[Scan]
initial_time=2016-01-15T20:51:09
final_time=2016-01-15T20:51:29
ip_count=19
run=1023
dataset=1
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.7699E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.46036E-10
ql2_vset=
ql2_vmon=-1.09673E-3
ql2_imon=1.16724E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.75095E-9
ql4_vset=
ql4_vmon=9.53674E-4
ql4_imon=1.35651E-8
mult1=-9.12632E-9
mult2=-2.62879E-9
rf_tmon=-4.13991E-3
rf_agc=3.29791E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=6.29222E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69678E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54343E1
cs_ef1b_imon=2.90125E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.5714E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97406E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65131E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.5256E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.95279E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.07442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11634E1
os_restr1_imon=4.28301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15077E1
os_ea1_imon=2.35835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.2062E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.9355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.98847E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.15701E-9
tplens_vset=0.0E0
tplens_vmon=-1.66006E0
tplens_imon=-1.98407E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99648E1
iondef3_imon=8.80677E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98723E1
iondef2_imon=9.14203E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03112E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.65595E-2
ql6_imon=9.00304E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24549E0
ionrepsh_imon=1.78228E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26892E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1155E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.24569E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58083E1
iondef1_imon=5.20542E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5037E1
iondef4_imon=5.2876E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.53691E-8
olens1_vset=0.0E0
olens1_vmon=2.00272E-3
olens1_imon=1.25622E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1878E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56808E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86885E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.62937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.00789E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52487E0
defgridb_imon=5.95164E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33388E1
os_fil1_imon=9.4009E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07407E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65445E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30755E1
cs_fil1_imon=9.95861E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66681E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22546E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43985E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.647E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80043E1	-1.16825E-3	-8.80014E1	7.62939E-4	3.91006E-3	9.65357E-2	1.57943E1	-1.98411E1	-1.99738E1	1.50091E1	2.23915E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.41546E-2
2.0E0	3.704E3	4.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80045E1	-8.34465E-4	-8.80013E1	6.19888E-4	3.6478E-3	9.64165E-2	1.58323E1	-1.98693E1	-1.9948E1	1.50449E1	2.23731E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.41067E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80051E1	-1.09673E-3	-8.80011E1	6.4373E-4	3.83854E-3	9.65357E-2	1.58563E1	-1.98511E1	-1.99549E1	1.5034E1	2.24657E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.41693E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80043E1	-1.23978E-3	-8.80012E1	4.76837E-4	3.74317E-3	9.66072E-2	1.58456E1	-1.98891E1	-1.99492E1	1.50016E1	2.23544E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.41067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80045E1	-8.34465E-4	-8.80012E1	8.34465E-4	4.07696E-3	9.67503E-2	1.58544E1	-1.98616E1	-1.9922E1	1.50139E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41127E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80042E1	-1.14441E-3	-8.80012E1	6.67572E-4	3.95775E-3	9.63926E-2	1.58316E1	-1.98728E1	-1.99408E1	1.5016E1	2.23966E-9	2.51783E-3	2.51783E-3	6.31779E-3	2.4094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80043E1	-1.00136E-3	-8.80013E1	7.15256E-4	3.86238E-3	9.67026E-2	1.58413E1	-1.98549E1	-1.99384E1	1.50683E1	2.23608E-9	2.51611E-3	2.51611E-3	6.34164E-3	2.40974E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80042E1	-6.67572E-4	-8.80011E1	8.10623E-4	3.93391E-3	9.63926E-2	1.58325E1	-1.98579E1	-1.99477E1	1.50479E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.42387E-2
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80041E1	-7.39098E-4	-8.80012E1	7.86781E-4	3.86238E-3	9.62496E-2	1.58073E1	-1.98959E1	-1.99189E1	1.50761E1	2.23731E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.41876E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.8004E1	-9.77516E-4	-8.80014E1	8.82149E-4	3.93391E-3	9.65834E-2	1.57867E1	-1.98531E1	-1.99588E1	1.50238E1	2.23583E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.41199E-2
1.4E1	1.36E2	1.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80041E1	-9.05991E-4	-8.80014E1	6.4373E-4	4.50611E-3	9.65834E-2	1.57969E1	-1.98513E1	-1.99672E1	1.50611E1	2.23818E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.42387E-2
1.5E1	1.24E2	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80042E1	-8.10623E-4	-8.80015E1	5.96046E-4	4.41074E-3	9.6488E-2	1.58419E1	-1.98741E1	-1.99846E1	1.50394E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41546E-2
1.6E1	4.43E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80044E1	-7.15256E-4	-8.80013E1	4.29153E-4	4.14848E-3	9.67741E-2	1.58257E1	-1.98483E1	-1.9957E1	1.50773E1	2.23915E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.40499E-2
1.7E1	1.283E3	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80043E1	-1.14441E-3	-8.80013E1	5.48363E-4	3.98159E-3	9.65595E-2	1.58792E1	-1.99185E1	-1.9954E1	1.50431E1	2.24012E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.41756E-2
1.8E1	5.143E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80043E1	-1.3113E-3	-8.80014E1	8.34465E-4	4.1008E-3	9.64403E-2	1.58594E1	-1.98098E1	-1.9969E1	1.49998E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.41966E-2
1.9E1	2.562E3	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80042E1	-1.12057E-3	-8.80012E1	5.48363E-4	3.86238E-3	9.66549E-2	1.58002E1	-1.98287E1	-2.00003E1	1.50311E1	2.24889E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.42387E-2
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80041E1	-1.0252E-3	-8.80009E1	6.67572E-4	4.22001E-3	9.63926E-2	1.58411E1	-1.98502E1	-1.98765E1	1.49929E1	2.23583E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.4223E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.8004E1	-9.29832E-4	-8.8001E1	9.05991E-4	4.1008E-3	9.66549E-2	1.58716E1	-1.98735E1	-1.99667E1	1.50375E1	2.2426E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.41907E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.8004E1	-1.23978E-3	-8.80012E1	1.12057E-3	3.8147E-3	9.64642E-2	1.58156E1	-1.98381E1	-2.00121E1	1.5025E1	2.23699E-9	2.5208E-3	2.5208E-3	6.31283E-3	2.40852E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80043E1	-1.09673E-3	-8.80012E1	9.53674E-4	4.17233E-3	9.65595E-2	1.58083E1	-1.98723E1	-1.99648E1	1.5037E1