[Scan]
initial_time=2016-01-15T21:01:36
final_time=2016-01-15T21:01:56
ip_count=19
run=1023
dataset=2
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.19254E-1
ql1_imon=1.37418E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=2.04862E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=5.51724E-10
ql4_vset=
ql4_vmon=-9.14347E0
ql4_imon=3.10183E-11
mult1=-9.71215E-9
mult2=-2.63115E-9
rf_tmon=-3.66002E-3
rf_agc=3.31852E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.73187E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12542E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.87819E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02038E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04303E1
cs_ea1_imon=2.56131E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31849E0
lens1_imon=2.5738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.52777E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.93945E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.3176E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11664E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.35943E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.19034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93716E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.97441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.31684E-8
tplens_vset=1.4E-1
tplens_vmon=1.70572E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26313E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03037E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.5892E-2
ql6_imon=4.18748E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.77507E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34283E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39089E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71594E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.42166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73181E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68308E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.4286E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.77669E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.98521E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.70801E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82722E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=5.90478E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.23501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=5.94804E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.42408E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64914E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30605E1
cs_fil1_imon=9.96035E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62077E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66188E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76234E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22384E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.41546E-2
chamber_ion_pmon=2.23915E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.38579E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.19468E-1	-7.98893E-1	-9.13219E0	-9.14376E0	4.26769E-3	9.61304E-2	2.72999E1	-3.26324E1	-3.25762E1	2.68406E1	2.24012E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.41127E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.19278E-1	-7.99036E-1	-9.13219E0	-9.14366E0	4.17233E-3	9.6035E-2	2.736E1	-3.2656E1	-3.26447E1	2.68213E1	2.24388E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.41269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.19325E-1	-7.98702E-1	-9.13205E0	-9.14369E0	4.12464E-3	9.61065E-2	2.73271E1	-3.27025E1	-3.26324E1	2.6847E1	2.23399E-9	2.51843E-3	2.51843E-3	6.32679E-3	2.41301E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.19302E-1	-7.98726E-1	-9.13222E0	-9.14333E0	4.41074E-3	9.64642E-2	2.73478E1	-3.26915E1	-3.26128E1	2.68689E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.19254E-1	-7.98631E-1	-9.13177E0	-9.1434E0	4.26769E-3	9.6488E-2	2.72979E1	-3.26759E1	-3.26326E1	2.68511E1	2.24207E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.19302E-1	-7.98512E-1	-9.13212E0	-9.1433E0	4.60148E-3	9.64403E-2	2.73249E1	-3.26452E1	-3.26206E1	2.68768E1	2.2406E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.4223E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.19206E-1	-7.98583E-1	-9.13215E0	-9.14357E0	4.55379E-3	9.63211E-2	2.72973E1	-3.26753E1	-3.26134E1	2.68418E1	2.23764E-9	2.51136E-3	2.51136E-3	6.31299E-3	2.41052E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.19421E-1	-7.98702E-1	-9.13212E0	-9.14342E0	4.48227E-3	9.62257E-2	2.73159E1	-3.26422E1	-3.25755E1	2.6843E1	2.23623E-9	2.5199E-3	2.5199E-3	6.27461E-3	2.41127E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.19516E-1	-7.98893E-1	-9.13217E0	-9.14347E0	4.36306E-3	9.6035E-2	2.73417E1	-3.26402E1	-3.26024E1	2.68316E1	2.23964E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.40788E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.19421E-1	-7.98941E-1	-9.13208E0	-9.1435E0	4.3869E-3	9.64165E-2	2.73754E1	-3.26675E1	-3.26146E1	2.68034E1	2.24597E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.19564E-1	-7.99036E-1	-9.13203E0	-9.14373E0	4.19617E-3	9.60588E-2	2.73315E1	-3.26687E1	-3.26392E1	2.684E1	2.23526E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.41546E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.19588E-1	-7.9906E-1	-9.13188E0	-9.14369E0	4.43459E-3	9.61781E-2	2.72997E1	-3.26897E1	-3.26242E1	2.68154E1	2.24347E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.40994E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.19302E-1	-7.98941E-1	-9.13217E0	-9.14376E0	4.45843E-3	9.61304E-2	2.73561E1	-3.26782E1	-3.26156E1	2.68099E1	2.23915E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.40708E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.19397E-1	-7.99036E-1	-9.13179E0	-9.14333E0	4.24385E-3	9.64642E-2	2.72943E1	-3.26008E1	-3.26386E1	2.6837E1	2.23583E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.41405E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.19516E-1	-7.99203E-1	-9.13188E0	-9.14357E0	4.3869E-3	9.64165E-2	2.73093E1	-3.26506E1	-3.26374E1	2.68328E1	2.2372E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.40708E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.19612E-1	-7.99036E-1	-9.13181E0	-9.14357E0	4.50611E-3	9.62019E-2	2.72985E1	-3.26308E1	-3.2608E1	2.67644E1	2.23818E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.40918E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.19492E-1	-7.98941E-1	-9.13212E0	-9.14314E0	4.17233E-3	9.61542E-2	2.7391E1	-3.26951E1	-3.26014E1	2.68743E1	2.23964E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.41405E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.19373E-1	-7.99251E-1	-9.13215E0	-9.14323E0	4.1008E-3	9.61304E-2	2.7348E1	-3.26863E1	-3.26434E1	2.68134E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41337E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.19325E-1	-7.99155E-1	-9.13236E0	-9.14335E0	4.07696E-3	9.64165E-2	2.73153E1	-3.26573E1	-3.25912E1	2.68112E1	2.23773E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.41199E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.19254E-1	-7.99036E-1	-9.13222E0	-9.14347E0	4.07696E-3	9.5892E-2	2.73181E1	-3.26809E1	-3.26313E1	2.68308E1	2.23915E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.41546E-2