[Scan]
initial_time=2016-01-15T20:58:03
final_time=2016-01-15T20:58:22
ip_count=19
run=1023
dataset=2
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.20255E-1
ql1_imon=1.39082E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=1.94007E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=9.85217E-10
ql4_vset=
ql4_vmon=-9.14347E0
ql4_imon=-3.03268E-11
mult1=-9.92918E-9
mult2=-2.64668E-9
rf_tmon=-5.36027E-3
rf_agc=3.23183E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.6814E-9
bslens_vset=-6.2E0
bslens_vmon=-6.651E0
bslens_imon=2.22287E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19981E1
lens5a_imon=2.00911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54104E1
cs_ef1b_imon=2.85228E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04033E1
cs_ea1_imon=2.57776E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36632E0
lens1_imon=2.60846E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.97316E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03628E1
cs_ea2_imon=1.51046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84506E1
cs_ef1a_imon=2.95333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.31887E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11498E1
os_restr1_imon=4.24676E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14788E1
os_ea1_imon=2.35165E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63498E1
os_ef1bup_imon=3.0802E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27331E0
cs_ionrep_imon=1.19862E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91993E2
cs_nozzle_imon=1.93285E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0232E1
cs_anode1_imon=2.9814E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.33559E-8
tplens_vset=1.4E-1
tplens_vmon=1.66826E0
tplens_imon=-3.63958E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26364E1
iondef3_imon=1.5026E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26958E1
iondef2_imon=1.56325E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.98016E-4
ql6_vset=1.0E-1
ql6_vmon=9.5892E-2
ql6_imon=4.12123E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30451E0
ionrepsh_imon=1.76166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33801E1
lens5b_imon=2.20752E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74451E1
cs_ef2b_imon=3.12212E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37065E0
os_ea2_imon=-8.84319E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71601E1
cs_ef2a_imon=3.17077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01277E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04493E-1
os_ef2bup_imon=-5.17915E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11173E1
os_restr2_imon=3.42789E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.28131E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0179E1
cs_anode2_imon=2.21716E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73792E1
iondef1_imon=1.09305E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68767E1
iondef4_imon=1.08877E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.33596E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.77311E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12141E0
cs_ionaccel_imon=-1.67984E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56898E1
einzel_imon=8.01719E-6
window_vset=0.0E0
window_vmon=2.81844E-1
window_imon=-8.90154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.866E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92541E3
multa_neg_imon=7.78961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.92484E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.36659E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24008E0
defgridb_imon=5.96274E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.39632E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07448E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64471E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30651E1
cs_fil1_imon=9.93463E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66851E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.81221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.85587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.24137E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22547E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.41471E-2
chamber_ion_pmon=2.23918E-9
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79345E-1
