[Scan]
initial_time=2016-01-15T21:03:50
final_time=2016-01-15T21:04:09
ip_count=19
run=1023
dataset=2
scan=102
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.18944E-1
ql1_imon=1.37319E-8
ql2_vset=
ql2_vmon=-7.99131E-1
ql2_imon=1.95054E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=4.83739E-10
ql4_vset=
ql4_vmon=-9.14347E0
ql4_imon=4.6885E-11
mult1=-9.75243E-9
mult2=-2.66072E-9
rf_tmon=-6.62733E-3
rf_agc=3.09423E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.66881E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.0482E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.85548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0441E1
cs_ea1_imon=2.54928E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40795E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65233E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.52462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.95279E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.32539E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14745E1
os_ea1_imon=2.32665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=1.19652E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.97982E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.33488E-8
tplens_vset=1.4E-1
tplens_vmon=1.65913E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25599E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03069E2
lens6_imon=2.98017E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.13457E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.8106E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43379E0
os_ea2_imon=-8.12101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.1474E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.42923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.27451E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.2338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73532E1
iondef1_imon=1.11228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.42936E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.77252E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.75006E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82727E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=6.68437E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.4897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39079E0
defgridb_imon=5.80659E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=9.43387E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30686E1
cs_fil1_imon=9.95855E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66557E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71036E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22616E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41817E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69503E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.19278E-1	-7.99108E-1	-9.13224E0	-9.1435E0	4.33922E-3	9.59873E-2	2.73499E1	-3.26378E1	-3.26354E1	2.68268E1	2.23869E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.40788E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.19349E-1	-7.99346E-1	-9.13236E0	-9.14361E0	4.12464E-3	9.60588E-2	2.73688E1	-3.26676E1	-3.26107E1	2.68526E1	2.23773E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.41611E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.19087E-1	-7.9906E-1	-9.13236E0	-9.14338E0	4.12464E-3	9.64403E-2	2.73448E1	-3.26808E1	-3.26227E1	2.68362E1	2.23566E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.41479E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.19135E-1	-7.99084E-1	-9.13217E0	-9.14333E0	4.17233E-3	9.64403E-2	2.73326E1	-3.26089E1	-3.2637E1	2.68294E1	2.23922E-9	2.51854E-3	2.51854E-3	6.29721E-3	2.41207E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.19468E-1	-7.98917E-1	-9.13227E0	-9.14347E0	4.52995E-3	9.61304E-2	2.73159E1	-3.2641E1	-3.26218E1	2.68642E1	2.23963E-9	2.52362E-3	2.52362E-3	6.28511E-3	2.41265E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.19564E-1	-7.98774E-1	-9.13231E0	-9.14345E0	4.33922E-3	9.6035E-2	2.72895E1	-3.26182E1	-3.26164E1	2.68454E1	2.24012E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.41127E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.19468E-1	-7.98965E-1	-9.13246E0	-9.14338E0	3.93391E-3	9.60827E-2	2.73021E1	-3.2647E1	-3.26554E1	2.68617E1	2.23818E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.41337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.19206E-1	-7.98965E-1	-9.13253E0	-9.14323E0	4.12464E-3	9.59635E-2	2.73122E1	-3.26455E1	-3.26472E1	2.68244E1	2.23623E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.40708E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.18825E-1	-7.99179E-1	-9.13248E0	-9.14335E0	4.07696E-3	9.63449E-2	2.73051E1	-3.26464E1	-3.26362E1	2.6843E1	2.23869E-9	2.51203E-3	2.51203E-3	6.30202E-3	2.40788E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.18896E-1	-7.99251E-1	-9.13217E0	-9.14326E0	4.07696E-3	9.59396E-2	2.73297E1	-3.26314E1	-3.2605E1	2.68088E1	2.23429E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.41127E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.18968E-1	-7.99131E-1	-9.13203E0	-9.14364E0	4.14848E-3	9.60588E-2	2.7325E1	-3.26106E1	-3.26169E1	2.68132E1	2.24597E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.41756E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.18801E-1	-7.99203E-1	-9.13239E0	-9.14369E0	4.02927E-3	9.61304E-2	2.73544E1	-3.26772E1	-3.26017E1	2.68381E1	2.24036E-9	2.51918E-3	2.51918E-3	6.32371E-3	2.42204E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.19111E-1	-7.99108E-1	-9.13239E0	-9.14361E0	3.95775E-3	9.61781E-2	2.73562E1	-3.25984E1	-3.259E1	2.67814E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.19063E-1	-7.99537E-1	-9.13217E0	-9.14354E0	4.26769E-3	9.58443E-2	2.73165E1	-3.26651E1	-3.26717E1	2.68036E1	2.23526E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.41337E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.18849E-1	-7.99346E-1	-9.13217E0	-9.14345E0	4.24385E-3	9.60588E-2	2.73261E1	-3.26422E1	-3.26855E1	2.67631E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.40499E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18896E-1	-7.9937E-1	-9.13231E0	-9.1434E0	4.36306E-3	9.63449E-2	2.73574E1	-3.27215E1	-3.26038E1	2.6831E1	2.23332E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41756E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18801E-1	-7.99131E-1	-9.13227E0	-9.14347E0	4.36306E-3	9.62257E-2	2.73562E1	-3.26398E1	-3.25581E1	2.6792E1	2.23678E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.40173E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.18872E-1	-7.99251E-1	-9.13208E0	-9.1434E0	4.36306E-3	9.60588E-2	2.73098E1	-3.26797E1	-3.26101E1	2.68208E1	2.24359E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.41693E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18968E-1	-7.99036E-1	-9.13234E0	-9.14342E0	4.62532E-3	9.61304E-2	2.73399E1	-3.26679E1	-3.26307E1	2.68148E1	2.23869E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.41199E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18944E-1	-7.99131E-1	-9.13243E0	-9.14347E0	4.673E-3	9.62496E-2	2.73532E1	-3.26927E1	-3.25599E1	2.68196E1	2.23964E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.41817E-2