[Scan]
initial_time=2016-01-15T20:57:09
final_time=2016-01-15T20:57:29
ip_count=19
run=1023
dataset=2
scan=87
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.20231E-1
ql1_imon=1.4013E-8
ql2_vset=
ql2_vmon=-7.99417E-1
ql2_imon=1.95385E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=1.36477E-9
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=-7.98106E-11
mult1=-8.89438E-9
mult2=-2.58078E-9
rf_tmon=-5.35769E-3
rf_agc=3.20959E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.68128E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69496E0
bslens_imon=2.55192E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=2.00854E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12541E2
lens4a_imon=2.04778E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53714E1
cs_ef1b_imon=2.86961E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04665E2
lens23_imon=1.0241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04266E1
cs_ea1_imon=2.54891E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36305E0
lens1_imon=2.54185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6519E1
os_ef1alow_imon=2.9639E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.54839E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84405E1
cs_ef1a_imon=2.93672E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.32129E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11543E1
os_restr1_imon=4.26278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14684E1
os_ea1_imon=2.35257E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63764E1
os_ef1bup_imon=3.04711E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23755E0
cs_ionrep_imon=1.19832E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93756E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=2.98101E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.33101E-8
tplens_vset=1.4E-1
tplens_vmon=1.69457E0
tplens_imon=-3.17744E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26078E1
iondef3_imon=1.50375E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.5749E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03079E2
lens6_imon=2.98067E-4
ql6_vset=1.0E-1
ql6_vmon=9.62973E-2
ql6_imon=4.18416E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23923E0
ionrepsh_imon=1.79172E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.17099E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7496E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37964E0
os_ea2_imon=-8.9839E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71431E1
cs_ef2a_imon=3.13838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06239E0
os_ef2alow_imon=-2.26768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.23051E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=3.45245E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.27747E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.23913E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09797E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68435E1
iondef4_imon=1.08788E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.32649E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.80925E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12567E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57037E1
einzel_imon=8.16766E-6
window_vset=0.0E0
window_vmon=2.92943E-1
window_imon=-9.59069E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86875E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=6.88495E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.85139E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44191E0
defgridb_imon=5.86463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.43796E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07357E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6495E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3067E1
cs_fil1_imon=9.95497E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62925E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66406E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91227E-2
os_fil2_imon=-2.77284E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38452E-1
cs_fil2_imon=-2.52119E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20332E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.41405E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.51297E-1
res40_imon=-2.50927E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=255
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.20374E-1	-7.98941E-1	-9.13169E0	-9.14364E0	4.19617E-3	9.59396E-2	2.73159E1	-3.26807E1	-3.26311E1	2.67808E1	2.23701E-9	2.52424E-3	2.52424E-3	6.31744E-3	2.41465E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.20541E-1	-7.98655E-1	-9.13153E0	-9.14354E0	4.17233E-3	9.61304E-2	2.73039E1	-3.26964E1	-3.25979E1	2.68013E1	2.23344E-9	2.51874E-3	2.51874E-3	6.3074E-3	2.39788E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.20565E-1	-7.98726E-1	-9.13174E0	-9.1434E0	4.33922E-3	9.59158E-2	2.7341E1	-3.26822E1	-3.26005E1	2.68325E1	2.23468E-9	2.52473E-3	2.52473E-3	6.32978E-3	2.39988E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.2047E-1	-7.98678E-1	-9.13155E0	-9.14354E0	4.24385E-3	9.63688E-2	2.73637E1	-3.26533E1	-3.26687E1	2.68267E1	2.23918E-9	2.52342E-3	2.52342E-3	6.32858E-3	2.41067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.20303E-1	-7.99227E-1	-9.1315E0	-9.14335E0	4.17233E-3	9.61304E-2	2.73369E1	-3.26681E1	-3.26218E1	2.68148E1	2.24058E-9	2.5199E-3	2.5199E-3	6.323E-3	2.40742E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.20136E-1	-7.99131E-1	-9.13172E0	-9.14323E0	4.00543E-3	9.62257E-2	2.73082E1	-3.26719E1	-3.26407E1	2.68244E1	2.24012E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.20184E-1	-7.99108E-1	-9.13165E0	-9.14357E0	4.05312E-3	9.63211E-2	2.7344E1	-3.26461E1	-3.26372E1	2.68286E1	2.24161E-9	2.52697E-3	2.52697E-3	6.31299E-3	2.41479E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.20112E-1	-7.99108E-1	-9.13177E0	-9.14364E0	3.93391E-3	9.62496E-2	2.73632E1	-3.26738E1	-3.26004E1	2.68535E1	2.23487E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.41405E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.20184E-1	-7.99155E-1	-9.13196E0	-9.14338E0	4.12464E-3	9.63449E-2	2.73081E1	-3.26482E1	-3.26164E1	2.68106E1	2.23825E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.41269E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.20637E-1	-7.99179E-1	-9.13193E0	-9.14376E0	3.91006E-3	9.60827E-2	2.73249E1	-3.26579E1	-3.25936E1	2.68623E1	2.23678E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.40788E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.20661E-1	-7.99346E-1	-9.13198E0	-9.14354E0	4.00543E-3	9.63449E-2	2.73123E1	-3.26464E1	-3.26338E1	2.68328E1	2.23429E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.20541E-1	-7.99155E-1	-9.13181E0	-9.14302E0	3.93391E-3	9.6488E-2	2.73045E1	-3.2596E1	-3.26194E1	2.68238E1	2.24207E-9	2.52757E-3	2.52757E-3	6.35692E-3	2.40708E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.20661E-1	-7.99251E-1	-9.13188E0	-9.14319E0	3.91006E-3	9.62496E-2	2.73285E1	-3.2638E1	-3.26188E1	2.68106E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.40499E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.20494E-1	-7.99465E-1	-9.13203E0	-9.14333E0	3.86238E-3	9.61781E-2	2.73345E1	-3.26831E1	-3.2602E1	2.68538E1	2.23623E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.40708E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.20565E-1	-7.99417E-1	-9.132E0	-9.14328E0	4.12464E-3	9.61304E-2	2.73706E1	-3.26862E1	-3.26502E1	2.68442E1	2.2372E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.41756E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.20589E-1	-7.99584E-1	-9.13193E0	-9.14311E0	3.98159E-3	9.6488E-2	2.73435E1	-3.26482E1	-3.26735E1	2.68534E1	2.23678E-9	2.51525E-3	2.51525E-3	6.33977E-3	2.40994E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.20637E-1	-7.99274E-1	-9.13191E0	-9.14311E0	3.88622E-3	9.64165E-2	2.73752E1	-3.26735E1	-3.26289E1	2.68448E1	2.23555E-9	2.52134E-3	2.52134E-3	6.3074E-3	2.41787E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.20756E-1	-7.99251E-1	-9.13205E0	-9.14323E0	3.95775E-3	9.62734E-2	2.73308E1	-3.26848E1	-3.26174E1	2.68304E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.20208E-1	-7.99489E-1	-9.13169E0	-9.14328E0	3.88622E-3	9.62496E-2	2.72892E1	-3.26697E1	-3.26296E1	2.69113E1	2.24109E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41546E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.20231E-1	-7.99417E-1	-9.13155E0	-9.14323E0	4.24385E-3	9.62973E-2	2.73057E1	-3.26431E1	-3.26078E1	2.68435E1	2.23964E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.41405E-2