[Scan]
initial_time=2016-01-15T20:54:17
final_time=2016-01-15T20:54:37
ip_count=19
run=1023
dataset=1
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77301E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.71141E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.18701E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.68915E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.35573E-8
mult1=-1.06796E-8
mult2=-2.49904E-9
rf_tmon=-5.88832E-3
rf_agc=3.19216E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=6.14583E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19164E1
lens5a_imon=2.00315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12558E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.87805E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0438E1
cs_ea1_imon=2.58467E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01944E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65012E1
os_ef1alow_imon=2.96969E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.50445E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84491E1
cs_ef1a_imon=2.97748E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.07396E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11277E1
os_restr1_imon=4.2683E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=2.39107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64151E1
os_ef1bup_imon=3.05957E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.22448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01591E1
cs_anode1_imon=3.00083E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99967E1
olens4_imon=4.14121E-9
tplens_vset=0.0E0
tplens_vmon=-1.67919E0
tplens_imon=-5.28949E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99943E1
iondef3_imon=8.86464E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97894E1
iondef2_imon=9.39555E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.97992E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=9.55522E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.81308E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.11512E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26921E0
os_ea2_imon=-1.00323E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71647E1
cs_ef2a_imon=3.1498E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02596E0
os_ef2alow_imon=-2.46394E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01749E-1
os_ef2bup_imon=-5.40085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10911E1
os_restr2_imon=3.42544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.23087E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58335E1
iondef1_imon=5.17658E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50196E1
iondef4_imon=5.5577E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.54421E-8
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=1.25455E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12424E0
cs_ionaccel_imon=-1.87302E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02146E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.94968E-6
window_vset=0.0E0
window_vmon=2.62632E-1
window_imon=-9.21183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82733E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86403E1
mask2_imon=-5.60262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=7.50551E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.44888E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.39336E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07424E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65203E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30658E1
cs_fil1_imon=9.94235E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63097E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66509E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36326E-1
cs_fil2_imon=-2.6794E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35442E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.40788E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.5803E-1
res40_imon=-2.57363E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.498E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80042E1	-8.82149E-4	-8.80014E1	6.4373E-4	4.43459E-3	9.65834E-2	1.5851E1	-1.98765E1	-1.99349E1	1.50052E1	2.23773E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.40994E-2
2.0E0	3.593E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80041E1	-8.82149E-4	-8.80013E1	5.48363E-4	4.41074E-3	9.63449E-2	1.58142E1	-1.98698E1	-1.99751E1	1.5001E1	2.23869E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.41817E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80045E1	-8.58307E-4	-8.80014E1	7.15256E-4	4.14848E-3	9.64642E-2	1.57914E1	-1.98222E1	-1.99478E1	1.50404E1	2.24012E-9	2.52521E-3	2.52521E-3	6.3074E-3	2.39889E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80045E1	-6.91414E-4	-8.80014E1	5.24521E-4	4.05312E-3	9.64403E-2	1.58061E1	-1.98676E1	-1.99543E1	1.5034E1	2.24294E-9	2.51919E-3	2.51919E-3	6.29684E-3	2.41269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80042E1	-9.05991E-4	-8.80016E1	4.29153E-4	4.33922E-3	9.63926E-2	1.57789E1	-1.98368E1	-1.996E1	1.50316E1	2.23915E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.41756E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80043E1	-7.15256E-4	-8.80012E1	6.4373E-4	4.07696E-3	9.61542E-2	1.58008E1	-1.98246E1	-1.99296E1	1.50202E1	2.23583E-9	2.51632E-3	2.51632E-3	6.35059E-3	2.41611E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80044E1	-8.10623E-4	-8.80011E1	3.8147E-4	4.55379E-3	9.62019E-2	1.58227E1	-1.98398E1	-1.99191E1	1.50437E1	2.24012E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80043E1	-1.23978E-3	-8.80013E1	6.4373E-4	4.64916E-3	9.62973E-2	1.58341E1	-1.98771E1	-1.99528E1	1.50112E1	2.23526E-9	2.5199E-3	2.5199E-3	6.26916E-3	2.41756E-2
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80042E1	-1.28746E-3	-8.80014E1	8.58307E-4	4.55379E-3	9.62734E-2	1.58395E1	-1.98537E1	-1.98951E1	1.50381E1	2.24402E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.41966E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80043E1	-1.23978E-3	-8.80013E1	9.77516E-4	4.74453E-3	9.64642E-2	1.58311E1	-1.98555E1	-2.00051E1	1.50103E1	2.23678E-9	2.51954E-3	2.51954E-3	6.35059E-3	2.41611E-2
1.4E1	1.71E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80045E1	-1.00136E-3	-8.80014E1	1.00136E-3	4.50611E-3	9.61542E-2	1.58474E1	-1.98362E1	-1.99492E1	1.50545E1	2.24459E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.41052E-2
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80046E1	-1.09673E-3	-8.80014E1	9.53674E-4	4.48227E-3	9.5892E-2	1.57915E1	-1.98591E1	-2.00009E1	1.50316E1	2.23818E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.40708E-2
1.6E1	4.02E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80045E1	-9.29832E-4	-8.80012E1	9.77516E-4	4.14848E-3	9.60588E-2	1.58125E1	-1.98891E1	-1.99516E1	1.50161E1	2.23869E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41817E-2
1.7E1	1.27E3	1.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80043E1	-8.10623E-4	-8.80014E1	8.10623E-4	4.12464E-3	9.60588E-2	1.58104E1	-1.98461E1	-1.99534E1	1.50296E1	2.2372E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.40291E-2
1.8E1	5.173E3	4.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80044E1	-9.29832E-4	-8.80015E1	1.09673E-3	4.14848E-3	9.61304E-2	1.58548E1	-1.98253E1	-1.9972E1	1.5034E1	2.2365E-9	2.5165E-3	2.5165E-3	6.29211E-3	2.41597E-2
1.9E1	2.584E3	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80043E1	-1.07288E-3	-8.80015E1	9.77516E-4	3.98159E-3	9.61304E-2	1.58437E1	-1.97888E1	-1.99924E1	1.50298E1	2.23173E-9	2.52502E-3	2.52502E-3	6.34301E-3	2.42168E-2
2.0E1	3.6E1	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80042E1	-1.0252E-3	-8.80017E1	8.82149E-4	4.64916E-3	9.59873E-2	1.58065E1	-1.98579E1	-2.00099E1	1.50376E1	2.24109E-9	2.52977E-3	2.52977E-3	6.3514E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80043E1	-8.58307E-4	-8.80013E1	1.07288E-3	4.14848E-3	9.5892E-2	1.57977E1	-1.98539E1	-1.99674E1	1.4968E1	2.24251E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.42024E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80043E1	-1.00136E-3	-8.80011E1	9.53674E-4	4.24385E-3	9.6035E-2	1.57981E1	-1.98398E1	-1.99594E1	1.50178E1	2.24155E-9	2.52815E-3	2.52815E-3	6.29665E-3	2.41817E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80045E1	-7.39098E-4	-8.80013E1	8.34465E-4	4.31538E-3	9.62019E-2	1.58335E1	-1.97894E1	-1.99943E1	1.50196E1	2.23583E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.40788E-2