[Scan]
initial_time=2016-01-15T21:00:16
final_time=2016-01-15T21:00:36
ip_count=19
run=1023
dataset=2
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.19612E-1
ql1_imon=1.37969E-8
ql2_vset=
ql2_vmon=-7.99298E-1
ql2_imon=2.0008E-9
ql3_vset=
ql3_vmon=-9.13227E0
ql3_imon=6.04808E-10
ql4_vset=
ql4_vmon=-9.14352E0
ql4_imon=4.42266E-12
mult1=-9.70427E-9
mult2=-2.68245E-9
rf_tmon=-5.36171E-3
rf_agc=3.20259E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.70069E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1955E1
lens5a_imon=2.00218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.83926E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04153E1
cs_ea1_imon=2.56563E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32509E0
lens1_imon=2.92709E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.51911E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84803E1
cs_ef1a_imon=2.96864E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.3172E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.25742E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14933E1
os_ea1_imon=2.36916E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.06847E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=1.20873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.96792E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.32718E-8
tplens_vset=1.4E-1
tplens_vmon=1.6871E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26063E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.55408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0307E2
lens6_imon=2.97884E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=4.1528E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.78949E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43835E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90216E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.43356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7335E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.39402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.79042E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16618E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02144E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.4716E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82737E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.00789E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.08503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.41423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64843E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30613E1
cs_fil1_imon=9.95531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66586E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29211E-3
inlet_lpb_pmon=2.41207E-2
chamber_ion_pmon=2.24103E-9
chamber_cvt_pmon=2.52772E-3
foreline_cvt_pmon=2.52772E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.23252E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.19874E-1	-7.99084E-1	-9.13191E0	-9.14359E0	4.24385E-3	9.63211E-2	2.73222E1	-3.26178E1	-3.26738E1	2.68502E1	2.2372E-9	2.52757E-3	2.52757E-3	6.34037E-3	2.40918E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.19612E-1	-7.99251E-1	-9.13205E0	-9.14321E0	4.26769E-3	9.63449E-2	2.73594E1	-3.26248E1	-3.2606E1	2.68478E1	2.23964E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.40583E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.19731E-1	-7.9906E-1	-9.13222E0	-9.14342E0	4.36306E-3	9.61304E-2	2.73358E1	-3.26845E1	-3.25947E1	2.68545E1	2.24161E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.42121E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.19755E-1	-7.99441E-1	-9.1321E0	-9.14323E0	4.24385E-3	9.60588E-2	2.73267E1	-3.2626E1	-3.26134E1	2.68783E1	2.23583E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.19588E-1	-7.99394E-1	-9.13217E0	-9.14326E0	4.55379E-3	9.61065E-2	2.73303E1	-3.26362E1	-3.26488E1	2.68052E1	2.23869E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.40788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.19612E-1	-7.9937E-1	-9.13205E0	-9.14326E0	4.33922E-3	9.60588E-2	2.73476E1	-3.26691E1	-3.26119E1	2.68593E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.40708E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.19588E-1	-7.99274E-1	-9.13258E0	-9.14347E0	4.41074E-3	9.58681E-2	2.73009E1	-3.26428E1	-3.26458E1	2.68274E1	2.24207E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.41756E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.19802E-1	-7.99012E-1	-9.13253E0	-9.14316E0	4.3869E-3	9.5892E-2	2.73111E1	-3.25888E1	-3.2593E1	2.68316E1	2.24402E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.40918E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.19802E-1	-7.99179E-1	-9.13248E0	-9.14323E0	4.3869E-3	9.62496E-2	2.73269E1	-3.26579E1	-3.26567E1	2.68779E1	2.23583E-9	2.52384E-3	2.52384E-3	6.28592E-3	2.40583E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.19516E-1	-7.98988E-1	-9.132E0	-9.14333E0	4.45843E-3	9.63688E-2	2.73171E1	-3.26609E1	-3.2632E1	2.68522E1	2.23818E-9	2.52209E-3	2.52209E-3	6.3514E-3	2.41966E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.19778E-1	-7.9906E-1	-9.13196E0	-9.14345E0	4.36306E-3	9.62496E-2	2.73299E1	-3.26561E1	-3.26496E1	2.68611E1	2.24347E-9	2.52492E-3	2.52492E-3	6.34518E-3	2.4223E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.19445E-1	-7.99131E-1	-9.13241E0	-9.14347E0	4.31538E-3	9.61542E-2	2.73315E1	-3.27017E1	-3.26146E1	2.68887E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41966E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1954E-1	-7.99346E-1	-9.13241E0	-9.14371E0	4.02927E-3	9.61065E-2	2.73118E1	-3.26768E1	-3.26609E1	2.68376E1	2.23623E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.41127E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.19445E-1	-7.9906E-1	-9.13215E0	-9.14376E0	4.3869E-3	9.62734E-2	2.73293E1	-3.26744E1	-3.26195E1	2.68484E1	2.23332E-9	2.52209E-3	2.52209E-3	6.28006E-3	2.41127E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.19826E-1	-7.99441E-1	-9.13222E0	-9.14371E0	4.33922E-3	9.65118E-2	2.73273E1	-3.26134E1	-3.26488E1	2.68202E1	2.23869E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.41199E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.19898E-1	-7.98917E-1	-9.13203E0	-9.1433E0	4.14848E-3	9.62496E-2	2.73472E1	-3.26765E1	-3.26272E1	2.68298E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41127E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.19755E-1	-7.99108E-1	-9.13198E0	-9.14354E0	4.19617E-3	9.62019E-2	2.73252E1	-3.26561E1	-3.26101E1	2.68442E1	2.24304E-9	2.51225E-3	2.51225E-3	6.34588E-3	2.41966E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.19755E-1	-7.99036E-1	-9.13205E0	-9.1433E0	4.24385E-3	9.63688E-2	2.72967E1	-3.2635E1	-3.25846E1	2.68388E1	2.23623E-9	2.50789E-3	2.50789E-3	6.31288E-3	2.40708E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.19707E-1	-7.98941E-1	-9.13215E0	-9.14335E0	4.45843E-3	9.62019E-2	2.73489E1	-3.26949E1	-3.26283E1	2.68289E1	2.24304E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.40918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.19612E-1	-7.99298E-1	-9.13227E0	-9.14352E0	4.57764E-3	9.62019E-2	2.7335E1	-3.26655E1	-3.26063E1	2.684E1	2.24103E-9	2.52772E-3	2.52772E-3	6.29211E-3	2.41207E-2