[Scan]
initial_time=2016-01-15T20:55:21
final_time=2016-01-15T20:55:41
ip_count=19
run=1023
dataset=2
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.21614E-1
ql1_imon=1.47371E-8
ql2_vset=
ql2_vmon=-7.99489E-1
ql2_imon=1.96916E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.79493E-9
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=-3.87657E-10
mult1=-9.30352E-9
mult2=-2.57143E-9
rf_tmon=-4.28899E-3
rf_agc=3.2453E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.58805E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=2.87026E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04279E1
cs_ea1_imon=2.58546E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3317E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.50722E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.96108E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.31997E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.35006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.17088E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93726E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=2.97009E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.38077E-8
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26315E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.54976E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03088E2
lens6_imon=2.98065E-4
ql6_vset=1.0E-1
ql6_vmon=9.61542E-2
ql6_imon=4.07479E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=1.7848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33321E0
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06179E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09961E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11556E1
os_restr2_imon=3.42491E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.27225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.13014E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.12412E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.86071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.67887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-4.03064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.73249E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.43561E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64489E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30601E1
cs_fil1_imon=9.95687E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63423E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66743E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.4223E-2
chamber_ion_pmon=2.21495E-9
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61695E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.21733E-1	-7.9906E-1	-9.1325E0	-9.14307E0	3.86238E-3	9.63449E-2	2.7286E1	-3.26428E1	-3.26608E1	2.68493E1	2.24442E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.4223E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.21853E-1	-7.99036E-1	-9.13279E0	-9.14328E0	4.12464E-3	9.62496E-2	2.73308E1	-3.2645E1	-3.25972E1	2.68182E1	2.24482E-9	2.52236E-3	2.52236E-3	6.33919E-3	2.41269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.219E-1	-7.98821E-1	-9.13286E0	-9.14311E0	4.07696E-3	9.63211E-2	2.73393E1	-3.26301E1	-3.26283E1	2.68331E1	2.23306E-9	2.51725E-3	2.51725E-3	6.3245E-3	2.43158E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.21543E-1	-7.98965E-1	-9.13279E0	-9.14347E0	4.1008E-3	9.64403E-2	2.73484E1	-3.26663E1	-3.2638E1	2.6847E1	2.2131E-9	2.51265E-3	2.51265E-3	6.30221E-3	2.42931E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.21829E-1	-7.98917E-1	-9.13281E0	-9.14357E0	3.86238E-3	9.61304E-2	2.73429E1	-3.26879E1	-3.26699E1	2.68136E1	2.21305E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41756E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.21686E-1	-7.98821E-1	-9.13289E0	-9.14316E0	4.12464E-3	9.64403E-2	2.72939E1	-3.26502E1	-3.26425E1	2.68124E1	2.21401E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.2159E-1	-7.98917E-1	-9.1325E0	-9.1434E0	4.07696E-3	9.65834E-2	2.7311E1	-3.2672E1	-3.26006E1	2.6813E1	2.21401E-9	2.5131E-3	2.5131E-3	6.29128E-3	2.41405E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.21686E-1	-7.98965E-1	-9.13234E0	-9.1434E0	4.07696E-3	9.65834E-2	2.73387E1	-3.26272E1	-3.26194E1	2.68232E1	2.21401E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41127E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.21471E-1	-7.99036E-1	-9.13215E0	-9.14347E0	4.12464E-3	9.66787E-2	2.7346E1	-3.26735E1	-3.26014E1	2.6855E1	2.21401E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.40082E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.21805E-1	-7.99584E-1	-9.132E0	-9.1435E0	3.93391E-3	9.65595E-2	2.73189E1	-3.26092E1	-3.2638E1	2.68256E1	2.21401E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.42024E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.21996E-1	-7.99251E-1	-9.13234E0	-9.14357E0	4.31538E-3	9.62973E-2	2.7301E1	-3.26691E1	-3.26325E1	2.68022E1	2.21401E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.41337E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.21805E-1	-7.99251E-1	-9.13224E0	-9.14354E0	4.29153E-3	9.62496E-2	2.73039E1	-3.25731E1	-3.25816E1	2.68268E1	2.21401E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41337E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.22115E-1	-7.9937E-1	-9.13219E0	-9.14333E0	4.31538E-3	9.65834E-2	2.73594E1	-3.26885E1	-3.25953E1	2.68388E1	2.21401E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.40788E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.22186E-1	-7.99537E-1	-9.13191E0	-9.14361E0	4.24385E-3	9.62973E-2	2.73096E1	-3.265E1	-3.2652E1	2.68426E1	2.21401E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.40788E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.21805E-1	-7.99465E-1	-9.13119E0	-9.14335E0	4.17233E-3	9.63449E-2	2.73525E1	-3.26727E1	-3.26124E1	2.68354E1	2.21401E-9	2.51657E-3	2.51657E-3	6.31196E-3	2.41802E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.21686E-1	-7.99108E-1	-9.13157E0	-9.14338E0	4.14848E-3	9.62257E-2	2.73339E1	-3.26831E1	-3.26098E1	2.68208E1	2.21401E-9	2.51468E-3	2.51468E-3	6.33161E-3	2.40491E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.21638E-1	-7.99274E-1	-9.13134E0	-9.14323E0	4.29153E-3	9.63449E-2	2.73626E1	-3.2655E1	-3.26101E1	2.68406E1	2.21401E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.41199E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.21543E-1	-7.99346E-1	-9.13141E0	-9.14328E0	4.14848E-3	9.65834E-2	2.73257E1	-3.26553E1	-3.26379E1	2.67872E1	2.21401E-9	2.51058E-3	2.51058E-3	6.3126E-3	2.41535E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.21471E-1	-7.99608E-1	-9.13153E0	-9.14304E0	4.1008E-3	9.61542E-2	2.73299E1	-3.26508E1	-3.26425E1	2.6831E1	2.21501E-9	2.51611E-3	2.51611E-3	6.3074E-3	2.40757E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.21614E-1	-7.99489E-1	-9.13148E0	-9.14314E0	4.05312E-3	9.61542E-2	2.73228E1	-3.26927E1	-3.26315E1	2.67944E1	2.21495E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.4223E-2