[Scan]
initial_time=2016-01-15T20:59:23
final_time=2016-01-15T20:59:42
ip_count=19
run=1023
dataset=2
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.19325E-1
ql1_imon=1.38329E-8
ql2_vset=
ql2_vmon=-7.99274E-1
ql2_imon=1.97842E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=7.76136E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=-6.69956E-12
mult1=-9.27081E-9
mult2=-2.70065E-9
rf_tmon=-8.57401E-3
rf_agc=3.02213E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.70612E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.34308E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19574E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12555E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=2.85656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04591E1
cs_ea1_imon=2.59087E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36235E0
lens1_imon=2.57741E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.51731E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84676E1
cs_ef1a_imon=2.9445E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.30588E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.25346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.36772E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.022E1
cs_anode1_imon=2.96612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.3269E-8
tplens_vset=1.4E-1
tplens_vmon=1.65105E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.55769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03056E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.10187E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=1.78588E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.15971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37226E0
os_ea2_imon=-8.11249E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.14091E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.27713E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.28162E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.26119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.10779E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68593E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.39626E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.74798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-1.66806E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.78009E-1
window_imon=-6.6255E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.36118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.77718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.18454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.4421E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64468E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30595E1
cs_fil1_imon=9.97008E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62252E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90604E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.98146E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.87502E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.41546E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.80315E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.19516E-1	-7.99179E-1	-9.13181E0	-9.14354E0	4.07696E-3	9.60588E-2	2.73128E1	-3.26461E1	-3.26567E1	2.68458E1	2.24499E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.40291E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.19659E-1	-7.99179E-1	-9.1321E0	-9.14335E0	4.55379E-3	9.58443E-2	2.73652E1	-3.26945E1	-3.26134E1	2.6825E1	2.23825E-9	2.52025E-3	2.52025E-3	6.3445E-3	2.40865E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.19564E-1	-7.99155E-1	-9.13208E0	-9.14345E0	4.26769E-3	9.63449E-2	2.73352E1	-3.26649E1	-3.26366E1	2.68036E1	2.2426E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19826E-1	-7.99036E-1	-9.13217E0	-9.14376E0	4.36306E-3	9.61304E-2	2.7349E1	-3.26398E1	-3.26446E1	2.68286E1	2.23825E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.41876E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.19874E-1	-7.98869E-1	-9.13174E0	-9.1433E0	4.36306E-3	9.62734E-2	2.73063E1	-3.26266E1	-3.26248E1	2.68887E1	2.23566E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.41052E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.19731E-1	-7.99036E-1	-9.13188E0	-9.14364E0	4.64916E-3	9.58681E-2	2.73363E1	-3.26362E1	-3.26164E1	2.68671E1	2.2406E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.41199E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.1985E-1	-7.99298E-1	-9.13196E0	-9.14373E0	4.26769E-3	9.59158E-2	2.73508E1	-3.26152E1	-3.26759E1	2.68388E1	2.24012E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.41966E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.19635E-1	-7.99346E-1	-9.13196E0	-9.14319E0	4.07696E-3	9.62257E-2	2.73243E1	-3.26464E1	-3.26152E1	2.68481E1	2.24359E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.41052E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.19564E-1	-7.99179E-1	-9.13174E0	-9.14338E0	4.29153E-3	9.63688E-2	2.73181E1	-3.26638E1	-3.25953E1	2.68354E1	2.23623E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.41756E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.19564E-1	-7.98798E-1	-9.13188E0	-9.14319E0	3.98159E-3	9.62734E-2	2.73124E1	-3.26462E1	-3.26211E1	2.67944E1	2.23297E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.41817E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.19659E-1	-7.98821E-1	-9.13215E0	-9.14338E0	4.12464E-3	9.61781E-2	2.72921E1	-3.2649E1	-3.26154E1	2.67842E1	2.23369E-9	2.51581E-3	2.51581E-3	6.3074E-3	2.41052E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1985E-1	-7.98869E-1	-9.13181E0	-9.14357E0	4.33922E-3	9.59873E-2	2.73328E1	-3.26272E1	-3.26307E1	2.68605E1	2.23297E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41611E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.19397E-1	-7.99012E-1	-9.13165E0	-9.14319E0	4.22001E-3	9.63688E-2	2.73443E1	-3.26758E1	-3.2659E1	2.68687E1	2.24347E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.40788E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.19612E-1	-7.99227E-1	-9.13174E0	-9.14311E0	3.86238E-3	9.62734E-2	2.73248E1	-3.26674E1	-3.2612E1	2.68341E1	2.23345E-9	2.51623E-3	2.51623E-3	6.3074E-3	2.41465E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.1954E-1	-7.99227E-1	-9.13198E0	-9.14347E0	4.07696E-3	9.63926E-2	2.73291E1	-3.26609E1	-3.26338E1	2.68496E1	2.23697E-9	2.51911E-3	2.51911E-3	6.31332E-3	2.41035E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19516E-1	-7.99322E-1	-9.13177E0	-9.14352E0	3.93391E-3	9.62019E-2	2.73484E1	-3.26753E1	-3.26512E1	2.68058E1	2.23818E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.42598E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09657E0	-8.19445E-1	-7.9937E-1	-9.13179E0	-9.14338E0	4.00543E-3	9.58204E-2	2.73357E1	-3.265E1	-3.25755E1	2.68406E1	2.2372E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.41127E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.19421E-1	-7.99036E-1	-9.13172E0	-9.1433E0	4.14848E-3	9.59396E-2	2.73291E1	-3.26699E1	-3.26434E1	2.68472E1	2.2372E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41546E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.19445E-1	-7.99465E-1	-9.13219E0	-9.14345E0	4.14848E-3	9.62734E-2	2.7367E1	-3.2675E1	-3.26113E1	2.68198E1	2.23297E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.42644E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.19325E-1	-7.99274E-1	-9.13224E0	-9.14328E0	4.22001E-3	9.62496E-2	2.73027E1	-3.26711E1	-3.26332E1	2.68593E1	2.24109E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.41546E-2