[Scan]
initial_time=2016-01-15T20:54:54
final_time=2016-01-15T20:55:14
ip_count=19
run=1023
dataset=2
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08713E-4
ql1_vset=
ql1_vmon=-8.22091E-1
ql1_imon=1.62164E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=1.87798E-9
ql3_vset=
ql3_vmon=-9.13293E0
ql3_imon=7.64592E-9
ql4_vset=
ql4_vmon=-9.14338E0
ql4_imon=-7.2453E-10
mult1=-9.37917E-9
mult2=-2.73258E-9
rf_tmon=-5.10123E-3
rf_agc=3.18435E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.43464E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19547E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53795E1
cs_ef1b_imon=2.87653E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04386E1
cs_ea1_imon=2.57335E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35486E0
lens1_imon=2.84765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.51506E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83734E1
cs_ef1a_imon=2.94603E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.32296E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.26975E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.36063E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64307E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21257E0
cs_ionrep_imon=1.19121E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02082E1
cs_anode1_imon=2.96723E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.45689E-8
tplens_vset=1.4E-1
tplens_vmon=1.68155E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26308E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.98218E-4
ql6_vset=1.0E-1
ql6_vmon=9.66549E-2
ql6_imon=3.96634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=1.78193E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74872E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3223E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.13995E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07136E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.31656E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11384E1
os_restr2_imon=3.43187E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.11334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.55366E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.844E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-1.69187E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=2.66919E-1
window_imon=-8.57807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82702E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86599E1
mask2_imon=-4.47728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.26837E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.81886E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.4202E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07567E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64753E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30631E1
cs_fil1_imon=9.96929E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62754E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67105E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.64602E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.63443E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.33493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2265E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.41337E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43771E-1
res40_imon=-2.55721E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=228
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.23617E-1	-7.98893E-1	-9.13253E0	-9.14342E0	4.19617E-3	9.63211E-2	2.73611E1	-3.26478E1	-3.26366E1	2.68358E1	2.23918E-9	2.51814E-3	2.51814E-3	6.29684E-3	2.41674E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.2376E-1	-7.98893E-1	-9.13284E0	-9.1433E0	4.36306E-3	9.65118E-2	2.73375E1	-3.26811E1	-3.2615E1	2.68394E1	2.24012E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.40499E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.23522E-1	-7.9875E-1	-9.13303E0	-9.1434E0	4.19617E-3	9.61304E-2	2.73194E1	-3.26447E1	-3.26134E1	2.6845E1	2.23918E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.4137E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.23474E-1	-7.99131E-1	-9.13291E0	-9.14335E0	4.29153E-3	9.62257E-2	2.72778E1	-3.26604E1	-3.26195E1	2.68341E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.23379E-1	-7.99227E-1	-9.13262E0	-9.14333E0	3.95775E-3	9.61781E-2	2.73093E1	-3.26873E1	-3.26038E1	2.6837E1	2.2427E-9	2.51758E-3	2.51758E-3	6.34231E-3	2.40672E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.22997E-1	-7.99417E-1	-9.1327E0	-9.14338E0	4.14848E-3	9.61304E-2	2.73021E1	-3.26219E1	-3.25942E1	2.68304E1	2.24402E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.2283E-1	-7.99322E-1	-9.13277E0	-9.14326E0	4.14848E-3	9.59158E-2	2.72903E1	-3.26673E1	-3.26602E1	2.68192E1	2.23583E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.41405E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.22592E-1	-7.9937E-1	-9.13281E0	-9.14338E0	3.86238E-3	9.66072E-2	2.73027E1	-3.26512E1	-3.26014E1	2.68478E1	2.24251E-9	2.51632E-3	2.51632E-3	6.34518E-3	2.41611E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.21853E-1	-7.9937E-1	-9.13301E0	-9.14359E0	4.00543E-3	9.65357E-2	2.73171E1	-3.26771E1	-3.26398E1	2.6831E1	2.24207E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.42177E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.21996E-1	-7.99036E-1	-9.13315E0	-9.1433E0	4.41074E-3	9.64403E-2	2.73257E1	-3.26632E1	-3.26148E1	2.68701E1	2.23915E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09704E0	-8.21805E-1	-7.9937E-1	-9.13324E0	-9.14364E0	4.36306E-3	9.62257E-2	2.73448E1	-3.26705E1	-3.26182E1	2.67931E1	2.24207E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.21948E-1	-7.99417E-1	-9.13312E0	-9.14354E0	4.1008E-3	9.62257E-2	2.73189E1	-3.26759E1	-3.26512E1	2.68275E1	2.24538E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.41817E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.22186E-1	-7.99274E-1	-9.13301E0	-9.14338E0	4.17233E-3	9.61542E-2	2.73315E1	-3.26428E1	-3.26398E1	2.68322E1	2.24062E-9	2.52585E-3	2.52585E-3	6.31299E-3	2.41265E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.21733E-1	-7.99251E-1	-9.13286E0	-9.14319E0	4.07696E-3	9.64165E-2	2.73611E1	-3.26602E1	-3.26172E1	2.68227E1	2.24012E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41546E-2
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.21829E-1	-7.99036E-1	-9.13293E0	-9.14345E0	4.12464E-3	9.62973E-2	2.73387E1	-3.26428E1	-3.26422E1	2.68196E1	2.24442E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.40994E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.22067E-1	-7.99346E-1	-9.13289E0	-9.14319E0	4.12464E-3	9.63688E-2	2.73782E1	-3.26726E1	-3.26372E1	2.68545E1	2.23915E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.41127E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.22163E-1	-7.99417E-1	-9.13262E0	-9.1434E0	4.14848E-3	9.65834E-2	2.73375E1	-3.26572E1	-3.26456E1	2.68352E1	2.23964E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.41199E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.22306E-1	-7.99227E-1	-9.13284E0	-9.14338E0	4.00543E-3	9.64165E-2	2.73219E1	-3.26521E1	-3.26179E1	2.68499E1	2.23526E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.41966E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.22163E-1	-7.99274E-1	-9.13284E0	-9.14359E0	4.36306E-3	9.62734E-2	2.73592E1	-3.26747E1	-3.26332E1	2.68893E1	2.2406E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.41199E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.22091E-1	-7.99155E-1	-9.13293E0	-9.14338E0	4.3869E-3	9.66549E-2	2.73375E1	-3.26741E1	-3.26308E1	2.67866E1	2.23818E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41337E-2