[Scan]
initial_time=2016-01-15T20:59:50
final_time=2016-01-15T21:00:09
ip_count=19
run=1023
dataset=2
scan=93
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08731E-4
ql1_vset=
ql1_vmon=-8.19516E-1
ql1_imon=1.38328E-8
ql2_vset=
ql2_vmon=-7.99489E-1
ql2_imon=1.95724E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=7.26199E-10
ql4_vset=
ql4_vmon=-9.14338E0
ql4_imon=4.05312E-12
mult1=-9.64723E-9
mult2=-2.72449E-9
rf_tmon=-2.22138E-3
rf_agc=3.39572E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.71105E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65282E0
bslens_imon=2.20595E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=2.00803E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04839E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.86556E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.01969E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04767E1
cs_ea1_imon=2.58658E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3226E0
lens1_imon=2.75881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64738E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03418E1
cs_ea2_imon=1.5054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8477E1
cs_ef1a_imon=2.92978E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.31252E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11869E1
os_restr1_imon=4.25471E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15073E1
os_ea1_imon=2.36972E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6372E1
os_ef1bup_imon=3.07535E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22095E0
cs_ionrep_imon=1.17213E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93229E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02224E1
cs_anode1_imon=2.97532E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.34129E-8
tplens_vset=1.4E-1
tplens_vmon=1.69854E0
tplens_imon=-4.29845E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26391E1
iondef3_imon=1.53226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26824E1
iondef2_imon=1.56925E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98038E-4
ql6_vset=1.0E-1
ql6_vmon=9.59396E-2
ql6_imon=4.12833E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29168E0
ionrepsh_imon=1.76353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33561E1
lens5b_imon=2.15909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74767E1
cs_ef2b_imon=3.11933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37214E0
os_ea2_imon=-5.58326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00381E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7129E1
cs_ef2a_imon=3.16799E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01045E0
os_ef2alow_imon=-2.41653E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20561E-1
os_ef2bup_imon=-5.3552E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11513E1
os_restr2_imon=3.44551E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.2732E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01672E1
cs_anode2_imon=2.23189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73022E1
iondef1_imon=1.12074E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68501E1
iondef4_imon=1.08406E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.38749E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.79397E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15025E0
cs_ionaccel_imon=-1.75873E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47347E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56762E1
einzel_imon=7.86299E-6
window_vset=0.0E0
window_vmon=2.49009E-1
window_imon=-8.40153E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.86376E1
mask2_imon=-7.23385E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.40747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.58208E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.83125E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48144E0
defgridb_imon=6.06426E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.41246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07199E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30608E1
cs_fil1_imon=9.95673E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62326E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66233E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10776E-2
os_fil2_imon=-2.56145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97306E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83653E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37343E-1
cs_fil2_imon=-2.3344E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05372E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.39764E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.75151E-1
res40_imon=-2.49827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.20017E-1	-7.9937E-1	-9.13246E0	-9.14309E0	4.41074E-3	9.63449E-2	2.72883E1	-3.26536E1	-3.26434E1	2.68538E1	2.23487E-9	2.51793E-3	2.51793E-3	6.32518E-3	2.41035E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.19802E-1	-7.98988E-1	-9.13231E0	-9.14326E0	4.33922E-3	9.61781E-2	2.73198E1	-3.26321E1	-3.26156E1	2.68038E1	2.24207E-9	2.5199E-3	2.5199E-3	6.35692E-3	2.42809E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.20041E-1	-7.99251E-1	-9.132E0	-9.14316E0	4.43459E-3	9.63211E-2	2.73115E1	-3.26642E1	-3.26133E1	2.68667E1	2.24757E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.19921E-1	-7.99394E-1	-9.13184E0	-9.14357E0	4.05312E-3	9.62257E-2	2.73345E1	-3.26633E1	-3.2599E1	2.6849E1	2.24294E-9	2.51709E-3	2.51709E-3	6.3445E-3	2.40865E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.20017E-1	-7.98917E-1	-9.13196E0	-9.14357E0	4.29153E-3	9.62734E-2	2.73277E1	-3.2708E1	-3.26107E1	2.68466E1	2.23915E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.19993E-1	-7.98845E-1	-9.13181E0	-9.14361E0	4.33922E-3	9.58204E-2	2.73435E1	-3.26819E1	-3.26128E1	2.6852E1	2.23332E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41546E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.19945E-1	-7.9906E-1	-9.13184E0	-9.1434E0	4.72069E-3	9.60588E-2	2.73299E1	-3.26372E1	-3.26378E1	2.68106E1	2.23526E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.40708E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.19683E-1	-7.98965E-1	-9.13212E0	-9.14371E0	4.41074E-3	9.62496E-2	2.73259E1	-3.26615E1	-3.26738E1	2.68232E1	2.24109E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.41756E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.19612E-1	-7.99084E-1	-9.13215E0	-9.14373E0	4.62532E-3	9.62257E-2	2.73057E1	-3.26602E1	-3.26207E1	2.68435E1	2.24499E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.41337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.19635E-1	-7.98917E-1	-9.13229E0	-9.14352E0	4.43459E-3	9.61304E-2	2.73478E1	-3.26663E1	-3.25641E1	2.6852E1	2.24634E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.4223E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.19826E-1	-7.9906E-1	-9.13229E0	-9.14364E0	4.05312E-3	9.62019E-2	2.73604E1	-3.26867E1	-3.26302E1	2.68665E1	2.24359E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.4255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.19755E-1	-7.99179E-1	-9.132E0	-9.1434E0	4.24385E-3	9.61781E-2	2.73334E1	-3.26909E1	-3.26207E1	2.68304E1	2.23964E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.40994E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.19373E-1	-7.99394E-1	-9.13236E0	-9.14333E0	4.17233E-3	9.61542E-2	2.72991E1	-3.26603E1	-3.26302E1	2.68274E1	2.23332E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.41966E-2
1.7E1	1.0E0	1.0E0	6.87E2	4.7E2	-2.0948E0	-8.19302E-1	-7.99298E-1	-9.132E0	-9.14311E0	4.41074E-3	9.62973E-2	2.73261E1	-3.26332E1	-3.26434E1	2.68731E1	2.23678E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.41611E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.19683E-1	-7.99227E-1	-9.13196E0	-9.1433E0	4.31538E-3	9.62734E-2	2.73177E1	-3.26248E1	-3.2596E1	2.68869E1	2.23623E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.40708E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.19564E-1	-7.99322E-1	-9.1326E0	-9.14352E0	4.41074E-3	9.62734E-2	2.73788E1	-3.26461E1	-3.25971E1	2.6846E1	2.24109E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40708E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.19898E-1	-7.99203E-1	-9.13203E0	-9.1434E0	4.36306E-3	9.60588E-2	2.73405E1	-3.26903E1	-3.2599E1	2.67962E1	2.24207E-9	2.51007E-3	2.51007E-3	6.32386E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1954E-1	-7.99251E-1	-9.13241E0	-9.14335E0	4.3869E-3	9.59635E-2	2.73369E1	-3.26621E1	-3.26236E1	2.6818E1	2.2372E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.41127E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.19278E-1	-7.99394E-1	-9.1325E0	-9.1434E0	4.19617E-3	9.60588E-2	2.73623E1	-3.26868E1	-3.25841E1	2.68118E1	2.24155E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.40788E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.19516E-1	-7.99489E-1	-9.13234E0	-9.14338E0	4.24385E-3	9.59396E-2	2.73022E1	-3.26824E1	-3.26391E1	2.68501E1	2.23869E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.39764E-2