[Scan]
initial_time=2016-01-15T20:55:48
final_time=2016-01-15T20:56:07
ip_count=19
run=1023
dataset=2
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.21352E-1
ql1_imon=1.43251E-8
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=1.98536E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=2.77213E-9
ql4_vset=
ql4_vmon=-9.14352E0
ql4_imon=-2.27332E-10
mult1=-1.00668E-8
mult2=-3.01331E-9
rf_tmon=-4.82802E-3
rf_agc=3.32324E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.6202E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=2.01624E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53274E1
cs_ef1b_imon=2.87134E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0491E1
cs_ea1_imon=2.56996E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33651E0
lens1_imon=2.91627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65149E1
os_ef1alow_imon=3.00577E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.49136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.31447E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=4.24589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14368E1
os_ea1_imon=2.37637E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64002E1
os_ef1bup_imon=3.10776E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.19575E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.97477E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.35873E-8
tplens_vset=1.4E-1
tplens_vmon=1.67868E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25953E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2688E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03059E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=4.10085E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.77795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74171E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33441E0
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60183E-1
os_ef2bup_imon=-5.46303E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.44329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.2547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73688E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.12954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.25188E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.85515E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47082E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57024E1
einzel_imon=8.17077E-6
window_vset=0.0E0
window_vmon=2.37765E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.38868E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-3.67024E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.56306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33302E1
os_fil1_imon=9.42486E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30609E1
cs_fil1_imon=9.95374E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66656E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.41127E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.06454E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.21424E-1	-7.99155E-1	-9.13153E0	-9.1435E0	4.31538E-3	9.62734E-2	2.7321E1	-3.26366E1	-3.26331E1	2.68453E1	2.22157E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.40994E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.21447E-1	-7.99227E-1	-9.13141E0	-9.14338E0	4.24385E-3	9.62257E-2	2.73259E1	-3.26438E1	-3.26254E1	2.68275E1	2.23818E-9	2.50898E-3	2.50898E-3	6.31837E-3	2.41756E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.214E-1	-7.99394E-1	-9.1315E0	-9.14342E0	4.22001E-3	9.65118E-2	2.73293E1	-3.26891E1	-3.25983E1	2.67752E1	2.2372E-9	2.51225E-3	2.51225E-3	6.34037E-3	2.41337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.21424E-1	-7.99322E-1	-9.13143E0	-9.14345E0	4.33922E-3	9.64403E-2	2.73105E1	-3.26356E1	-3.26609E1	2.68563E1	2.2406E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.41611E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.21257E-1	-7.99584E-1	-9.13115E0	-9.14347E0	4.36306E-3	9.62734E-2	2.73068E1	-3.26573E1	-3.26144E1	2.68557E1	2.24207E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.41127E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.2128E-1	-7.99251E-1	-9.13174E0	-9.14352E0	4.33922E-3	9.63688E-2	2.73406E1	-3.26566E1	-3.26193E1	2.68449E1	2.2406E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.4223E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.20875E-1	-7.99036E-1	-9.13138E0	-9.14338E0	4.17233E-3	9.63926E-2	2.73529E1	-3.26608E1	-3.25794E1	2.68324E1	2.23818E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.42177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.20923E-1	-7.99131E-1	-9.13131E0	-9.14369E0	4.02927E-3	9.60588E-2	2.72769E1	-3.26517E1	-3.26487E1	2.68436E1	2.24499E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.40291E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.2109E-1	-7.99036E-1	-9.13122E0	-9.14347E0	3.93391E-3	9.61542E-2	2.73748E1	-3.27005E1	-3.26524E1	2.681E1	2.23769E-9	2.52099E-3	2.52099E-3	6.32112E-3	2.41232E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.21209E-1	-7.99155E-1	-9.1315E0	-9.1434E0	3.93391E-3	9.61542E-2	2.72803E1	-3.26083E1	-3.26803E1	2.68172E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.214E-1	-7.99227E-1	-9.13138E0	-9.1435E0	4.22001E-3	9.62496E-2	2.73523E1	-3.26966E1	-3.2601E1	2.6796E1	2.23818E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41546E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.21233E-1	-7.99298E-1	-9.13146E0	-9.14347E0	4.26769E-3	9.63926E-2	2.74743E1	-3.27564E1	-3.25096E1	2.68531E1	2.24375E-9	2.52364E-3	2.52364E-3	6.31761E-3	2.41207E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.21328E-1	-7.99131E-1	-9.13174E0	-9.14354E0	4.00543E-3	9.59158E-2	2.73273E1	-3.26621E1	-3.26278E1	2.68424E1	2.23755E-9	2.51874E-3	2.51874E-3	6.33065E-3	2.41559E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.2159E-1	-7.99227E-1	-9.132E0	-9.1433E0	3.88622E-3	9.59158E-2	2.73255E1	-3.26729E1	-3.2614E1	2.68064E1	2.23623E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.41756E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.21328E-1	-7.99203E-1	-9.13198E0	-9.14347E0	4.07696E-3	9.63926E-2	2.73345E1	-3.26374E1	-3.265E1	2.68593E1	2.24499E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.41756E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.21424E-1	-7.99298E-1	-9.13184E0	-9.14323E0	4.26769E-3	9.62019E-2	2.73099E1	-3.26278E1	-3.25972E1	2.68448E1	2.23915E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.41127E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.21066E-1	-7.98965E-1	-9.1316E0	-9.14316E0	4.45843E-3	9.62734E-2	2.72809E1	-3.26172E1	-3.26549E1	2.68316E1	2.24133E-9	2.51863E-3	2.51863E-3	6.31555E-3	2.41267E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.21114E-1	-7.99108E-1	-9.13172E0	-9.14321E0	4.07696E-3	9.61781E-2	2.73252E1	-3.26756E1	-3.26514E1	2.68563E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.21257E-1	-7.99298E-1	-9.13153E0	-9.14354E0	4.24385E-3	9.62019E-2	2.731E1	-3.2686E1	-3.2626E1	2.6807E1	2.24304E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41966E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.21352E-1	-7.99203E-1	-9.13131E0	-9.14352E0	4.43459E-3	9.62257E-2	2.73688E1	-3.2688E1	-3.25953E1	2.68172E1	2.23526E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.41127E-2