[Scan]
initial_time=2016-01-15T21:02:30
final_time=2016-01-15T21:02:49
ip_count=19
run=1023
dataset=2
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.18753E-1
ql1_imon=1.3718E-8
ql2_vset=
ql2_vmon=-7.99322E-1
ql2_imon=2.00707E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=4.49657E-10
ql4_vset=
ql4_vmon=-9.14347E0
ql4_imon=3.17693E-11
mult1=-9.42733E-9
mult2=-2.68069E-9
rf_tmon=-3.99571E-3
rf_agc=3.23302E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.71803E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67524E0
bslens_imon=2.41818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19945E1
lens5a_imon=1.98942E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05085E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54379E1
cs_ef1b_imon=2.86875E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04725E1
cs_ea1_imon=2.56644E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33461E0
lens1_imon=2.6863E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64858E1
os_ef1alow_imon=2.9799E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.035E1
cs_ea2_imon=1.52148E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.96306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.31387E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11067E1
os_restr1_imon=4.26473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15171E1
os_ea1_imon=2.3703E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63723E1
os_ef1bup_imon=3.08993E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=1.20524E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02333E1
cs_anode1_imon=2.97054E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.31552E-8
tplens_vset=1.4E-1
tplens_vmon=1.66225E0
tplens_imon=-4.83471E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26585E1
iondef3_imon=1.49357E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26116E1
iondef2_imon=1.56262E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03051E2
lens6_imon=2.98118E-4
ql6_vset=1.0E-1
ql6_vmon=9.61304E-2
ql6_imon=4.1509E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26434E0
ionrepsh_imon=1.78116E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34074E1
lens5b_imon=2.15544E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7447E1
cs_ef2b_imon=3.13147E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40147E0
os_ea2_imon=-6.15698E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00685E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71227E1
cs_ef2a_imon=3.15805E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08263E0
os_ef2alow_imon=-2.57057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06988E-1
os_ef2bup_imon=-5.04816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11248E1
os_restr2_imon=3.43911E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.2688E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01834E1
cs_anode2_imon=2.23251E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.1068E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.10674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.39491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.7662E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15883E0
cs_ionaccel_imon=-1.7734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57073E1
einzel_imon=7.8338E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-7.89104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82708E2
mask1_imon=2.39107E-4
mask2_vset=0.0E0
mask2_vmon=-1.86481E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.69256E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.32254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.43913E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37597E0
defgridb_imon=6.14257E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.37717E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07473E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30639E1
cs_fil1_imon=9.94037E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62347E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98975E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90296E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37181E-1
cs_fil2_imon=-2.52527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31711E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22598E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.40708E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6687E-1
