[Scan]
initial_time=2016-01-15T20:49:21
final_time=2016-01-15T20:49:41
ip_count=19
run=1023
dataset=1
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.78216E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.18892E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.21179E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.85906E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.35914E-8
mult1=-9.59393E-9
mult2=-2.64094E-9
rf_tmon=-3.63052E-3
rf_agc=3.38282E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.86238E-3
ql5_imon=5.82135E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70043E0
bslens_imon=2.14684E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=2.00456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12556E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.88647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0454E1
cs_ea1_imon=2.6229E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00116E0
lens1_imon=1.08148E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03307E1
cs_ea2_imon=1.52745E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84731E1
cs_ef1a_imon=2.9308E-5
olens2_vset=0.0E0
olens2_vmon=8.82149E-4
olens2_imon=1.07549E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11802E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15418E1
os_ea1_imon=2.36204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20668E0
cs_ionrep_imon=1.16997E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91968E2
cs_nozzle_imon=1.93685E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02182E1
cs_anode1_imon=2.95675E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.20572E-9
tplens_vset=0.0E0
tplens_vmon=-1.64792E0
tplens_imon=-3.87372E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99461E1
iondef3_imon=8.74784E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98175E1
iondef2_imon=9.3637E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03042E2
lens6_imon=2.97967E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=9.47917E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3164E0
ionrepsh_imon=1.78583E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.15003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74093E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24915E0
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06211E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.47384E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.41301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.27486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01383E1
cs_anode2_imon=2.26803E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58539E1
iondef1_imon=5.57653E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49918E1
iondef4_imon=5.52546E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.52807E-8
olens1_vset=0.0E0
olens1_vmon=1.90735E-3
olens1_imon=1.25431E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56663E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=3.44683E-1
window_imon=-6.51738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.87149E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92576E3
multa_neg_imon=8.12491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.21716E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33428E1
os_fil1_imon=9.38846E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07593E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65447E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30794E1
cs_fil1_imon=9.93398E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62948E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68125E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-1.93917E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22815E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.40378E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.43675E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.68E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80041E1	-5.72205E-4	-8.80017E1	4.76837E-4	4.19617E-3	9.65595E-2	1.58624E1	-1.98597E1	-1.99438E1	1.50142E1	2.23583E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.40788E-2
2.0E0	3.633E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80044E1	-5.96046E-4	-8.80012E1	5.00679E-4	4.12464E-3	9.65595E-2	1.58221E1	-1.98513E1	-1.99654E1	1.49908E1	2.24109E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.41966E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80043E1	-5.72205E-4	-8.80012E1	2.86102E-4	4.29153E-3	9.64403E-2	1.58249E1	-1.98544E1	-1.9983E1	1.49976E1	2.24036E-9	2.5199E-3	2.5199E-3	6.34484E-3	2.41133E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80047E1	-9.05991E-4	-8.80012E1	4.76837E-4	4.45843E-3	9.66787E-2	1.5759E1	-1.9826E1	-1.99408E1	1.50274E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80044E1	-7.86781E-4	-8.80012E1	6.19888E-4	4.33922E-3	9.6488E-2	1.58443E1	-1.98747E1	-1.99666E1	1.50857E1	2.24012E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.42177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80045E1	-8.10623E-4	-8.80011E1	7.86781E-4	4.24385E-3	9.62734E-2	1.58894E1	-1.9802E1	-1.99666E1	1.50286E1	2.23963E-9	2.52139E-3	2.52139E-3	6.34661E-3	2.41907E-2
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-7.286E-2	-8.80043E1	-1.0252E-3	-8.8001E1	4.05312E-4	4.19617E-3	9.63926E-2	1.58353E1	-1.9814E1	-1.99648E1	1.50611E1	2.23964E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.41611E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80048E1	-1.0252E-3	-8.80015E1	3.57628E-4	4.14848E-3	9.6488E-2	1.58368E1	-1.9831E1	-1.99549E1	1.50155E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41127E-2
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80045E1	-1.16825E-3	-8.80014E1	2.6226E-4	4.22001E-3	9.62973E-2	1.5815E1	-1.97957E1	-1.99461E1	1.50617E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.42598E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80042E1	-7.39098E-4	-8.80013E1	5.48363E-4	4.07696E-3	9.64642E-2	1.58344E1	-1.98796E1	-1.9942E1	1.5028E1	2.23555E-9	2.5143E-3	2.5143E-3	6.31012E-3	2.4106E-2
1.4E1	1.49E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80043E1	-9.29832E-4	-8.80014E1	7.39098E-4	4.07696E-3	9.62734E-2	1.58262E1	-1.98452E1	-1.99579E1	1.50515E1					
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80041E1	-1.28746E-3	-8.80013E1	5.72205E-4	4.41074E-3	9.62973E-2	1.57915E1	-1.98314E1	-1.99786E1	1.50142E1	2.23964E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.41405E-2
1.6E1	4.41E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.8004E1	-1.43051E-3	-8.80015E1	8.34465E-4	4.79221E-3	9.63211E-2	1.58215E1	-1.98194E1	-1.99462E1	1.49812E1	2.24694E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41337E-2
1.7E1	1.241E3	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80044E1	-1.21593E-3	-8.80015E1	4.05312E-4	4.24385E-3	9.63449E-2	1.58311E1	-1.98699E1	-1.99816E1	1.50262E1	2.24207E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41756E-2
1.8E1	5.334E3	1.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80044E1	-1.07288E-3	-8.80016E1	5.24521E-4	4.33922E-3	9.64165E-2	1.57844E1	-1.9832E1	-1.99624E1	1.50245E1	2.23818E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.41546E-2
1.9E1	2.614E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80045E1	-1.0252E-3	-8.80011E1	6.91414E-4	4.07696E-3	9.64403E-2	1.58316E1	-1.98403E1	-1.99845E1	1.5054E1	2.23918E-9	2.52448E-3	2.52448E-3	6.32858E-3	2.42282E-2
2.0E1	3.5E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80044E1	-7.86781E-4	-8.80012E1	9.05991E-4	3.86238E-3	9.65357E-2	1.5843E1	-1.99145E1	-1.99292E1	1.50615E1	2.24315E-9	2.52407E-3	2.52407E-3	6.3074E-3	2.42282E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80042E1	-9.05991E-4	-8.80015E1	6.91414E-4	4.1008E-3	9.64642E-2	1.58404E1	-1.9831E1	-1.99826E1	1.50439E1	2.24161E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.41693E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80043E1	-8.58307E-4	-8.80013E1	6.4373E-4	4.05312E-3	9.60588E-2	1.58262E1	-1.98287E1	-1.99455E1	1.50461E1	2.23918E-9	2.51919E-3	2.51919E-3	6.31798E-3	2.40865E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80043E1	-1.04904E-3	-8.80012E1	5.48363E-4	3.86238E-3	9.63688E-2	1.58539E1	-1.98175E1	-1.99461E1	1.49918E1	2.23869E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.40378E-2