res40_imon=-2.3797E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.20136E-1	-7.99298E-1	-9.13196E0	-9.14326E0	3.45707E-3	9.58443E-2	2.73242E1	-3.26695E1	-3.26023E1	2.68285E1	2.23508E-9	2.51498E-3	2.51498E-3	6.30171E-3	2.4054E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.20088E-1	-7.99465E-1	-9.13196E0	-9.14328E0	3.86238E-3	9.61065E-2	2.73113E1	-3.2689E1	-3.26291E1	2.68338E1	2.24106E-9	2.51709E-3	2.51709E-3	6.29157E-3	2.41876E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.19945E-1	-7.99251E-1	-9.13203E0	-9.14364E0	4.17233E-3	9.61304E-2	2.73199E1	-3.26816E1	-3.26332E1	2.68043E1	2.23105E-9	2.52066E-3	2.52066E-3	6.30171E-3	2.40757E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.19898E-1	-7.99346E-1	-9.13205E0	-9.14364E0	4.12464E-3	9.63449E-2	2.73577E1	-3.26377E1	-3.26429E1	2.68282E1	2.23168E-9	2.51423E-3	2.51423E-3	6.32247E-3	2.41273E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.1985E-1	-7.99322E-1	-9.132E0	-9.14347E0	4.43459E-3	9.6488E-2	2.73051E1	-3.26543E1	-3.26018E1	2.68484E1	2.23697E-9	2.52147E-3	2.52147E-3	6.31332E-3	2.41261E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.20184E-1	-7.99227E-1	-9.13198E0	-9.14342E0	4.17233E-3	9.61065E-2	2.73626E1	-3.26419E1	-3.26297E1	2.68196E1	2.23964E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.42024E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.20065E-1	-7.9906E-1	-9.1321E0	-9.14357E0	4.19617E-3	9.62734E-2	2.73255E1	-3.26573E1	-3.26248E1	2.68238E1	2.24359E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.41265E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.19969E-1	-7.99155E-1	-9.13196E0	-9.14342E0	4.22001E-3	9.61304E-2	2.73488E1	-3.26714E1	-3.26384E1	2.68394E1	2.23429E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.41756E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.19516E-1	-7.99203E-1	-9.13191E0	-9.1433E0	3.91006E-3	9.61065E-2	2.73009E1	-3.26837E1	-3.2647E1	2.68532E1	2.23583E-9	2.51847E-3	2.51847E-3	6.37774E-3	2.41199E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.19731E-1	-7.99227E-1	-9.13169E0	-9.1434E0	4.07696E-3	9.63688E-2	2.73394E1	-3.26884E1	-3.26236E1	2.68346E1	2.24207E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.41756E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.19969E-1	-7.99203E-1	-9.13181E0	-9.14345E0	4.12464E-3	9.59873E-2	2.73393E1	-3.26738E1	-3.26396E1	2.68671E1	2.23665E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.40839E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.19612E-1	-7.99036E-1	-9.13177E0	-9.14338E0	3.91006E-3	9.65595E-2	2.73448E1	-3.26651E1	-3.26008E1	2.68623E1	2.23773E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.40994E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.19898E-1	-7.99155E-1	-9.13174E0	-9.14326E0	4.19617E-3	9.64403E-2	2.73165E1	-3.26215E1	-3.26636E1	2.68192E1	2.24012E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.40082E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.20255E-1	-7.99084E-1	-9.13165E0	-9.14352E0	3.93391E-3	9.61542E-2	2.73223E1	-3.26674E1	-3.26146E1	2.68525E1	2.24335E-9	2.5199E-3	2.5199E-3	6.3126E-3	2.41734E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.19993E-1	-7.99322E-1	-9.13155E0	-9.14366E0	4.00543E-3	9.61304E-2	2.73339E1	-3.2635E1	-3.26476E1	2.68286E1	2.23858E-9	2.51874E-3	2.51874E-3	6.31321E-3	2.41337E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.19993E-1	-7.99274E-1	-9.13172E0	-9.14361E0	4.02927E-3	9.61781E-2	2.72992E1	-3.26561E1	-3.26319E1	2.68214E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.41756E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.19945E-1	-7.99131E-1	-9.13186E0	-9.1435E0	3.86238E-3	9.61304E-2	2.73183E1	-3.26609E1	-3.26368E1	2.68514E1	2.23392E-9	2.51096E-3	2.51096E-3	6.28056E-3	2.40788E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.20184E-1	-7.98845E-1	-9.13181E0	-9.14371E0	3.83854E-3	9.62019E-2	2.73263E1	-3.26461E1	-3.26119E1	2.68285E1	2.24694E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.40708E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.20112E-1	-7.98845E-1	-9.13208E0	-9.14338E0	4.1008E-3	9.61065E-2	2.733E1	-3.2659E1	-3.26335E1	2.68626E1	2.23964E-9	2.51525E-3	2.51525E-3	6.28056E-3	2.40994E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.20255E-1	-7.99155E-1	-9.13169E0	-9.14347E0	4.43459E-3	9.5892E-2	2.73792E1	-3.26958E1	-3.26364E1	2.68767E1	2.23918E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.41471E-2