[Scan]
initial_time=2016-01-15T21:03:23
final_time=2016-01-15T21:03:42
ip_count=19
run=1023
dataset=2
scan=101
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.19111E-1
ql1_imon=1.37423E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=2.04513E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=4.04704E-10
ql4_vset=
ql4_vmon=-9.14352E0
ql4_imon=4.42505E-11
mult1=-9.31021E-9
mult2=-2.64878E-9
rf_tmon=-4.13784E-3
rf_agc=3.36866E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.73054E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19358E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=2.86557E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.01822E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04057E1
cs_ea1_imon=2.59267E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37076E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.50722E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.94414E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.32278E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1179E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.37565E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.16186E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.97045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.33546E-8
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26036E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26408E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.9792E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=4.14252E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30016E0
ionrepsh_imon=1.73974E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74958E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36025E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06188E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.14992E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.42743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.25362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68632E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.42251E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.74551E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56675E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82741E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.77575E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.11585E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.39381E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06704E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6493E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=9.9544E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6245E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.41966E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.63497E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.19159E-1	-7.98726E-1	-9.13219E0	-9.14373E0	4.24385E-3	9.61304E-2	2.73399E1	-3.26185E1	-3.26196E1	2.68226E1	2.23818E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.41966E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.19135E-1	-7.98965E-1	-9.13217E0	-9.14359E0	3.83854E-3	9.62973E-2	2.73126E1	-3.26104E1	-3.26678E1	2.68364E1	2.23544E-9	2.51603E-3	2.51603E-3	6.30212E-3	2.41269E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.19421E-1	-7.9906E-1	-9.13212E0	-9.14364E0	4.14848E-3	9.64642E-2	2.73455E1	-3.26442E1	-3.26175E1	2.68024E1	2.23105E-9	2.52521E-3	2.52521E-3	6.3074E-3	2.40974E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.19612E-1	-7.99227E-1	-9.13212E0	-9.14359E0	4.12464E-3	9.65118E-2	2.73105E1	-3.26753E1	-3.26272E1	2.68454E1	2.23782E-9	2.51679E-3	2.51679E-3	6.31779E-3	2.40543E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.19564E-1	-7.99036E-1	-9.13184E0	-9.14357E0	4.1008E-3	9.63926E-2	2.73321E1	-3.2617E1	-3.26428E1	2.67884E1	2.23526E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.40708E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.19468E-1	-7.99036E-1	-9.13191E0	-9.14381E0	4.12464E-3	9.61781E-2	2.73496E1	-3.2635E1	-3.26615E1	2.68436E1	2.24109E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.19445E-1	-7.99131E-1	-9.13165E0	-9.14369E0	4.19617E-3	9.62019E-2	2.73448E1	-3.26543E1	-3.26278E1	2.6855E1	2.24109E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.42177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.19421E-1	-7.99298E-1	-9.13203E0	-9.14342E0	3.98159E-3	9.64165E-2	2.73219E1	-3.26819E1	-3.26068E1	2.6828E1	2.2372E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.42387E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.19492E-1	-7.9937E-1	-9.13188E0	-9.14357E0	4.05312E-3	9.62734E-2	2.73598E1	-3.26681E1	-3.26543E1	2.68466E1	2.23623E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.40918E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.19635E-1	-7.99394E-1	-9.13231E0	-9.14345E0	4.05312E-3	9.61781E-2	2.7346E1	-3.26206E1	-3.26374E1	2.68304E1	2.24109E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.40708E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.19349E-1	-7.99203E-1	-9.13224E0	-9.14361E0	4.19617E-3	9.59873E-2	2.73417E1	-3.2644E1	-3.2632E1	2.68484E1	2.24207E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.41546E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.19445E-1	-7.99322E-1	-9.13241E0	-9.14342E0	3.86238E-3	9.62257E-2	2.73219E1	-3.2623E1	-3.26242E1	2.68659E1	2.23623E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41756E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.19373E-1	-7.99155E-1	-9.13236E0	-9.14373E0	4.02927E-3	9.62496E-2	2.73352E1	-3.26596E1	-3.26425E1	2.67688E1	2.24402E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41127E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.19564E-1	-7.99131E-1	-9.13217E0	-9.14371E0	4.02927E-3	9.62734E-2	2.73327E1	-3.26933E1	-3.2638E1	2.68532E1	2.24538E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.40994E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.19206E-1	-7.98821E-1	-9.13215E0	-9.1435E0	4.02927E-3	9.61065E-2	2.73455E1	-3.26517E1	-3.26242E1	2.68213E1	2.2372E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.41337E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.18992E-1	-7.9937E-1	-9.13208E0	-9.14321E0	3.83854E-3	9.5892E-2	2.73529E1	-3.26272E1	-3.26236E1	2.68163E1	2.23764E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.40626E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18872E-1	-7.98726E-1	-9.13188E0	-9.1434E0	3.60012E-3	9.61781E-2	2.73039E1	-3.26254E1	-3.25806E1	2.68442E1	2.24155E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.40994E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.18872E-1	-7.98893E-1	-9.1321E0	-9.14326E0	3.91006E-3	9.61542E-2	2.73564E1	-3.26803E1	-3.26703E1	2.68436E1	2.2406E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.41405E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.19016E-1	-7.9875E-1	-9.13208E0	-9.14354E0	3.98159E-3	9.6035E-2	2.73448E1	-3.27257E1	-3.26518E1	2.68502E1	2.24155E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.40788E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19111E-1	-7.9906E-1	-9.13224E0	-9.14352E0	3.98159E-3	9.64403E-2	2.73375E1	-3.26408E1	-3.26036E1	2.68632E1	2.24012E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.41966E-2