[Scan]
initial_time=2016-01-15T21:00:43
final_time=2016-01-15T21:01:02
ip_count=19
run=1023
dataset=2
scan=95
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.19874E-1
ql1_imon=1.3798E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=1.99251E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=5.8521E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=9.52482E-12
mult1=-9.67331E-9
mult2=-2.63755E-9
rf_tmon=-4.76072E-3
rf_agc=3.19149E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.69632E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.96669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04665E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=2.85332E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04702E2
lens23_imon=1.02549E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=2.55883E-5
lens1_vset=-5.0E0
lens1_vmon=-5.26815E0
lens1_imon=2.75916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04251E1
cs_ea2_imon=1.5501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.30941E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.327E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16361E0
cs_ionrep_imon=1.18271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92023E2
cs_nozzle_imon=1.93732E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.96828E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.33755E-8
tplens_vset=1.4E-1
tplens_vmon=1.69865E0
tplens_imon=-4.08609E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26088E1
iondef3_imon=1.47047E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2681E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03064E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=4.14188E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2285E0
ionrepsh_imon=1.75008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.10776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45148E0
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00216E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71882E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=3.43788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.32477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68487E1
iondef4_imon=1.11188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.39836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.77831E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-6.37322E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82685E2
mask1_imon=2.38958E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.97271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.26672E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.03645E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.44096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64711E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30599E1
cs_fil1_imon=9.97687E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97865E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22415E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29738E-3
inlet_lpb_pmon=2.41081E-2
chamber_ion_pmon=2.24057E-9
chamber_cvt_pmon=2.51723E-3
foreline_cvt_pmon=2.51723E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.59292E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.19206E-1	-7.99012E-1	-9.132E0	-9.14354E0	4.55379E-3	9.61304E-2	2.73115E1	-3.26469E1	-3.26532E1	2.67931E1	2.24634E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.41405E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.19349E-1	-7.99155E-1	-9.13224E0	-9.14352E0	4.26769E-3	9.63449E-2	2.72614E1	-3.26778E1	-3.26454E1	2.68506E1	2.24825E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.41611E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1954E-1	-7.99131E-1	-9.13222E0	-9.14335E0	4.29153E-3	9.58681E-2	2.7334E1	-3.26885E1	-3.26301E1	2.67821E1	2.23963E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.41693E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.19445E-1	-7.99108E-1	-9.13227E0	-9.14328E0	4.43459E-3	9.62734E-2	2.7301E1	-3.26673E1	-3.26124E1	2.68442E1	2.24347E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.41405E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.1923E-1	-7.99012E-1	-9.13243E0	-9.14333E0	4.36306E-3	9.62019E-2	2.73592E1	-3.26627E1	-3.26284E1	2.67992E1	2.24347E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.41405E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.19468E-1	-7.99108E-1	-9.13203E0	-9.14359E0	4.12464E-3	9.59873E-2	2.73712E1	-3.26661E1	-3.26054E1	2.67982E1	2.23526E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.40708E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1954E-1	-7.99012E-1	-9.132E0	-9.14335E0	4.36306E-3	9.62257E-2	2.72504E1	-3.2641E1	-3.26536E1	2.68165E1	2.23623E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.1954E-1	-7.99036E-1	-9.13231E0	-9.14307E0	4.41074E-3	9.61065E-2	2.72915E1	-3.2711E1	-3.26272E1	2.68304E1	2.23487E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.41817E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.19802E-1	-7.98869E-1	-9.13219E0	-9.14321E0	4.33922E-3	9.62257E-2	2.73165E1	-3.26738E1	-3.26567E1	2.68372E1	2.24109E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.41966E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.19588E-1	-7.98965E-1	-9.13193E0	-9.14333E0	4.17233E-3	9.62734E-2	2.73132E1	-3.26778E1	-3.26223E1	2.68262E1	2.23964E-9	2.51525E-3	2.51525E-3	6.31009E-3	2.41302E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.19778E-1	-7.99012E-1	-9.13191E0	-9.14338E0	4.14848E-3	9.62496E-2	2.73538E1	-3.26116E1	-3.26272E1	2.68304E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.19921E-1	-7.99227E-1	-9.13205E0	-9.1434E0	4.14848E-3	9.61065E-2	2.73039E1	-3.26661E1	-3.26366E1	2.6825E1	2.23526E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.40708E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.19898E-1	-7.99417E-1	-9.13231E0	-9.1435E0	4.48227E-3	9.63449E-2	2.73729E1	-3.26573E1	-3.26172E1	2.68587E1	2.23818E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.41127E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.19874E-1	-7.99322E-1	-9.13224E0	-9.14321E0	4.43459E-3	9.62019E-2	2.73296E1	-3.26413E1	-3.26352E1	2.68124E1	2.23583E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.41405E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.19755E-1	-7.99417E-1	-9.13196E0	-9.1434E0	4.36306E-3	9.59873E-2	2.73381E1	-3.27092E1	-3.26172E1	2.68472E1	2.23332E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.19898E-1	-7.99346E-1	-9.13205E0	-9.14311E0	4.31538E-3	9.63688E-2	2.73558E1	-3.26624E1	-3.26306E1	2.67992E1	2.2406E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.41611E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.19802E-1	-7.99346E-1	-9.13172E0	-9.14311E0	4.31538E-3	9.63688E-2	2.72866E1	-3.26833E1	-3.26578E1	2.68793E1	2.23874E-9	2.5199E-3	2.5199E-3	6.323E-3	2.41138E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.19492E-1	-7.9937E-1	-9.13181E0	-9.14304E0	4.33922E-3	9.62734E-2	2.73659E1	-3.26797E1	-3.26278E1	2.6849E1	2.23961E-9	2.51874E-3	2.51874E-3	6.31321E-3	2.41559E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.19588E-1	-7.9937E-1	-9.13222E0	-9.14307E0	4.05312E-3	9.61542E-2	2.73478E1	-3.26736E1	-3.26174E1	2.68541E1	2.23964E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.42437E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.19874E-1	-7.99155E-1	-9.132E0	-9.14314E0	3.95775E-3	9.63449E-2	2.7321E1	-3.2681E1	-3.26088E1	2.68487E1	2.24057E-9	2.51723E-3	2.51723E-3	6.29738E-3	2.41081E-2