[Scan]
initial_time=2016-01-15T20:53:50
final_time=2016-01-15T20:54:10
ip_count=19
run=1023
dataset=1
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.76345E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.86984E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.237E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.71353E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.35995E-8
mult1=-9.8911E-9
mult2=-2.7065E-9
rf_tmon=-4.83687E-3
rf_agc=3.25639E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=6.56462E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.38045E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=2.02261E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53928E1
cs_ef1b_imon=2.85672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.58043E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97638E0
lens1_imon=1.39649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.4963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=2.97279E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.07304E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.26524E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14875E1
os_ea1_imon=2.3578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63427E1
os_ef1bup_imon=3.08017E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.20253E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93767E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.98009E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.11696E-9
tplens_vset=0.0E0
tplens_vmon=-1.70042E0
tplens_imon=-1.6085E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99939E1
iondef3_imon=8.68059E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9844E1
iondef2_imon=9.20089E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03045E2
lens6_imon=2.98031E-4
ql6_vset=1.0E-1
ql6_vmon=9.65834E-2
ql6_imon=9.47356E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=1.79963E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33905E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74478E1
cs_ef2b_imon=3.13508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26272E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.15003E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.5016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89701E-1
os_ef2bup_imon=-5.02811E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.41658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.25133E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58186E1
iondef1_imon=5.1872E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50161E1
iondef4_imon=5.4463E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.54561E-8
olens1_vset=0.0E0
olens1_vmon=1.81198E-3
olens1_imon=1.25313E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15621E0
cs_ionaccel_imon=-1.744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56979E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=2.64602E-1
window_imon=-8.33481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82729E2
mask1_imon=2.3906E-4
mask2_vset=0.0E0
mask2_vmon=-1.86744E1
mask2_imon=-7.32698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.31438E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.09494E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28154E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.40063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65177E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30636E1
cs_fil1_imon=9.95007E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66912E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.72131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90656E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75338E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36394E-1
cs_fil2_imon=-2.55914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.27701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.41546E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70211E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.545E3	4.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80043E1	-8.34465E-4	-8.80014E1	7.15256E-4	4.05312E-3	9.6488E-2	1.58305E1	-1.98525E1	-1.9924E1	1.50394E1	2.23731E-9	2.51393E-3	2.51393E-3	6.31269E-3	2.41876E-2
2.0E0	3.493E3	5.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80042E1	-7.86781E-4	-8.80013E1	8.82149E-4	4.31538E-3	9.64403E-2	1.5792E1	-1.98629E1	-1.99691E1	1.50418E1	2.2327E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.41265E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80042E1	-1.00136E-3	-8.80013E1	6.67572E-4	4.05312E-3	9.66311E-2	1.58162E1	-1.98476E1	-1.99602E1	1.50398E1	2.2406E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.41817E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80043E1	-1.04904E-3	-8.80017E1	7.62939E-4	4.43459E-3	9.66311E-2	1.57914E1	-1.98464E1	-1.99443E1	1.50136E1	2.24251E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.42024E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80043E1	-8.58307E-4	-8.80011E1	5.96046E-4	4.14848E-3	9.63449E-2	1.58335E1	-1.98711E1	-1.99492E1	1.50381E1	2.24251E-9	2.5131E-3	2.5131E-3	6.35059E-3	2.41405E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80043E1	-1.00136E-3	-8.80013E1	9.77516E-4	4.24385E-3	9.6488E-2	1.5805E1	-1.9831E1	-1.99278E1	1.50232E1	2.23487E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.42851E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80044E1	-8.82149E-4	-8.80011E1	4.76837E-4	4.43459E-3	9.64642E-2	1.57896E1	-1.98364E1	-1.99756E1	1.50316E1	2.22171E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.40291E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80041E1	-6.67572E-4	-8.80014E1	1.07288E-3	4.19617E-3	9.66549E-2	1.58056E1	-1.98434E1	-1.99526E1	1.50057E1	2.22916E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.42024E-2
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80042E1	-1.0252E-3	-8.80013E1	5.72205E-4	4.72069E-3	9.64165E-2	1.58081E1	-1.98079E1	-1.99708E1	1.50388E1	2.23487E-9	2.52169E-3	2.52169E-3	6.28592E-3	2.40788E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.8004E1	-1.19209E-3	-8.8001E1	6.67572E-4	4.72069E-3	9.64165E-2	1.58327E1	-1.98535E1	-1.99638E1	1.50491E1	2.23332E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.41127E-2
1.4E1	1.44E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80039E1	-8.10623E-4	-8.8001E1	8.34465E-4	4.31538E-3	9.62257E-2	1.58648E1	-1.98969E1	-1.99612E1	1.50653E1	2.2372E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.41756E-2
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80041E1	-8.10623E-4	-8.80012E1	7.39098E-4	4.43459E-3	9.63688E-2	1.58126E1	-1.98476E1	-2.00092E1	1.50455E1	2.24207E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.41337E-2
1.6E1	4.07E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80041E1	-6.4373E-4	-8.80013E1	9.05991E-4	4.19617E-3	9.63926E-2	1.58317E1	-1.98963E1	-1.9981E1	1.50148E1	2.23964E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.41817E-2
1.7E1	1.27E3	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80045E1	-8.58307E-4	-8.80015E1	8.10623E-4	4.1008E-3	9.61781E-2	1.57765E1	-1.98068E1	-1.99876E1	1.50455E1	2.23138E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.41127E-2
1.8E1	5.155E3	8.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80046E1	-9.05991E-4	-8.80013E1	9.05991E-4	4.19617E-3	9.62257E-2	1.58029E1	-1.98651E1	-1.99516E1	1.50682E1	2.23507E-9	2.51809E-3	2.51809E-3	6.30197E-3	2.41164E-2
1.9E1	2.495E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80043E1	-1.04904E-3	-8.80013E1	6.67572E-4	4.41074E-3	9.62496E-2	1.58311E1	-1.98627E1	-1.99732E1	1.50358E1					
2.0E1	3.9E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80045E1	-1.09673E-3	-8.80013E1	9.53674E-4	4.31538E-3	9.61542E-2	1.58293E1	-1.98867E1	-1.99336E1	1.50004E1	2.23915E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41966E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80043E1	-9.77516E-4	-8.80015E1	7.62939E-4	4.19617E-3	9.65834E-2	1.58586E1	-1.986E1	-1.9936E1	1.50393E1	2.23988E-9	2.51593E-3	2.51593E-3	6.31012E-3	2.41267E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80044E1	-1.0252E-3	-8.80014E1	7.86781E-4	4.31538E-3	9.65118E-2	1.58209E1	-1.9857E1	-1.99632E1	1.49764E1					
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80044E1	-7.62939E-4	-8.80014E1	5.48363E-4	4.05312E-3	9.65834E-2	1.58186E1	-1.9844E1	-1.99939E1	1.50161E1	2.23818E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.41546E-2