[Scan]
initial_time=2016-01-15T20:50:16
final_time=2016-01-15T20:50:35
ip_count=19
run=1023
dataset=1
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79346E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-8.02755E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.19128E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.8587E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.35524E-8
mult1=-9.84875E-9
mult2=-2.65873E-9
rf_tmon=-4.54247E-3
rf_agc=3.26847E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=6.23107E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19376E1
lens5a_imon=2.01801E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.85776E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.58432E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95042E0
lens1_imon=1.6938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.49029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.96653E-5
olens2_vset=0.0E0
olens2_vmon=8.82149E-4
olens2_imon=1.0709E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.2701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.38151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2055E0
cs_ionrep_imon=1.2043E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.99434E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99965E1
olens4_imon=4.16714E-9
tplens_vset=0.0E0
tplens_vmon=-1.67506E0
tplens_imon=-6.45749E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99846E1
iondef3_imon=8.8788E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98266E1
iondef2_imon=9.2292E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03052E2
lens6_imon=2.98031E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=9.44364E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30047E0
ionrepsh_imon=1.78972E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29162E0
os_ea2_imon=-7.55471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.16045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04703E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15186E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11361E1
os_restr2_imon=3.41971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.27486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.2475E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58419E1
iondef1_imon=5.19074E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50352E1
iondef4_imon=5.44978E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.53798E-8
olens1_vset=0.0E0
olens1_vmon=2.24113E-3
olens1_imon=1.25561E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16374E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02134E2
cs_ionfocb_imon=1.47556E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56544E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.62864E-1
window_imon=-9.13411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82754E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86576E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=8.05412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=5.96941E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62407E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33447E1
os_fil1_imon=9.44285E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07543E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65588E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3076E1
cs_fil1_imon=9.96779E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62447E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67389E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61291E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.49542E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22882E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.41127E-2
chamber_ion_pmon=2.22848E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28132E-1
res40_imon=-2.51203E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.697E3	0.0E0	1.47E2	4.1E1	-7.13143E-2	-8.80043E1	-7.39098E-4	-8.80011E1	7.15256E-4	4.41074E-3	9.64165E-2	1.58083E1	-1.98927E1	-1.99414E1	1.50154E1	2.24109E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41966E-2
2.0E0	3.699E3	5.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80042E1	-7.62939E-4	-8.80013E1	5.00679E-4	4.31538E-3	9.66311E-2	1.58479E1	-1.98428E1	-1.99585E1	1.50384E1	2.23869E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.40173E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80044E1	-9.29832E-4	-8.80012E1	7.62939E-4	4.45843E-3	9.65595E-2	1.58351E1	-1.98717E1	-1.99591E1	1.5085E1	2.23863E-9	2.52473E-3	2.52473E-3	6.32978E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80044E1	-5.24521E-4	-8.8001E1	7.62939E-4	4.57764E-3	9.63926E-2	1.57973E1	-1.9834E1	-1.99673E1	1.50238E1	2.24538E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80044E1	-6.4373E-4	-8.80013E1	7.62939E-4	4.29153E-3	9.63449E-2	1.57903E1	-1.98446E1	-1.99438E1	1.50433E1	2.23487E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.41199E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80044E1	-5.72205E-4	-8.80008E1	3.8147E-4	4.52995E-3	9.67503E-2	1.58327E1	-1.98222E1	-1.98953E1	1.50322E1	2.23915E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.40918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80042E1	-8.82149E-4	-8.80012E1	7.39098E-4	4.79221E-3	9.63688E-2	1.58032E1	-1.9867E1	-1.99414E1	1.50106E1	2.23964E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.40173E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80043E1	-6.67572E-4	-8.80014E1	7.15256E-4	4.33922E-3	9.64642E-2	1.58186E1	-1.98521E1	-1.99437E1	1.50485E1	2.23678E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.40994E-2
1.2E1	1.22E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80042E1	-9.77516E-4	-8.80011E1	6.91414E-4	4.48227E-3	9.64642E-2	1.57991E1	-1.98528E1	-1.99714E1	1.49573E1					
1.3E1	1.2E1	1.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80044E1	-9.05991E-4	-8.80012E1	7.39098E-4	4.24385E-3	9.62019E-2	1.58275E1	-1.98639E1	-1.9936E1	1.49758E1	2.24062E-9	2.52027E-3	2.52027E-3	6.26844E-3	2.41265E-2
1.4E1	1.33E2	0.0E0	5.66E2	3.82E2	-7.07733E-2	-8.80042E1	-5.24521E-4	-8.80013E1	6.91414E-4	4.24385E-3	9.61065E-2	1.57801E1	-1.98495E1	-1.9972E1	1.5031E1	2.24062E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.4298E-2
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80046E1	-8.58307E-4	-8.80011E1	8.34465E-4	4.48227E-3	9.62257E-2	1.58481E1	-1.98672E1	-1.99576E1	1.50364E1	2.23011E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.40583E-2
1.6E1	4.68E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80042E1	-1.04904E-3	-8.80013E1	6.4373E-4	4.3869E-3	9.64165E-2	1.57819E1	-1.98567E1	-1.9921E1	1.50256E1	2.21401E-9	2.51287E-3	2.51287E-3	6.31269E-3	2.40865E-2
1.7E1	1.258E3	1.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80044E1	-5.96046E-4	-8.80013E1	4.52995E-4	4.12464E-3	9.64403E-2	1.58666E1	-1.98973E1	-1.99367E1	1.50369E1	2.22848E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41337E-2
1.8E1	5.052E3	4.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80043E1	-9.29832E-4	-8.80013E1	8.10623E-4	4.50611E-3	9.64642E-2	1.58497E1	-1.98557E1	-1.99794E1	1.50196E1	2.23544E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.41674E-2
1.9E1	2.554E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80042E1	-6.19888E-4	-8.80013E1	8.58307E-4	4.45843E-3	9.64642E-2	1.58011E1	-1.98116E1	-1.99762E1	1.5031E1	2.23468E-9	2.52697E-3	2.52697E-3	6.34099E-3	2.42121E-2
2.0E1	3.5E1	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80041E1	-3.57628E-4	-8.80016E1	6.4373E-4	4.26769E-3	9.62019E-2	1.58101E1	-1.98669E1	-1.99979E1	1.5025E1	2.23623E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41756E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.8004E1	-8.10623E-4	-8.80017E1	5.48363E-4	4.43459E-3	9.6488E-2	1.58067E1	-1.98617E1	-1.99473E1	1.50286E1	2.23429E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.40708E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80043E1	-8.10623E-4	-8.80016E1	6.67572E-4	4.45843E-3	9.63926E-2	1.58041E1	-1.98308E1	-1.99276E1	1.50304E1	2.24155E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.41405E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80044E1	-8.82149E-4	-8.80018E1	7.39098E-4	4.29153E-3	9.63688E-2	1.58419E1	-1.98266E1	-1.99846E1	1.50352E1	2.22848E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41127E-2