[Scan]
initial_time=2016-01-15T20:50:42
final_time=2016-01-15T20:51:02
ip_count=19
run=1023
dataset=1
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.81666E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.65443E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.15983E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.77126E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.35029E-8
mult1=-9.81263E-9
mult2=-2.73658E-9
rf_tmon=-4.04378E-3
rf_agc=3.26847E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=6.09028E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.77568E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19028E1
lens5a_imon=2.0166E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.04693E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.87819E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04668E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=2.54436E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02634E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03276E1
cs_ea2_imon=1.51407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.95747E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.0761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14615E1
os_ea1_imon=2.34717E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27853E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.97802E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.1685E-9
tplens_vset=0.0E0
tplens_vmon=-1.70572E0
tplens_imon=-3.17371E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99672E1
iondef3_imon=8.94736E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98681E1
iondef2_imon=9.47368E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03063E2
lens6_imon=2.97985E-4
ql6_vset=1.0E-1
ql6_vmon=9.67026E-2
ql6_imon=9.92179E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.78372E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2563E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11412E1
os_restr2_imon=3.41806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23121E2
cs_ionfoca_imon=6.27621E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.23992E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58275E1
iondef1_imon=5.20542E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50262E1
iondef4_imon=5.35607E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.53241E-8
olens1_vset=0.0E0
olens1_vmon=2.26498E-3
olens1_imon=1.25804E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17579E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.85723E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-6.58946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.57387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.17155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.3792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61209E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33401E1
os_fil1_imon=9.44853E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06909E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65414E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=9.96089E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6692E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60508E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22859E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41405E-2
chamber_ion_pmon=2.24347E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52995E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.521E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80042E1	-7.86781E-4	-8.80012E1	2.86102E-4	4.41074E-3	9.63926E-2	1.57936E1	-1.98834E1	-1.99755E1	1.49976E1	2.23429E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.40918E-2
2.0E0	3.631E3	2.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80042E1	-7.15256E-4	-8.80015E1	4.76837E-4	4.24385E-3	9.64642E-2	1.58332E1	-1.9841E1	-1.99328E1	1.50467E1	2.24442E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.42644E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80043E1	-6.91414E-4	-8.80015E1	7.39098E-4	4.1008E-3	9.65357E-2	1.58E1	-1.98463E1	-1.99442E1	1.50115E1	2.23332E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.42809E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80043E1	-7.15256E-4	-8.80014E1	7.39098E-4	4.33922E-3	9.66549E-2	1.58437E1	-1.98597E1	-1.9933E1	1.50497E1	2.23544E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.42485E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.8004E1	-8.82149E-4	-8.80015E1	7.39098E-4	3.88622E-3	9.67264E-2	1.58203E1	-1.98476E1	-1.99678E1	1.50449E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.4302E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80042E1	-6.91414E-4	-8.80015E1	7.39098E-4	3.88622E-3	9.6941E-2	1.58439E1	-1.98169E1	-1.99419E1	1.50443E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.4302E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80041E1	-1.07288E-3	-8.80012E1	9.53674E-4	3.86238E-3	9.66072E-2	1.57965E1	-1.98551E1	-1.9942E1	1.50497E1	2.23773E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.40788E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80042E1	-1.09673E-3	-8.80009E1	9.05991E-4	3.76701E-3	9.69172E-2	1.58421E1	-1.98546E1	-1.99573E1	1.5028E1	2.23764E-9	2.52585E-3	2.52585E-3	6.34099E-3	2.4255E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80044E1	-1.04904E-3	-8.80014E1	8.34465E-4	4.1008E-3	9.64642E-2	1.5814E1	-1.98377E1	-1.99442E1	1.50229E1	2.23964E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.41611E-2
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80044E1	-9.05991E-4	-8.80013E1	5.96046E-4	4.00543E-3	9.62496E-2	1.58095E1	-1.98486E1	-1.99644E1	1.50464E1	2.23966E-9	2.5199E-3	2.5199E-3	6.323E-3	2.4094E-2
1.4E1	1.16E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80044E1	-1.28746E-3	-8.80011E1	7.62939E-4	4.05312E-3	9.62019E-2	1.58258E1	-1.99053E1	-1.99096E1	1.50551E1	2.23802E-9	2.52029E-3	2.52029E-3	6.31925E-3	2.41488E-2
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80043E1	-9.05991E-4	-8.8001E1	7.39098E-4	4.02927E-3	9.61304E-2	1.58345E1	-1.98381E1	-1.99408E1	1.50058E1	2.23623E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.42177E-2
1.6E1	4.21E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80042E1	-1.0252E-3	-8.8001E1	6.67572E-4	4.12464E-3	9.62019E-2	1.57999E1	-1.98362E1	-1.99576E1	1.50431E1	2.23297E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41611E-2
1.7E1	1.322E3	1.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80042E1	-1.19209E-3	-8.80011E1	6.4373E-4	4.3869E-3	9.62257E-2	1.57809E1	-1.98174E1	-1.99813E1	1.50381E1	2.24109E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.42177E-2
1.8E1	5.226E3	3.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80043E1	-1.12057E-3	-8.80011E1	5.72205E-4	4.14848E-3	9.63926E-2	1.58443E1	-1.98392E1	-1.99414E1	1.50911E1	2.2406E-9	2.52061E-3	2.52061E-3	6.2752E-3	2.41199E-2
1.9E1	2.533E3	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80041E1	-1.04904E-3	-8.80016E1	5.00679E-4	4.26769E-3	9.64403E-2	1.57987E1	-1.98266E1	-1.99498E1	1.50166E1	2.24538E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.41611E-2
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.8004E1	-8.82149E-4	-8.80014E1	7.39098E-4	4.31538E-3	9.66549E-2	1.57488E1	-1.97131E1	-1.99113E1	1.50178E1	2.24499E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.40918E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.8004E1	-9.77516E-4	-8.80013E1	8.82149E-4	4.07696E-3	9.63449E-2	1.58492E1	-1.98133E1	-1.99585E1	1.50537E1	2.23429E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.41756E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80042E1	-7.62939E-4	-8.80013E1	9.77516E-4	4.12464E-3	9.6488E-2	1.58269E1	-1.98549E1	-1.99462E1	1.50328E1	2.23138E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41127E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80043E1	-9.05991E-4	-8.80011E1	4.05312E-4	4.07696E-3	9.67026E-2	1.58275E1	-1.98681E1	-1.99672E1	1.50262E1	2.24347E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.41405E-2