[Scan]
initial_time=2016-01-15T21:01:10
final_time=2016-01-15T21:01:29
ip_count=19
run=1023
dataset=2
scan=96
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.19588E-1
ql1_imon=1.38083E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.9816E-9
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=5.62525E-10
ql4_vset=
ql4_vmon=-9.14378E0
ql4_imon=2.74897E-11
mult1=-1.02796E-8
mult2=-2.64094E-9
rf_tmon=-5.03449E-3
rf_agc=3.27487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.73043E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63917E0
bslens_imon=2.48177E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20063E1
lens5a_imon=1.99179E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04726E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53948E1
cs_ef1b_imon=2.85864E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04893E1
cs_ea1_imon=2.57541E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35347E0
lens1_imon=2.53139E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64746E1
os_ef1alow_imon=2.98514E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03748E1
cs_ea2_imon=1.51313E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=2.93761E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.31104E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.2797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14924E1
os_ea1_imon=2.3628E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21647E0
cs_ionrep_imon=1.19938E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01884E1
cs_anode1_imon=2.97129E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.31948E-8
tplens_vset=1.4E-1
tplens_vmon=1.64207E0
tplens_imon=-3.23732E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26673E1
iondef3_imon=1.50054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.55817E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03068E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.12405E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3049E0
ionrepsh_imon=1.762E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33531E1
lens5b_imon=2.16775E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74445E1
cs_ef2b_imon=3.1442E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37361E0
os_ea2_imon=-5.5657E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06166E2
lens4b_imon=2.00627E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71389E1
cs_ef2a_imon=3.1457E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08949E0
os_ef2alow_imon=-2.57057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6083E-1
os_ef2bup_imon=-5.46733E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11423E1
os_restr2_imon=3.4204E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30386E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01628E1
cs_anode2_imon=2.24486E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73511E1
iondef1_imon=1.10853E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.0869E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.36535E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.76296E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13451E0
cs_ionaccel_imon=-1.71352E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56499E1
einzel_imon=7.69907E-6
window_vset=0.0E0
window_vmon=2.47537E-1
window_imon=-6.76827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.39065E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.98233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92696E3
multa_neg_imon=7.76833E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.08127E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3377E0
defgridb_imon=5.98578E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.39152E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07547E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30606E1
cs_fil1_imon=9.95877E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61948E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65759E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08509E-2
os_fil2_imon=-2.74983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.04379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36509E-1
cs_fil2_imon=-2.50032E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22541E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.41127E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37979E-1
res40_imon=-2.46578E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.1954E-1	-7.99465E-1	-9.13212E0	-9.14307E0	3.91006E-3	9.62019E-2	2.7347E1	-3.27039E1	-3.26868E1	2.68328E1					
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.19182E-1	-7.99179E-1	-9.13184E0	-9.14323E0	3.88622E-3	9.64403E-2	2.73544E1	-3.26711E1	-3.26308E1	2.6783E1	2.24251E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.40788E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.19349E-1	-7.99179E-1	-9.13217E0	-9.14297E0	4.14848E-3	9.60588E-2	2.7391E1	-3.26176E1	-3.26086E1	2.68334E1	2.24597E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.19659E-1	-7.99227E-1	-9.13227E0	-9.14335E0	4.14848E-3	9.61781E-2	2.73611E1	-3.26874E1	-3.26154E1	2.68563E1	2.24499E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.41546E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.1923E-1	-7.99441E-1	-9.13203E0	-9.14299E0	4.41074E-3	9.62019E-2	2.73069E1	-3.26337E1	-3.25936E1	2.68262E1	2.23773E-9	2.51525E-3	2.51525E-3	6.34518E-3	2.40994E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.1923E-1	-7.99441E-1	-9.13184E0	-9.14376E0	4.05312E-3	9.62019E-2	2.72696E1	-3.26476E1	-3.26422E1	2.68328E1	2.23603E-9	2.52189E-3	2.52189E-3	6.33188E-3	2.41787E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.19182E-1	-7.99227E-1	-9.13191E0	-9.14335E0	4.12464E-3	9.62973E-2	2.73352E1	-3.26133E1	-3.2648E1	2.68314E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.19349E-1	-7.98917E-1	-9.13205E0	-9.14326E0	4.31538E-3	9.61065E-2	2.73394E1	-3.26505E1	-3.2607E1	2.68094E1	2.24442E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.41611E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.19302E-1	-7.99131E-1	-9.13203E0	-9.14288E0	4.43459E-3	9.65357E-2	2.73131E1	-3.26812E1	-3.26141E1	2.68406E1	2.24207E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.40918E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.19445E-1	-7.98869E-1	-9.13203E0	-9.14328E0	4.3869E-3	9.63211E-2	2.73433E1	-3.26794E1	-3.26152E1	2.68063E1	2.23918E-9	2.52131E-3	2.52131E-3	6.33919E-3	2.42079E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.20112E-1	-7.98917E-1	-9.13203E0	-9.14323E0	4.41074E-3	9.63211E-2	2.72833E1	-3.26708E1	-3.26425E1	2.68052E1	2.23608E-9	2.52863E-3	2.52863E-3	6.29035E-3	2.41845E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.19445E-1	-7.99012E-1	-9.13191E0	-9.14338E0	4.24385E-3	9.60827E-2	2.7346E1	-3.26597E1	-3.26278E1	2.68472E1	2.23818E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.41337E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1954E-1	-7.98655E-1	-9.13196E0	-9.14359E0	4.22001E-3	9.62257E-2	2.73784E1	-3.26476E1	-3.26362E1	2.68226E1	2.24109E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.41756E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.19468E-1	-7.98798E-1	-9.13181E0	-9.1435E0	4.12464E-3	9.62019E-2	2.73399E1	-3.2672E1	-3.26596E1	2.68505E1	2.23964E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.41405E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.19182E-1	-7.98917E-1	-9.13177E0	-9.14361E0	4.1008E-3	9.63688E-2	2.733E1	-3.26399E1	-3.26196E1	2.68296E1	2.23869E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.41405E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.19468E-1	-7.99274E-1	-9.13172E0	-9.1435E0	4.05312E-3	9.64403E-2	2.73279E1	-3.26663E1	-3.26518E1	2.68625E1	2.24764E-9	2.51603E-3	2.51603E-3	6.31798E-3	2.41269E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.19564E-1	-7.98845E-1	-9.13174E0	-9.14361E0	4.02927E-3	9.61781E-2	2.7352E1	-3.26458E1	-3.26524E1	2.68424E1	2.24109E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40499E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.19612E-1	-7.98893E-1	-9.13184E0	-9.14352E0	4.24385E-3	9.59873E-2	2.7337E1	-3.26555E1	-3.26508E1	2.68268E1	2.23915E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.41546E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.19707E-1	-7.99131E-1	-9.13191E0	-9.14354E0	4.14848E-3	9.58204E-2	2.73297E1	-3.26615E1	-3.2641E1	2.68082E1	2.23678E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.41405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.19588E-1	-7.98559E-1	-9.13191E0	-9.14378E0	4.26769E-3	9.60827E-2	2.73511E1	-3.26437E1	-3.26673E1	2.68364E1	2.23818E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.41127E-2