[Scan]
initial_time=2016-01-15T20:51:36
final_time=2016-01-15T20:51:56
ip_count=19
run=1023
dataset=1
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81167E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.64322E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.2269E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.75233E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.35456E-8
mult1=-1.03063E-8
mult2=-2.74656E-9
rf_tmon=-4.34419E-3
rf_agc=3.32374E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=6.15108E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60906E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.02994E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.04776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54457E1
cs_ef1b_imon=2.88683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02038E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04585E1
cs_ea1_imon=2.60348E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02393E0
lens1_imon=1.49232E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.95675E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02807E1
cs_ea2_imon=1.50109E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84652E1
cs_ef1a_imon=2.9636E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.07423E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.28698E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02266E1
cs_anode1_imon=2.97946E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.19322E-9
tplens_vset=0.0E0
tplens_vmon=-1.74658E0
tplens_imon=-2.66901E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99438E1
iondef3_imon=8.77793E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98537E1
iondef2_imon=9.35111E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03077E2
lens6_imon=2.98202E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=9.36687E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.78804E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33399E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.15028E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27793E0
os_ea2_imon=-4.00285E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06181E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.14308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.09903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.40112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.27513E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.24713E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57957E1
iondef1_imon=5.43253E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50148E1
iondef4_imon=5.37049E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.54073E-8
olens1_vset=0.0E0
olens1_vmon=2.21729E-3
olens1_imon=1.25754E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15357E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.9221E-6
window_vset=0.0E0
window_vmon=2.92425E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.10883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.84207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51585E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.43453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65296E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.96396E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67093E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62055E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22678E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.41405E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65899E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.616E3	1.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80042E1	-9.29832E-4	-8.80013E1	8.34465E-4	4.00543E-3	9.61781E-2	1.58319E1	-1.98411E1	-1.99616E1	1.50381E1	2.24012E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.40918E-2
2.0E0	3.653E3	2.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80042E1	-1.0252E-3	-8.80013E1	1.12057E-3	4.1008E-3	9.65595E-2	1.58852E1	-1.98696E1	-1.99328E1	1.50419E1	2.2345E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.41471E-2
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80043E1	-8.34465E-4	-8.80011E1	8.34465E-4	4.14848E-3	9.62734E-2	1.58322E1	-1.98609E1	-1.99358E1	1.50409E1	2.2345E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.42485E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.8004E1	-1.19209E-3	-8.8001E1	8.82149E-4	4.19617E-3	9.62734E-2	1.58356E1	-1.98435E1	-1.99628E1	1.50635E1	2.23963E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.41479E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80042E1	-7.86781E-4	-8.80009E1	7.86781E-4	4.26769E-3	9.64165E-2	1.58221E1	-1.9788E1	-1.99596E1	1.50316E1	2.23468E-9	2.52027E-3	2.52027E-3	6.28511E-3	2.41693E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80043E1	-7.39098E-4	-8.80012E1	7.15256E-4	4.29153E-3	9.6488E-2	1.5848E1	-1.97945E1	-1.99579E1	1.50551E1	2.23869E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.42024E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80044E1	-7.62939E-4	-8.8001E1	5.00679E-4	4.14848E-3	9.66549E-2	1.58125E1	-1.98783E1	-1.99276E1	1.50412E1	2.23963E-9	2.52373E-3	2.52373E-3	6.31288E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80045E1	-5.72205E-4	-8.80013E1	7.62939E-4	4.26769E-3	9.66072E-2	1.58474E1	-1.98771E1	-1.9984E1	1.50286E1					
1.2E1	1.22E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80044E1	-2.86102E-4	-8.80008E1	8.58307E-4	3.93391E-3	9.66549E-2	1.5848E1	-1.9808E1	-1.99306E1	1.50298E1	2.24347E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.41199E-2
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80042E1	-5.48363E-4	-8.80011E1	6.91414E-4	4.02927E-3	9.65834E-2	1.58383E1	-1.98489E1	-1.99438E1	1.50232E1	2.24109E-9	2.51771E-3	2.51771E-3	6.3514E-3	2.41127E-2
1.4E1	1.56E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80046E1	-5.48363E-4	-8.80013E1	6.19888E-4	4.62532E-3	9.66787E-2	1.58317E1	-1.98434E1	-2.00045E1	1.50088E1	2.24402E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.40918E-2
1.5E1	1.1E2	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80042E1	-6.19888E-4	-8.80013E1	5.24521E-4	4.36306E-3	9.65595E-2	1.58437E1	-1.98464E1	-1.99167E1	1.50172E1	2.2372E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.41127E-2
1.6E1	4.36E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80043E1	-5.24521E-4	-8.80012E1	8.10623E-4	4.48227E-3	9.61542E-2	1.58305E1	-1.98434E1	-1.99059E1	1.50461E1	2.24207E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41966E-2
1.7E1	1.275E3	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80041E1	-9.05991E-4	-8.8001E1	7.62939E-4	4.17233E-3	9.67503E-2	1.57098E1	-1.97317E1	-1.99732E1	1.50214E1	2.24012E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.42387E-2
1.8E1	5.162E3	6.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80041E1	-7.39098E-4	-8.80012E1	8.10623E-4	4.14848E-3	9.65118E-2	1.58522E1	-1.98699E1	-1.99588E1	1.50977E1	2.23915E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.40499E-2
1.9E1	2.577E3	1.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80043E1	-9.05991E-4	-8.8001E1	5.24521E-4	4.17233E-3	9.63449E-2	1.58203E1	-1.98609E1	-1.99588E1	1.49929E1	2.23138E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.41337E-2
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80042E1	-5.48363E-4	-8.80012E1	7.86781E-4	4.43459E-3	9.63926E-2	1.57909E1	-1.98314E1	-1.99059E1	1.5044E1	2.2406E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.41199E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80041E1	-7.62939E-4	-8.80011E1	4.05312E-4	4.45843E-3	9.65357E-2	1.58156E1	-1.9821E1	-1.9939E1	1.49993E1	2.23566E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.40413E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.8004E1	-7.86781E-4	-8.80011E1	7.62939E-4	4.26769E-3	9.62973E-2	1.58227E1	-1.98487E1	-1.99349E1	1.50244E1	2.23773E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.40994E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80043E1	-5.00679E-4	-8.80013E1	7.86781E-4	4.24385E-3	9.64403E-2	1.57957E1	-1.98537E1	-1.99438E1	1.50148E1	2.23678E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.41405E-2