res40_imon=-2.78016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.1923E-1	-7.98798E-1	-9.13203E0	-9.14326E0	4.36306E-3	9.61065E-2	2.73243E1	-3.26123E1	-3.26469E1	2.68109E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41546E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.19373E-1	-7.98798E-1	-9.13184E0	-9.14319E0	4.55379E-3	9.61304E-2	2.73246E1	-3.26307E1	-3.26095E1	2.68514E1	2.24235E-9	2.51723E-3	2.51723E-3	6.3275E-3	2.42427E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.19468E-1	-7.98821E-1	-9.13186E0	-9.14328E0	4.50611E-3	9.63211E-2	2.73262E1	-3.26972E1	-3.26186E1	2.68395E1	2.24347E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.41199E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.19421E-1	-7.98893E-1	-9.13196E0	-9.14333E0	4.41074E-3	9.60588E-2	2.73006E1	-3.26228E1	-3.26082E1	2.68569E1	2.2323E-9	2.51783E-3	2.51783E-3	6.29185E-3	2.40742E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.19397E-1	-7.98893E-1	-9.13231E0	-9.14321E0	4.55379E-3	9.6035E-2	2.7334E1	-3.26655E1	-3.26543E1	2.68348E1	2.24064E-9	2.52106E-3	2.52106E-3	6.31902E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.19182E-1	-7.98988E-1	-9.13231E0	-9.14316E0	4.26769E-3	9.63449E-2	2.73548E1	-3.26828E1	-3.26406E1	2.68363E1	2.2406E-9	2.52599E-3	2.52599E-3	6.30202E-3	2.40788E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.19254E-1	-7.98941E-1	-9.1321E0	-9.14297E0	4.22001E-3	9.61542E-2	2.73165E1	-3.26218E1	-3.26128E1	2.68545E1	2.23662E-9	2.51793E-3	2.51793E-3	6.32222E-3	2.4096E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.19254E-1	-7.98988E-1	-9.132E0	-9.14333E0	4.14848E-3	9.62257E-2	2.73069E1	-3.26573E1	-3.26506E1	2.68328E1	2.23429E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.40708E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.19612E-1	-7.9875E-1	-9.13219E0	-9.14321E0	4.33922E-3	9.65118E-2	2.73125E1	-3.26368E1	-3.26454E1	2.68591E1	2.23818E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.41337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.19349E-1	-7.98988E-1	-9.13248E0	-9.14321E0	4.50611E-3	9.61065E-2	2.73223E1	-3.26618E1	-3.26406E1	2.684E1	2.23598E-9	2.51886E-3	2.51886E-3	6.3282E-3	2.3995E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.19254E-1	-7.98941E-1	-9.13246E0	-9.14319E0	4.33922E-3	9.6035E-2	2.7323E1	-3.26568E1	-3.26238E1	2.68496E1	2.23356E-9	2.5199E-3	2.5199E-3	6.33211E-3	2.41573E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.19206E-1	-7.98798E-1	-9.13219E0	-9.14297E0	4.62532E-3	9.58443E-2	2.73574E1	-3.26704E1	-3.26326E1	2.68633E1	2.23612E-9	2.51623E-3	2.51623E-3	6.31744E-3	2.40507E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.19135E-1	-7.98774E-1	-9.13217E0	-9.14333E0	4.50611E-3	9.65595E-2	2.73344E1	-3.26778E1	-3.26134E1	2.6872E1	2.22783E-9	2.5195E-3	2.5195E-3	6.28329E-3	2.41876E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.19802E-1	-7.98821E-1	-9.13217E0	-9.14376E0	4.45843E-3	9.6488E-2	2.73486E1	-3.26517E1	-3.26897E1	2.68424E1	2.23883E-9	2.5157E-3	2.5157E-3	6.29771E-3	2.42515E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.19111E-1	-7.9906E-1	-9.13229E0	-9.14323E0	4.36306E-3	9.62973E-2	2.73177E1	-3.26969E1	-3.25996E1	2.68526E1	2.23623E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.41546E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.19397E-1	-7.99012E-1	-9.13231E0	-9.14338E0	4.41074E-3	9.61781E-2	2.73123E1	-3.26488E1	-3.26464E1	2.68304E1	2.23526E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.41546E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.19468E-1	-7.99131E-1	-9.13212E0	-9.14357E0	4.41074E-3	9.62257E-2	2.73316E1	-3.26956E1	-3.26254E1	2.68184E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.19302E-1	-7.99203E-1	-9.13217E0	-9.14352E0	4.26769E-3	9.62734E-2	2.72865E1	-3.26506E1	-3.26609E1	2.68605E1	2.23678E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.42024E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.19349E-1	-7.99227E-1	-9.132E0	-9.14338E0	4.43459E-3	9.62734E-2	2.73291E1	-3.26951E1	-3.26242E1	2.68354E1	2.24109E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.41127E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.18753E-1	-7.99322E-1	-9.132E0	-9.14347E0	4.76837E-3	9.61304E-2	2.73333E1	-3.26116E1	-3.26585E1	2.68514E1	2.24012E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.40708E-2