[Scan]
initial_time=2016-01-15T20:53:23
final_time=2016-01-15T20:53:43
ip_count=19
run=1023
dataset=1
scan=79
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.86945E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.56526E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.22525E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.87497E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.35676E-8
mult1=-9.43937E-9
mult2=-2.75055E-9
rf_tmon=-4.29613E-3
rf_agc=3.34057E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=6.1506E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.3575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54601E1
cs_ef1b_imon=2.86593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04604E1
cs_ea1_imon=2.56275E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98308E0
lens1_imon=1.1895E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.51983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85307E1
cs_ef1a_imon=2.96072E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.07367E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.26283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.33131E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92002E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=2.98919E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.25496E-9
tplens_vset=0.0E0
tplens_vmon=-1.65886E0
tplens_imon=-3.4621E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99336E1
iondef3_imon=8.79235E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98362E1
iondef2_imon=9.28262E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03055E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=9.66155E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.76209E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31458E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.1665E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11514E1
os_restr2_imon=3.40292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.25722E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58089E1
iondef1_imon=5.20181E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50076E1
iondef4_imon=5.3813E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.54448E-8
olens1_vset=0.0E0
olens1_vmon=1.64509E-3
olens1_imon=1.25366E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17039E0
cs_ionaccel_imon=-1.65364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.82815E-1
window_imon=-6.48134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.82044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.96103E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=5.9192E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.41333E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65034E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30662E1
cs_fil1_imon=9.96354E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63093E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66599E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68887E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.41199E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22361E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.652E3	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80043E1	-1.00136E-3	-8.80013E1	7.39098E-4	4.3869E-3	9.6035E-2	1.58299E1	-1.98561E1	-1.99288E1	1.50497E1					
2.0E0	3.683E3	3.0E0	3.16E2	1.6E2	-7.30146E-2	-8.8004E1	-9.53674E-4	-8.80011E1	5.72205E-4	4.43459E-3	9.61542E-2	1.58622E1	-1.98322E1	-1.99685E1	1.50226E1	2.23825E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.41471E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.8004E1	-8.82149E-4	-8.80011E1	5.48363E-4	4.55379E-3	9.6488E-2	1.58137E1	-1.98723E1	-1.99438E1	1.50461E1	2.23487E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.41611E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.8004E1	-6.91414E-4	-8.80008E1	6.4373E-4	4.41074E-3	9.62257E-2	1.58131E1	-1.9835E1	-1.999E1	1.50268E1	2.23468E-9	2.52027E-3	2.52027E-3	6.27399E-3	2.41265E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80043E1	-8.10623E-4	-8.80015E1	7.86781E-4	4.14848E-3	9.6488E-2	1.57958E1	-1.98343E1	-1.99549E1	1.50347E1	2.23526E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.40082E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80043E1	-1.00136E-3	-8.80012E1	8.58307E-4	4.45843E-3	9.63449E-2	1.58083E1	-1.98422E1	-1.9957E1	1.50425E1	2.24062E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.40839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80042E1	-5.72205E-4	-8.8001E1	9.29832E-4	4.31538E-3	9.65834E-2	1.58347E1	-1.98362E1	-1.99378E1	1.50109E1	2.23623E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80043E1	-7.39098E-4	-8.80013E1	5.72205E-4	4.36306E-3	9.65595E-2	1.58427E1	-1.98487E1	-1.99726E1	1.50581E1	2.23773E-9	2.52815E-3	2.52815E-3	6.29665E-3	2.40788E-2
1.2E1	1.18E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80045E1	-5.72205E-4	-8.80014E1	7.86781E-4	4.45843E-3	9.62496E-2	1.58552E1	-1.98597E1	-1.99294E1	1.5022E1	2.2372E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41546E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80043E1	-6.67572E-4	-8.80015E1	3.09944E-4	4.41074E-3	9.62734E-2	1.58067E1	-1.98511E1	-1.9972E1	1.5013E1	2.2394E-9	2.52297E-3	2.52297E-3	6.33461E-3	2.40852E-2
1.4E1	1.57E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80041E1	-7.39098E-4	-8.80014E1	5.48363E-4	4.50611E-3	9.63926E-2	1.58132E1	-1.98623E1	-1.99756E1	1.50051E1					
1.5E1	1.29E2	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80042E1	-5.96046E-4	-8.80016E1	6.4373E-4	4.48227E-3	9.64165E-2	1.5848E1	-1.98795E1	-1.99101E1	1.50449E1	2.23487E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.40583E-2
1.6E1	4.55E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80041E1	-7.86781E-4	-8.80014E1	7.39098E-4	4.22001E-3	9.66311E-2	1.57987E1	-1.98296E1	-1.99612E1	1.50328E1	2.23526E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.41546E-2
1.7E1	1.246E3	4.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80042E1	-5.96046E-4	-8.80017E1	6.19888E-4	4.12464E-3	9.68695E-2	1.58988E1	-1.9893E1	-1.99331E1	1.50022E1	2.23487E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.41199E-2
1.8E1	5.227E3	3.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80044E1	-5.96046E-4	-8.80013E1	7.86781E-4	4.3869E-3	9.65834E-2	1.5815E1	-1.98824E1	-1.99803E1	1.50288E1	2.2406E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.41611E-2
1.9E1	2.522E3	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80043E1	-6.19888E-4	-8.80013E1	5.24521E-4	4.12464E-3	9.66311E-2	1.58269E1	-1.98567E1	-1.9942E1	1.5031E1	2.2372E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.40708E-2
2.0E1	4.4E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80045E1	-7.62939E-4	-8.80009E1	2.86102E-4	4.26769E-3	9.62734E-2	1.5783E1	-1.98643E1	-1.9983E1	1.50365E1	2.23818E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.42177E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80047E1	-6.91414E-4	-8.80009E1	4.76837E-4	4.48227E-3	9.62973E-2	1.58061E1	-1.98723E1	-1.99443E1	1.49987E1	2.23764E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.40839E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80046E1	-5.72205E-4	-8.80012E1	8.58307E-4	4.26769E-3	9.60112E-2	1.58563E1	-1.98688E1	-1.99543E1	1.50479E1	2.23583E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.42437E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80045E1	-8.82149E-4	-8.80014E1	7.39098E-4	3.98159E-3	9.61065E-2	1.58089E1	-1.98362E1	-1.99336E1	1.50076E1	2.23964E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.41199E-2