[Scan]
initial_time=2016-01-15T20:56:42
final_time=2016-01-15T20:57:02
ip_count=19
run=1023
dataset=2
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.20494E-1
ql1_imon=1.41299E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=1.9424E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=1.67255E-9
ql4_vset=
ql4_vmon=-9.14361E0
ql4_imon=-9.34362E-11
mult1=-7.91022E-9
mult2=-2.70663E-9
rf_tmon=-4.60255E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.65706E-9
bslens_vset=-6.2E0
bslens_vmon=-6.57722E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.05327E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54349E1
cs_ef1b_imon=2.85764E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0455E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=2.55554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36355E0
lens1_imon=3.10373E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.95964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03144E1
cs_ea2_imon=1.51587E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83739E1
cs_ef1a_imon=2.96E-5
olens2_vset=9.7E-1
olens2_vmon=9.69505E-1
olens2_imon=1.32607E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.23796E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.36195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.2163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02224E1
cs_anode1_imon=2.96756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.33397E-8
tplens_vset=1.4E-1
tplens_vmon=1.69671E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.51154E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03085E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=4.11453E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.77867E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34511E1
lens5b_imon=2.12511E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36926E0
os_ea2_imon=-4.21914E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02573E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.5279E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11388E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23133E2
cs_ionfoca_imon=6.26756E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.10382E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.33835E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.80732E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-2.17982E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.68399E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82752E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-8.31936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92692E3
multa_neg_imon=7.2999E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.26888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50075E3
multb_neg_imon=6.94661E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.4561E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65267E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30652E1
cs_fil1_imon=9.97285E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66148E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64633E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22532E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.41405E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92929E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.20446E-1	-7.99012E-1	-9.13198E0	-9.14364E0	3.91006E-3	9.63688E-2	2.7321E1	-3.26655E1	-3.26431E1	2.68406E1	2.23818E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41966E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.20541E-1	-7.99203E-1	-9.13193E0	-9.14385E0	4.05312E-3	9.61781E-2	2.73241E1	-3.26627E1	-3.26058E1	2.68172E1	2.24106E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.41876E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.20208E-1	-7.99274E-1	-9.13217E0	-9.14383E0	3.91006E-3	9.62734E-2	2.73455E1	-3.26624E1	-3.26311E1	2.68499E1	2.24161E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.20398E-1	-7.99012E-1	-9.13212E0	-9.14364E0	3.91006E-3	9.66072E-2	2.7287E1	-3.26535E1	-3.26379E1	2.6843E1	2.23414E-9	2.51679E-3	2.51679E-3	6.33863E-3	2.41734E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.2047E-1	-7.9906E-1	-9.13203E0	-9.14342E0	3.91006E-3	9.62019E-2	2.73482E1	-3.2629E1	-3.26425E1	2.68502E1	2.23715E-9	2.51971E-3	2.51971E-3	6.31858E-3	2.40732E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.20398E-1	-7.98965E-1	-9.13196E0	-9.14328E0	3.8147E-3	9.63449E-2	2.73449E1	-3.26829E1	-3.2626E1	2.68052E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.20351E-1	-7.99251E-1	-9.13172E0	-9.14345E0	4.02927E-3	9.65118E-2	2.73285E1	-3.26693E1	-3.265E1	2.68454E1	2.23041E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.20732E-1	-7.99179E-1	-9.13196E0	-9.14338E0	3.83854E-3	9.65118E-2	2.7347E1	-3.26927E1	-3.26018E1	2.68532E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41127E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.20756E-1	-7.99108E-1	-9.13179E0	-9.14297E0	4.12464E-3	9.62019E-2	2.7275E1	-3.26405E1	-3.26353E1	2.68105E1	2.23678E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.41405E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.20971E-1	-7.99155E-1	-9.13174E0	-9.14357E0	4.31538E-3	9.60112E-2	2.73611E1	-3.26354E1	-3.26484E1	2.68574E1	2.24106E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.41471E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.20494E-1	-7.9937E-1	-9.13179E0	-9.14369E0	4.1008E-3	9.62973E-2	2.72945E1	-3.26325E1	-3.26679E1	2.69271E1	2.23583E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.41817E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.20422E-1	-7.99251E-1	-9.13186E0	-9.14371E0	4.05312E-3	9.64403E-2	2.74313E1	-3.2757E1	-3.26148E1	2.6849E1	2.23964E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.41817E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.20637E-1	-7.99179E-1	-9.13179E0	-9.14338E0	4.05312E-3	9.65595E-2	2.73586E1	-3.26639E1	-3.26536E1	2.68209E1	2.23297E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.41611E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.2047E-1	-7.99489E-1	-9.13181E0	-9.14373E0	4.1008E-3	9.65595E-2	2.73333E1	-3.26849E1	-3.26122E1	2.6846E1	2.23915E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41756E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.20374E-1	-7.99084E-1	-9.13177E0	-9.14352E0	4.12464E-3	9.62019E-2	2.7311E1	-3.26673E1	-3.26472E1	2.68166E1	2.24304E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.2047E-1	-7.99227E-1	-9.13193E0	-9.14333E0	3.86238E-3	9.64165E-2	2.73216E1	-3.26891E1	-3.26325E1	2.68436E1	2.23773E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.40994E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.20541E-1	-7.98988E-1	-9.13217E0	-9.14357E0	4.14848E-3	9.62973E-2	2.72841E1	-3.26975E1	-3.2584E1	2.67986E1	2.24207E-9	2.51771E-3	2.51771E-3	6.26916E-3	2.41756E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.20494E-1	-7.98965E-1	-9.13198E0	-9.14361E0	4.17233E-3	9.62496E-2	2.73497E1	-3.26556E1	-3.26399E1	2.68348E1	2.24012E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.40708E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.20804E-1	-7.98583E-1	-9.132E0	-9.14366E0	4.29153E-3	9.65357E-2	2.73532E1	-3.26825E1	-3.26062E1	2.67481E1	2.23825E-9	2.52342E-3	2.52342E-3	6.33919E-3	2.41471E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.20494E-1	-7.98917E-1	-9.13179E0	-9.14361E0	4.3869E-3	9.63688E-2	2.73009E1	-3.26518E1	-3.26248E1	2.68262E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.41405E-2