[Scan]
initial_time=2016-01-15T20:52:03
final_time=2016-01-15T20:52:22
ip_count=19
run=1023
dataset=1
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.78522E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.74956E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.22777E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.82296E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.36299E-8
mult1=-9.1504E-9
mult2=-2.69266E-9
rf_tmon=-4.8609E-3
rf_agc=3.31653E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=6.11424E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54199E1
cs_ef1b_imon=2.8753E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=2.56521E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98936E0
lens1_imon=1.75043E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.53453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.96072E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.07442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1167E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14633E1
os_ea1_imon=2.36169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.19616E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.99604E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.14805E-9
tplens_vset=0.0E0
tplens_vmon=-1.69275E0
tplens_imon=-1.6085E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00057E1
iondef3_imon=8.85756E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98627E1
iondef2_imon=9.33538E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03093E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=9.4732E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.75999E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.1741E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23853E0
os_ea2_imon=-4.65239E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.28902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.25146E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58504E1
iondef1_imon=5.25445E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50196E1
iondef4_imon=5.28399E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.53232E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.25226E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18901E0
cs_ionaccel_imon=-1.66085E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56735E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-7.20213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.11098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.10556E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57387E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33382E1
os_fil1_imon=9.39141E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65238E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30683E1
cs_fil1_imon=9.94564E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62162E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66766E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65973E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.40583E-2
chamber_ion_pmon=2.23011E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25965E-1
res40_imon=-2.33839E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=265
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.577E3	2.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80041E1	-5.96046E-4	-8.80015E1	6.4373E-4	4.31538E-3	9.61542E-2	1.58113E1	-1.98519E1	-1.99432E1	1.50298E1	2.23773E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.41405E-2
2.0E0	3.533E3	4.0E0	3.16E2	1.6E2	-7.10825E-2	-8.8004E1	-8.34465E-4	-8.80014E1	6.4373E-4	4.41074E-3	9.62019E-2	1.58503E1	-1.98678E1	-1.99782E1	1.50316E1	2.23915E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.41337E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80045E1	-8.82149E-4	-8.80015E1	7.39098E-4	4.43459E-3	9.62496E-2	1.58305E1	-1.98127E1	-1.99402E1	1.50109E1	2.23863E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.40626E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80042E1	-1.00136E-3	-8.80016E1	5.96046E-4	4.24385E-3	9.62734E-2	1.58079E1	-1.98281E1	-1.99502E1	1.50382E1	2.242E-9	2.52448E-3	2.52448E-3	6.32328E-3	2.41674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80041E1	-1.0252E-3	-8.80015E1	5.96046E-4	4.24385E-3	9.62257E-2	1.58399E1	-1.98992E1	-1.99812E1	1.50617E1	2.23964E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.42437E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80043E1	-9.05991E-4	-8.80016E1	9.05991E-4	4.74453E-3	9.62019E-2	1.58256E1	-1.98523E1	-1.99596E1	1.50346E1	2.23818E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.40499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80044E1	-6.19888E-4	-8.80016E1	9.29832E-4	4.79221E-3	9.62496E-2	1.57949E1	-1.98499E1	-1.99213E1	1.50676E1	2.24207E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80045E1	-6.67572E-4	-8.80014E1	8.58307E-4	4.52995E-3	9.64642E-2	1.57716E1	-1.98272E1	-1.99516E1	1.50461E1	2.24012E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.41337E-2
1.2E1	1.11E2	1.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80042E1	-4.76837E-4	-8.80012E1	6.19888E-4	3.95775E-3	9.62257E-2	1.58317E1	-1.98284E1	-1.99576E1	1.50352E1	2.24155E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41405E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80042E1	-6.19888E-4	-8.80013E1	5.24521E-4	3.8147E-3	9.61065E-2	1.58588E1	-1.98308E1	-1.9933E1	1.50124E1	2.23915E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.41546E-2
1.4E1	1.18E2	0.0E0	5.66E2	3.82E2	-7.08504E-2	-8.80042E1	-6.4373E-4	-8.80015E1	4.76837E-4	4.12464E-3	9.62496E-2	1.57831E1	-1.98422E1	-1.99462E1	1.50557E1	2.24061E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41442E-2
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80042E1	-6.67572E-4	-8.80009E1	2.38419E-4	4.07696E-3	9.59635E-2	1.58796E1	-1.98826E1	-1.99391E1	1.50106E1					
1.6E1	4.39E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80044E1	-8.10623E-4	-8.80011E1	6.4373E-4	4.29153E-3	9.62496E-2	1.57979E1	-1.98553E1	-1.99795E1	1.50409E1	2.23741E-9	2.52058E-3	2.52058E-3	6.31251E-3	2.41988E-2
1.7E1	1.223E3	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80044E1	-8.82149E-4	-8.80011E1	7.86781E-4	4.22001E-3	9.60112E-2	1.59593E1	-1.99224E1	-1.99047E1	1.50571E1	2.22602E-9	2.51271E-3	2.51271E-3	6.30171E-3	2.41192E-2
1.8E1	5.232E3	1.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80043E1	-1.04904E-3	-8.80012E1	6.67572E-4	4.31538E-3	9.62973E-2	1.58203E1	-1.98511E1	-1.99284E1	1.50282E1	2.21978E-9	2.51716E-3	2.51716E-3	6.30466E-3	2.41337E-2
1.9E1	2.454E3	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80043E1	-8.82149E-4	-8.80011E1	8.58307E-4	4.24385E-3	9.61304E-2	1.58395E1	-1.98296E1	-1.9945E1	1.50286E1					
2.0E1	3.3E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80042E1	-1.00136E-3	-8.80013E1	9.29832E-4	4.31538E-3	9.63688E-2	1.57993E1	-1.98759E1	-1.99714E1	1.5034E1	2.24012E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80043E1	-8.82149E-4	-8.8001E1	6.19888E-4	4.31538E-3	9.60112E-2	1.58374E1	-1.98063E1	-1.99508E1	1.50785E1	2.22075E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.41756E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80043E1	-9.29832E-4	-8.80011E1	4.29153E-4	4.26769E-3	9.64642E-2	1.58315E1	-1.98411E1	-1.99815E1	1.50242E1	2.23869E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.40994E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80045E1	-8.58307E-4	-8.80013E1	5.96046E-4	4.19617E-3	9.62019E-2	1.58504E1	-1.98627E1	-2.00057E1	1.50196E1	2.23011E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.40583E-2