.58191E1	-1.98344E1	-1.99228E1	1.50683E1	2.23863E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.42121E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80042E1	-8.10623E-4	-8.80012E1	4.52995E-4	4.24385E-3	9.61781E-2	1.58474E1	-1.98855E1	-1.99342E1	1.50328E1	2.24155E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41199E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80044E1	-7.86781E-4	-8.80013E1	3.09944E-4	4.26769E-3	9.62257E-2	1.57908E1	-1.98493E1	-1.99337E1	1.50022E1	2.23818E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.41337E-2
1.4E1	1.3E2	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80044E1	-7.62939E-4	-8.80012E1	5.24521E-4	4.43459E-3	9.60827E-2	1.58234E1	-1.98759E1	-1.99634E1	1.50695E1	2.24109E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.40918E-2
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80043E1	-9.53674E-4	-8.80015E1	5.00679E-4	4.31538E-3	9.60588E-2	1.58119E1	-1.9847E1	-1.99234E1	1.50358E1	2.23915E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41546E-2
1.6E1	4.25E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80043E1	-9.53674E-4	-8.80015E1	4.05312E-4	4.76837E-3	9.62496E-2	1.57997E1	-1.98782E1	-1.99455E1	1.49692E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.40918E-2
1.7E1	1.242E3	3.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80041E1	-6.67572E-4	-8.80012E1	8.10623E-4	4.60148E-3	9.60588E-2	1.58173E1	-1.98597E1	-1.99216E1	1.5007E1	2.24694E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.42177E-2
1.8E1	5.166E3	7.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80042E1	-6.19888E-4	-8.80014E1	6.67572E-4	4.33922E-3	9.62973E-2	1.58107E1	-1.97924E1	-2.00117E1	1.50088E1	2.24109E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.41546E-2
1.9E1	2.506E3	2.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80043E1	-5.24521E-4	-8.80011E1	7.62939E-4	4.31538E-3	9.61304E-2	1.58227E1	-1.982E1	-1.99342E1	1.50388E1	2.24538E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.41817E-2
2.0E1	4.0E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80044E1	-7.39098E-4	-8.80015E1	6.91414E-4	4.57764E-3	9.62019E-2	1.57925E1	-1.98446E1	-1.99755E1	1.50381E1	2.23818E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41966E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80047E1	-6.19888E-4	-8.80012E1	7.15256E-4	4.3869E-3	9.62734E-2	1.58486E1	-1.98561E1	-1.996E1	1.50274E1	2.242E-9	2.51603E-3	2.51603E-3	6.33919E-3	2.42079E-2
2.2E1	2.9E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80046E1	-3.8147E-4	-8.80015E1	6.67572E-4	4.41074E-3	9.62257E-2	1.58113E1	-1.98302E1	-1.99552E1	1.50292E1	2.23963E-9	2.52139E-3	2.52139E-3	6.28511E-3	2.41479E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80044E1	-5.00679E-4	-8.80016E1	6.67572E-4	4.33922E-3	9.64165E-2	1.5794E1	-1.98367E1	-1.99188E1	1.49734E1	2.23623E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.43442E-2